Fail-safe pneumatic lift system

Patent metadata

Field	Value
Publication number	US-11577946-B2
Application number	US-202016988647-A
Country	US
Kind code	B2
Filing date	Aug 8, 2020
Priority date	Aug 8, 2020
Publication date	Feb 14, 2023
Grant date	Feb 14, 2023

Abstract

Apparatus and methods for lifting loads are described. The load lift includes a support frame and a lift assembly with main cylinder and at least one standby cylinder connecting a rotatable cross beam with a clamp plate. A rotary actuator assembly is connected to the lift beam to move the lift assembly out of the way while not in use by rotating the lift assembly from a lift position to a standby position.

First claim

What is claimed is:

1. A load lift comprising:
a support frame having uprights and a cross beam, the uprights extending along a first direction and connected together by the cross beam extending along a second direction; and
a lift assembly comprising:
a lift beam with a lift beam axis extending along the second direction, the lift beam connected to the cross beam and configured to rotate around the lift beam axis between a lift position and a standby position;
a main cylinder with a first end and a second end, the first end connected to the lift beam;
at least one standby cylinder with a first end a second end,

the first end connected to the lift beam; and
a clamp plate connected to the second end of the main cylinder and the second end of the at least one standby cylinder.

2. The load lift of claim 1 , wherein there are two standby cylinders.

3. The load lift of claim 2 , wherein the standby cylinders are on opposing sides of the main cylinder.

4. The load lift of claim 1 , further comprising a spreader bar connected to the clamp plate, the spreader bar configured to cooperatively interact with a process chamber dome.

5. The load lift of claim 4 , wherein the clamp plate has a ball joint on a side of the clamp plate opposite the main cylinder and the spreader bar is connected to the ball joint.

6. The load lift of claim 1 , further comprising a rotary actuator assembly connected to the lift beam and the cross beam, the rotary actuator assembly comprising a mounting bracket connected to the cross beam, a rotary cylinder connected to the mounting bracket and the lift beam and configured so that movement of a piston rod from the rotary cylinder causes the lift beam to rotate around the lift beam axis from the standby position to the lift position.

7. The load lift of claim 6 , wherein when the piston rod of the rotary cylinder is extended from the rotary cylinder, the lift beam is in the lift position and when the piston rod of the rotary cylinder is retracted, the lift beam is in the standby position.

8. The load lift of claim 7 , wherein the mounting bracket is fixedly secured to the cross beam and has a hinged connection with a floating bracket holding the rotary cylinder.

9. The load lift of claim 8 , wherein when the piston rod of the rotary cylinder is extended, the floating bracket rests at an angle offset from perpendicular to the lift beam axis.

10. The load lift of claim 9 , wherein when the piston rod of the rotary cylinder is retracted, the floating bracket rotates around the hinged connection with the mounting bracket to rest at an angle perpendicular to the lift beam axis.

11. The load lift of claim 10 , wherein lateral load on the piston rod of the rotary cylinder is decreased from a fixed connection.

12. The load lift of claim 1 , further comprising a locking lever movable from between a locked position and an unlocked position.

13. The load lift of claim 12 , wherein the locking lever is connected to a fixed hinge and a hard stop to allow the lift assembly to be locked in the standby position.

14. A method of moving a load, the method comprising:
lowering the load by actuating a lift assembly having a lift beam connected to a clamp plate through a main cylinder and at least one standby cylinder, the load connected to the clamp plate;
disconnecting the load from the clamp plate; and
rotating the lift assembly around an axis of the lift beam to a standby position.

15. The method of claim 14 , wherein there are two standby cylinders actuated with the main cylinder, the standby cylinder positioned on opposing sides of the main cylinder.

16. The method of claim 14 , wherein disconnecting the load from the clamp plate further comprises disconnecting the load from a spreader bar connected to the clamp plate, the spreader bar configured to cooperatively interact with the load.

17. The method of claim 14 , wherein rotating the lift assembly around the axis of the lift beam comprises actuating a rotary actuator assembly connected to the lift beam and a cross beam, the rotary actuator assembly comprising a mounting bracket connected to the cross beam, a rotary cylinder connected to the mounting bracket and the lift beam and configured so that movement of a piston rod from the rotary cylinder causes the lift beam to rotate around a lift beam axis from the standby position to the lift position.

18. The method of claim 17 , wherein when the piston rod of the rotary cylinder is extended from the rotary cylinder, the lift beam is in the lift position and when the piston rod of the rotary cylinder is retracted, the lift beam is in the standby position.

19. The method of claim 18 , wherein the mounting bracket is fixedly secured to the cross beam and has a hinged connection with a floating bracket holding the rotary cylinder, and when the piston rod of the rotary cylinder is retracted, the floating bracket rests at an angle offset from perpendicular to the lift beam axis, and when the piston rod of the rotary cylinder extends, the floating bracket rotates around the hinged connection with the mounting bracket to rest at an angle perpendicular to the lift beam axis.

20. A load lift comprising:
a support frame having uprights and a cross beam, the uprights extending along a first direction and connected together by the cross beam extending along a second direction;
a lift assembly comprising:
a lift beam with a lift beam axis extending along the second direction, the lift beam connected to the cross beam and configured to rotate around the lift beam axis between a lift position and a standby position,
a main cylinder with a first end and a second end, the first end connected to the lift beam,
two standby cylinders positioned on opposing sides of the main cylinder, each of the standby cylinders having a first end a second end, the first end connected to the lift beam,
a clamp plate having a top surface and a bottom surface, the top surface connected to the second end of the main cylinder and the second end of the standby cylinders, the bottom surface connected to a ball joint, and
a spreader bar connected to the ball joint of the clamp plate, the spreader bar configured to cooperatively interact with a process chamber dome; and,

a rotary actuator assembly connected to the lift beam, the rotary actuator assembly comprising:
a mounting bracket fixedly secured to the cross beam,
a floating bracket connected to the mounting bracket with a hinged connection,
a rotary cylinder connected to the floating bracket and the lift beam so that a piston rod is connected to the lift beam, and configured so that movement of a piston rod from the rotary cylinder causes the lift beam to rotate around the lift beam axis from the standby position to the lift position.

Assignees

• Applied Materials Inc

Inventors

• Chowdhury Abhishek
• Griffin Kevin
• Doering Kenneth Brian
• Nanjundegowda Santhoshkumar Doddegowdanapalya
• Kosthi Somashekhar
• Ghosh Abhijit

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• B66F3/30 Primary

  with positive brakes or locks · CPC title

• B66F3/247

  pneumatically actuated (B66F3/35 takes precedence) · CPC title

• B66C17/06

  specially adapted for particular purposes, e.g. in foundries, forges; combined with auxiliary apparatus serving particular purposes (B66C17/04 takes precedence) · CPC title