Method of manufacturing nano gap sensor using residual stress and nano gap sensor manufactured thereby
US-2016341688-A1 · Nov 24, 2016 · US
US11579130B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11579130-B2 |
| Application number | US-201916725455-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 23, 2019 |
| Priority date | Dec 23, 2019 |
| Publication date | Feb 14, 2023 |
| Grant date | Feb 14, 2023 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A hydrogen sensor that efficiently detects hydrogen gas at room temperature comprising a gold decorated reduced graphene oxide/zinc oxide (Au/rGO/ZnO) heterostructured composite, methods for making this sensor and a method for sensitive room temperature detection of hydrogen using the sensor.
Opening claim text (preview).
The invention claimed is: 1. A heterostructured composite comprising reduced graphene oxide (rGO) and flat hexagonal sheets of zinc oxide (ZnO) decorated with gold nanoparticles or with a thin gold film, wherein a weight ratio of rGO:ZnO ranges from 1.2:1 to 1:1.2. 2. The heterostructured composite of claim 1 , wherein the flat hexagonal sheets of ZnO have a diameter ranging from 500-900 nm, a length on each side of about 250 to 500 nm and a thickness ranging from 25 to 100 nm. 3. The heterostructured composite of claim 1 , wherein the flat hexagonal sheets of ZnO have a diameter of about 680-752 nm, a length on each side of about 357-395 nm and a thickness of 59 to 65 nm. 4. The heterostructured composite of claim 1 which is in the form of a sheet comprising a sheet of rGO attached to the flat hexagonal sheets of ZnO decorated with the Au nanoparticles or thin Au film. 5. The heterostructured composite of claim 1 , wherein a weight ratio of rGO:ZnO is about 1:1. 6. The heterostructured composite of claim 1 , wherein the flat hexagonal sheets of ZnO are decorated with gold nanoparticles and the gold nanoparticles comprise about 0.1 to 5 wt % of the heterostructured composite. 7. The heterostructured composite of claim 6 , wherein the gold nanoparticles have an average diameter of 50 nm or less. 8. A hydrogen sensor comprising the heterostructured composite of claim 1 , a substrate to which the heterostructured composite is bound, and electrodes, wherein the hydrogen sensor is configured to measure resistance, conductance, impedance or capacitance of the heterostructured composite. 9. The hydrogen sensor of claim 8 , wherein the electrodes are interdigitated electrodes (IDE). 10. A method of detecting and/or quantifying hydrogen gas in a sample comprising: contacting the hydrogen sensor of claim 8 with the sample, measuring a decrease in one or more of resistance, conductance, impedance, or capacitance of the heterostructured composite occurring when the hydrogen sensor is in contact with the sample. 11. The method of claim 10 , further comprising: irradiating the hydrogen sensor with UV light during said contacting. 12. The method of claim 10 , wherein the sample is a gas. 13. The method of claim 10 wherein the sample is a liquid. 14. The method of claim 10 , wherein said contacting occurs at a temperature not exceeding 100° C. 15. The method of claim 10 , wherein the hydrogen sensor is capable of detecting at least 500 ppm of hydrogen at room temperature (25° C.), wherein a relative difference between a first hydrogen concentration measurement and a second hydrogen concentration measurement is less than 1% or which has a repeatability of at least 99%. 16. A method for making the heterostructured composite of claim 1 comprising preparing ZnO nanorods by a hydrothermal method, irradiating a mixture of graphene oxide (GO) and ZnO nanorods submerged in an aqueous medium with a UV laser for a time and under condition sufficient to reduce the GO to reduced graphene oxide (rGO) sheets, to exfoliate the ZnO nanorods, and to anchor the ZnO nanorods on the rGO sheets to form a heterostructured ZnO/rGO composite, and depositing gold nanoparticles or a thin layer of Au on the heterostructured ZnO/rGO composite. 17. The method of claim 16 , wherein said hydrothermal method used to produce the ZnO nanorods comprises heating an aqueous ethanolic solution of zinc nitrate, sodium hydroxide, and diethylamine at pH in the range of 11-14 and filtering and drying the resulting ZnO nano-rods, wherein said UV laser used to irradiate the mixture of GO and ZnO has a wavelength of about 355 nm, and wherein said depositing a thin layer of Au on a sheet of ZnO/rGO composite is performed by magnetron sputtering. 18. A method of detecting and/or quantifying hydrogen gas in a sample comprising: contacting with the sample a hydrogen sensor comprising: a heterostructured composite comprising reduced graphene oxide (rGO) and flat hexagonal sheets of zinc oxide (ZnO) decorated with gold nanoparticles or with a thin gold film, having a weight ratio of rGO:ZnO in a range of from 1.2:1 to 1:1.2; a substrate to which the heterostructured composite is bound; and electrodes, and measuring a decrease in one or more of resistance, conductance, impedance, or capacitance of the heterostructured composite occurring when the hydrogen sensor is in contact with the sample, wherein the hydrogen sensor is capable of detecting at least 500 ppm of hydrogen in the sample at room temperature.
with ultraviolet light · CPC title
comprising nanoparticles · CPC title
Oxidation · CPC title
Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts · CPC title
H2 · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.