Electrodynamic mass analysis with RF biased ion source

Patent metadata

Field	Value
Publication number	US-11587778-B2
Application number	US-202017088443-A
Country	US
Kind code	B2
Filing date	Nov 3, 2020
Priority date	Nov 3, 2020
Publication date	Feb 21, 2023
Grant date	Feb 21, 2023

Abstract

Provided herein are approaches for performing electrodynamic mass analysis with a radio frequency (RF) biased ion source to reduce ion beam energy spread. In some embodiments, a system may include an ion source including a power supply, the ion source operable to generate a plasma within a chamber housing, and an extraction power assembly including a first power supply and a second power supply electrically coupled with the chamber housing of the ion source, wherein the first power supply and the second power supply are operable to bias the chamber housing of the ion source with a time modulated voltage to extract an ion beam from the ion source. The system may further include an electrodynamic mass analysis (EDMA) assembly operable to receive the ion beam and perform mass analysis on the ion beam.

First claim

What is claimed is:

1. A system, comprising:
an ion source including a power supply, the ion source operable to generate a plasma within a chamber housing;
an extraction power assembly including a first power supply and a second power supply each independently and directly electrically coupled with the chamber housing of the ion source, wherein the first power supply and the second power supply are operable to bias the chamber housing of the ion source with a time modulated voltage to extract an ion beam from the ion source;
an electrodynamic mass analysis (EDMA) assembly operable to receive the ion beam, and perform mass analysis on the ion beam; and
an electrostatic filter positioned downstream of the EDMA assembly, the electrostatic filter operable to receive the ion beam directly from the EDMA assembly, the electrostatic filter including a first plurality of electrodes disposed along a first side of the ion beam and a second plurality of electrodes disposed along a second side of the ion beam.

2. The system of claim 1 , wherein the first power supply is a radio frequency (RF) power supply, and wherein the second power supply is a direct current (DC) power supply.

3. The system of claim 2 , wherein the power supply is an RF power supply, and wherein the ion source is an inductively coupled plasma ion source.

4. The system of claim 1 , the EDMA assembly comprising an enclosure operable to receive an RF voltage signal from an RF voltage assembly to perform mass analysis on the ion beam.

5. The system of claim 1 , wherein the ion beam entering the EDMA assembly has a first ion beam energy spread, wherein the ion beam exiting the EDMA assembly has a second ion beam energy spread, and wherein the second ion beam energy spread is less than the first ion beam energy spread.

6. The system of claim 5 , wherein the first ion beam energy spread is at least two times greater than the second ion beam energy spread.

7. The system of claim 5 , wherein the first ion beam energy spread is at least four times greater than the second ion beam energy spread.

8. The system of claim 1 , further comprising a set of extraction optics disposed between the ion source and the EDMA assembly.

9. The system of claim 8 , wherein the set of extraction optics comprises a suppression electrode adjacent a ground electrode, and wherein the ion beam is received at the EDMA assembly from the ground electrode.

10. An ion implantation system, comprising:
an ion source including a first radio frequency (RF) power supply operable to generate a plasma within a chamber housing;
an extraction power assembly operable to bias the chamber housing to extract an ion beam from the ion source, the extraction power assembly including a second (RF) power supply and a direct current (DC) power supply each independently and directly electrically coupled with the chamber housing;
an electrodynamic mass analysis (EDMA) assembly operable to receive the ion beam and perform mass analysis on the ion beam; and
an electrostatic filter operable to receive the ion beam directly from the EDMA assembly, the electrostatic filter including a first plurality of electrodes disposed along a first side of the ion beam and a second plurality of electrodes disposed along a second side of the ion beam.

11. The ion implantation system of claim 10 , wherein the ion source is an inductively coupled plasma ion source.

12. The ion implantation system of claim 10 , the EDMA assembly comprising:
an enclosure operable to receive an RF voltage signal from an RF voltage assembly to perform mass analysis on the ion beam; and
a first set of electrodes and a second set of electrodes within the enclosure, wherein the first set of electrodes is disposed along a first side of the ion beam and the second set of electrodes is disposed along a second side of the ion beam.

13. The system of claim 10 , wherein the ion beam entering the EDMA assembly has a first ion beam energy spread, wherein the ion beam exiting the EMDA assembly has a second ion beam energy spread, and wherein the second ion beam energy spread is less than the first ion beam energy spread.

14. The system of claim 13 , wherein the first ion beam energy spread is at least two times greater than the second ion beam energy spread.

15. The system of claim 13 , wherein the first ion beam energy spread is at least four times greater than the second ion beam energy spread.

16. The system of claim 10 , further comprising a set of extraction optics disposed between the ion source and the EDMA assembly.

Assignees

• Applied Materials Inc

Inventors

• Likhanskii Alexandre
• Olson Joseph C
• Sinclair Frank
• Kurunczi Peter F

Classifications

• H01J2237/057

  Energy or mass filtering · CPC title

• H01J2237/0817

  Microwaves · CPC title

• H01J49/105

  using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP] · CPC title

• H01J37/3171

  for ion implantation · CPC title

• H01J49/36 Primary

  Radio frequency spectrometers, e.g. Bennett-type spectrometers, Redhead-type spectrometers · CPC title