Display apparatus and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-11588141-B2
Application number	US-202017110138-A
Country	US
Kind code	B2
Filing date	Dec 2, 2020
Priority date	Jan 20, 2020
Publication date	Feb 21, 2023
Grant date	Feb 21, 2023

Abstract

In a method of manufacturing a display apparatus, the method includes: preparing a support substrate; forming a metal oxide layer on a surface of the support substrate, the metal oxide layer comprising first charges; forming a debonding layer on a surface of the metal oxide layer, the debonding layer comprising second charges opposite to the first charges; forming a flexible substrate on a surface of the debonding layer; forming a display element and a thin film encapsulation layer on a surface of the flexible substrate, the display element comprising a thin film transistor and an organic light-emitting diode; and isolating the flexible substrate from the support substrate.

First claim

What is claimed is:

1. A method of manufacturing a display apparatus, the method comprising:
preparing a support substrate;
forming a metal oxide layer on a surface of the support substrate, the metal oxide layer comprising first charges;
forming a debonding layer on a surface of the metal oxide layer, the debonding layer comprising second charges opposite to the first charges;
forming a flexible substrate on a surface of the debonding layer;
forming a display element and a thin film encapsulation layer on a surface of the flexible substrate, the display element comprising a thin film transistor and an organic light-emitting diode; and
isolating the flexible substrate from the support substrate by removing the support substrate, the metal oxide layer, and a first portion of the debonding layer, with a second portion of the debonding layer remaining on the flexible substrate.

2. The method of claim 1 , wherein, in isolating the flexible substrate from the support substrate, the flexible substrate is isolated from the support substrate based on the debonding layer.

3. The method of claim 2 , wherein, in isolating the flexible substrate from the support substrate, the debonding layer at least partially remains on an opposite surface of the flexible substrate.

4. The method of claim 1 , wherein the support substrate comprises the second charges.

5. A method of manufacturing a display apparatus, the method comprising:
irradiating plasma onto the support substrate;
forming a metal oxide layer on a surface of the support substrate, the metal oxide layer comprising first charges;
forming a debonding layer on a surface of the metal oxide layer, the debonding layer comprising second charges opposite to the first charges;
forming a flexible substrate on a surface of the debonding layer;
forming a display element and a thin film encapsulation layer on a surface of the flexible substrate, the display element comprising a thin film transistor and an organic light-emitting diode; and
isolating the flexible substrate from the support substrate;
wherein the support substrate comprises the second charges.

6. The method of claim 1 , wherein the metal oxide layer comprises at least one metal oxide material selected from the group consisting of silicon oxide (SiO 2 ), manganese oxide (MnO 2 ), zirconium oxide (ZrO 2 ), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), indium tin oxide (ITO), chromium oxide (CrO 3 ), iron oxide (Fe 3 O 4 ), lead oxide (PbO), nickel oxide (NiO), cadmium oxide (CdO), or magnesium oxide (MgO).

7. The method of claim 6 , wherein, in the forming of the metal oxide layer, the metal oxide layer is formed on the support substrate to a thickness of 80 Angstroms (Å) to 120 Å.

8. The method of claim 1 , wherein the debonding layer comprises graphene oxide.

9. The method of claim 8 , wherein in the forming of the debonding layer, the debonding layer is formed on the metal oxide layer to a thickness of 30 Angstroms (Å) to 50 Å.

10. The method of claim 8 , wherein, in the forming of the debonding layer, the debonding layer has an adhesive force of 2 gram-force/inch (gf/in) to 5 gf/in.

11. The method of claim 8 , wherein, in the forming of the debonding layer, the debonding layer is formed by at least one of spray coating, spin coating, screen coating, offset printing, inkjet printing, pad printing, knife coating, kiss coating, gravure coating, brushing, ultrasonic micronized spray coating, or spray-mist spray coating.

12. The method of claim 1 , wherein the first charges include positive charges and the second charges include negative charges.

13. A display apparatus comprising:
a flexible substrate comprising a display area and a non-display area around the display area;
a thin film transistor on a surface of the flexible substrate;
an organic light-emitting diode on the thin film transistor; and
a debonding layer on an opposite surface of the flexible substrate, the debonding layer comprising negative charges, with a first portion of the debonding layer removed from a second portion of the debonding layer that remains on the flexible substrate.

14. The display apparatus of claim 13 , wherein the debonding layer comprises graphene oxide.

15. The display apparatus of claim 14 , wherein the debonding layer is on the opposite surface of the flexible substrate to a thickness of 10 Angstroms (Å) to 30 Å.

16. The display apparatus of claim 14 , wherein the debonding layer has an adhesive force of 2 gram-force (gf/in) to 5 gf/in.

17. The display apparatus of claim 13 , wherein the organic light-emitting diode comprises:
a pixel electrode;
an intermediate layer on the pixel electrode, the intermediate layer comprising an emission layer; and
an opposite electrode on the intermediate layer.

18. The display apparatus of claim 13 , further comprising a storage capacitor comprising:
a lower electrode on the surface of the flexible substrate; and
an upper electrode overlapping the lower electrode.

19. The display apparatus of claim 13 , further comprising a thin film encapsulation layer on the organic light-emitting diode, the thin film encapsulation layer comprising at least one inorganic encapsulation layer and at least one organic encapsulation layer.

20. The display apparatus of claim 13 , wherein the flexible substrate comprises at least one material selected from the group consisting of polyethersulfone, polyacrylate, polyether imide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyarylate, polyimide, polycarbonate, or cellulose acetate propionate.

Assignees

• Samsung Display Co Ltd

Inventors

• Seo Dongkyun
• Kim Hyoungsik
• Shin Heekyun
• Sim Junho

Classifications

• H10K59/8731

  multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers · CPC title

• H10K2102/00

  Constructional details relating to the organic devices covered by this subclass · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• H10K71/80 Primary

  using temporary substrates · CPC title

• H10K77/111 Primary

  Flexible substrates · CPC title