Microfluidic device and detection method therefor

Patent metadata

Field	Value
Publication number	US-11577246-B2
Application number	US-201916631780-A
Country	US
Kind code	B2
Filing date	May 13, 2019
Priority date	Nov 8, 2018
Publication date	Feb 14, 2023
Grant date	Feb 14, 2023

Abstract

A microfluidic device and a detection method for the microfluidic device are provided. The microfluidic device includes a driving substrate configured to drive a movement of a droplet; and a position detector configured to detect a position of the droplet on the driving substrate.

First claim

The invention claimed is:

1. A microfluidic device, comprising:
a driving substrate configured to drive a movement of a droplet, wherein the driving substrate comprises a base substrate, and a plurality of driving electrodes, located on the base substrate and configured to drive the droplet; and
a position detector configured to detect a position of the droplet on the driving substrate, wherein the position detector comprises a plurality of droplet detectors, each of the plurality of droplet detectors further comprises:
an auxiliary electrode between the base substrate and a corresponding driving electrode; and
a piezoelectric material layer, sandwiched between the auxiliary electrode and the corresponding driving electrode, for generating mechanical waves in response to an electrical field applied thereon.

2. The microfluidic device of claim 1 , wherein the position detector comprises:
an auxiliary substrate disposed above the driving substrate, a surface of the auxiliary substrate being allowed to contact with the droplet during operation; and
a first optical assembly, comprising:
a first light source configured to emit light entering the auxiliary substrate from a first side of the auxiliary substrate and cause the light to propagate in the auxiliary substrate in a total reflection manner; and
a first light receiver configured to receive light exiting the auxiliary substrate from a second side of the auxiliary substrate opposite to the first side.

3. The microfluidic device of claim 2 , wherein the position detector further comprises:
a second optical assembly, comprising:
a second light source configured to emit light entering the auxiliary substrate from a third side of the auxiliary substrate and cause the light to propagate in the auxiliary substrate in a total reflection manner; and
a second light receiver configured to receive light exiting the auxiliary substrate from a fourth side of the auxiliary substrate opposite to the third side.

4. The microfluidic device of claim 2 , wherein the driving substrate is configured to receive the droplet thereon, and the auxiliary substrate is spaced apart from the driving substrate to form a passage for the movement of the droplet on the driving substrate.

5. The microfluidic device of claim 4 , wherein the driving substrate further comprises a first hydrophobic layer facing the auxiliary substrate.

6. The microfluidic device of claim 2 , wherein the auxiliary substrate is configured to receive the droplet thereon, and allowing the droplet to move on a surface of the auxiliary substrate facing away from the driving substrate.

7. The microfluidic device of claim 4 , wherein the auxiliary substrate further comprises a second hydrophobic layer facing away from the driving substrate.

8. The microfluidic device of claim 1 , wherein each of the plurality of droplet detectors further comprises:
a reflective layer, disposed at a side of the auxiliary electrode away from the piezoelectric material layer, for reflecting mechanical waves generated by the piezoelectric material.

9. The microfluidic device of claim 8 , wherein the reflective layer is an air layer and/or a Bragg film layer, and the air layer is formed by etching away a sacrificial material to form an air cavity, and the air cavity is filled with inert gas.

10. The microfluidic device of claim 9 , wherein the Bragg film layer has a laminated structure of different acoustic impedance films each having a thickness of ¼ wavelength of mechanical waves generated by the piezoelectric material layer.

11. The microfluidic device of claim 10 , wherein the Bragg film layer has a plurality of patterns arranged in an array on the base substrate.

12. The microfluidic device of claim 11 , wherein the piezoelectric material layer covers, and is in contact with, both the Bragg film layer and the base substrate.

13. The microfluidic device of claim 12 , wherein the driving electrodes are in contact with the piezoelectric material layer, and each one of the driving electrodes is of a dimension larger than a corresponding auxiliary electrode.

14. The microfluidic device of claim 1 , further comprising:
a plurality of first signal lines and a plurality of second signal lines;
a plurality of third signal lines and a plurality of fourth signal lines; and
a reading circuit connected to the second signal lines and the fourth signal lines;
wherein each droplet detector further comprises a first switching element having a gate electrode that is electrically connected to one of the plurality of first signal lines, a first electrode that is electrically connected to one of the plurality of second signal lines, and a second electrode that is electrically connected to the corresponding driving electrode, such that the first switching element enables conduction between the corresponding driving electrode and the reading circuit via the second signal line under the control of the first signal line; and
each droplet detector further comprises a second switching element having a gate electrode that is electrically connected to one of the plurality of third signal lines, a first electrode that is electrically connected to one of the plurality of fourth signal lines, and a second electrode that is electrically connected to the corresponding auxiliary electrode, such that the second switching element enables conduction between the corresponding auxiliary electrode and the reading circuit via the fourth signal line under the control of the third signal line.

Assignees

• Beijing Boe Sensor Technology Co Ltd
• Boe Technology Group Co Ltd

Inventors

• Gu Le
• Cai Peizhi
• Pang Fengchun
• Geng Yue
• Zhao Yingying
• Cui Haochen
• Xiao Yuelei
• Liao Hui
• Yao Wenliang
• Zhao Nan

Classifications

• B01L2300/0816

  Cards, e.g. flat sample carriers usually with flow in two horizontal directions · CPC title

• G01N2021/1729

  Piezomodulation · CPC title

• B01L2300/0645

  Electrodes · CPC title

• G01N21/1717

  with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance · CPC title

• B01L2400/0427

  Electrowetting · CPC title