Nanoparticle synthesis device and nanoparticle synthesis method using same

Patent metadata

Field	Value
Publication number	US-11577214-B2
Application number	US-201916958622-A
Country	US
Kind code	B2
Filing date	Jul 16, 2019
Priority date	Jul 23, 2018
Publication date	Feb 14, 2023
Grant date	Feb 14, 2023

Abstract

The present invention provides a nanoparticle synthesis device capable of improving productivity of nanoparticles by increasing the size of a reaction region of laser pyrolysis of a source gas.

First claim

The invention claimed is:

1. A nanoparticle synthesis device comprising:
a reaction chamber;
a source gas injection unit provided at one side of the reaction chamber and configured to supply a source gas into the reaction chamber;
a laser beam incident unit provided at the other side of the reaction chamber and configured to allow laser beams to be incident on the source gas injected into the reaction chamber; and
a laser beam collision unit provided at a side opposite to the side at which the laser beams are incident in the reaction chamber and configured to allow the laser beams from the laser beam incident unit to collide,
wherein an outer circumferential surface of the laser beam collision unit and an inner circumferential surface of the reaction chamber are spaced apart from each other such that a separation space is formed therebetween,
wherein the source gas flows in the reaction chamber in the direction in which the laser beams are incident.

2. The nanoparticle synthesis device of claim 1 , wherein at least one part of the reaction chamber enables a pyrolysis reaction of the source gas caused by the laser beams to be observed from outside.

3. The nanoparticle synthesis device of claim 1 , wherein the laser beam collision unit is provided with a coating layer formed on at least a part of a surface thereof configured to absorb or reflect the incident laser beams.

4. The nanoparticle synthesis device of claim 1 , wherein multiple cooling fins are provided on an outer circumferential surface of at least a part of the reaction chamber.

5. A nanoparticle synthesis method using the nanoparticle synthesis device according to claim 1 , the method comprising:
supplying a source gas into the reaction chamber;
irradiating the supplied source gas with laser beams; and
growing nanoparticles by inducing a pyrolysis reaction of the source gas by the incident laser beams,
wherein the source gas flows in the reaction chamber in the direction in which the laser beams are incident.

6. The nanoparticle synthesis method of claim 5 , wherein the laser beam is a CO 2 continuous-wave laser beam.

7. The nanoparticle synthesis method of claim 5 , wherein the source gas includes a reactant gas and a carrier gas.

Assignees

• Lg Chemical Ltd
• Knu Industry Cooperation Found

Inventors

• Jung Jin Mi
• Shin Bu Gon
• Kim Seong Beom
• Maeng Seok Ho

Classifications

• B01J19/0013

  Controlling the temperature of the process · CPC title

• B01J2219/0875

  Gas · CPC title

• B01J19/121 Primary

  Coherent waves, e.g. laser beams (lasers per se H01S3/00) · CPC title

• B01J2219/0869

  Feeding or evacuating the reactor · CPC title

• C01B33/029

  by decomposition of monosilane · CPC title