Automated focusing system for tracking specimen surface with a configurable focus offset

Patent metadata

Field	Value
Publication number	US-11592653-B2
Application number	US-202016836787-A
Country	US
Kind code	B2
Filing date	Mar 31, 2020
Priority date	Apr 5, 2019
Publication date	Feb 28, 2023
Grant date	Feb 28, 2023

Abstract

An auto-focusing system is disclosed. The system includes an illumination source. The system includes an aperture. The system includes a projection mask. The system includes a detector assembly. The system includes a relay system, the relay system being configured to optically couple illumination transmitted through the projection mask to an imaging system. The relay system also being configured to project one or more patterns from the projection mask onto a specimen and transmit an image of the projection mask from the specimen to the detector assembly. The system includes a controller including one or more processors configured to execute a set of program instructions. The program instructions being configured to cause the one or more processors to: receive one or more images of the projection mask from the detector assembly and determine quality of the one or more images of the projection mask.

First claim

What is claimed:

1. An auto-focusing system comprising:
a projection mask image quality (PMIQ) auto-focusing system comprising:
an illumination source;
a first aperture;
a first projection mask; and
a first PMIQ detector assembly and a second PMIQ detector assembly;

a normalized s-curve (NSC) auto-focusing system comprising:
an illumination source;
a second aperture;
a second projection mask; and
a first NSC detector assembly and a second NSC detector assembly;

a relay system, wherein the relay system is configured to optically couple illumination from the PMIQ autofocusing system and the NSC auto-focusing system to an imaging system,
wherein the relay system is configured to project one or more patterns from the first projection mask onto a specimen disposed on a stage assembly of the imaging system and transmit an image of the first projection mask from the specimen to the first PMIQ detector assembly and the second PMIQ detector assembly,
wherein the relay system is configured to project one or more patterns from the second projection mask onto the specimen disposed on the stage assembly of the imaging system and transmit an image of the second projection mask from the specimen to the first NSC detector assembly and the second NSC detector assembly; and
a controller including one or more processors, wherein the one or more processors are configured to execute a set of program instructions stored in non-transitory memory, wherein the program instructions are configured to cause the one or more processors to:
receive one or more signals from the first PMIQ detector assembly, the second PMIQ detector assembly, the first NSC detector assembly, and the second NSC detector assembly; and
execute a dual control loop based on the one or more signals from the first PMIQ detector assembly, the second PMIQ detector assembly, the first NSC detector assembly, and the second NSC detector assembly to adjust the stage assembly to maintain focus of the imaging system.

2. The system of claim 1 , wherein the first projection mask and the second projection mask are positioned such that the first projection mask is projected in a first half of a field of view and the second projection mask is projected in a second half of the field of view to mitigate optical cross-talk between the PMIQ autofocusing system and the NSC autofocusing system.

3. The system of claim 2 , wherein at least one of a grid mask pattern, a grid mask pitch, or a grid mask orientation of the first projection mask is different from the second projection mask.

4. The system of claim 1 , wherein the illumination source of the PMIQ autofocusing system is configured to operate in a continuous ON-state.

5. They system of claim 1 , wherein the illumination source of the NSC autofocusing system includes a first illumination channel and a second illumination channel, wherein an output of the illumination source of the NSC autofocusing system is time-multiplexed to mitigate cross-talk between the first illumination channel and the second illumination channel.

6. The system of claim 1 , wherein the NSC autofocusing system has a reduced numerical aperture relative to the PMIQ autofocusing system in at least one of an illumination pathway or a collection pathway.

7. The system of claim 6 , wherein the NSC autofocusing system has an extended s-curve linear range.

8. The system of claim 6 , wherein the NSC autofocusing system has a numerical aperture less than 0.9 NA.

9. The system of claim 8 , wherein the NSC autofocusing system has a numerical aperture between 0.4 to 0.6 NA.

Assignees

• Kla Corp

Inventors

• Liu Xiumei
• Cao Kai
• Wallingford Richard
• Giusti Matthew
• Bruguier Brooke

Classifications

• G02B21/245 Primary

  using auxiliary sources, detectors · CPC title

• G02B21/0016

  Technical microscopes, e.g. for inspection or measuring in industrial production processes · CPC title

• G02B21/0032

  Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06) · CPC title

• G02B21/008

  Details of detection or image processing, including general computer control · CPC title

• G03F7/7065

  Defects, e.g. optical inspection of patterned layer for defects · CPC title