Microwave integrated quantum circuits with cap wafer and methods for making the same
US-10068181-B1 · Sep 4, 2018 · US
US11574229B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11574229-B2 |
| Application number | US-202016916832-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 30, 2020 |
| Priority date | Jan 14, 2020 |
| Publication date | Feb 7, 2023 |
| Grant date | Feb 7, 2023 |
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Provided is a three-dimensional (3D) transmon qubit apparatus including a body portion, a driver, a transmon element disposed in an internal space of the body portion, a first tunable cavity module disposed in the internal space of the body, and comprising a first superconductive metal panel; and a second tunable cavity module disposed in the internal space of the body, and comprising a second superconductive metal panel, wherein the transmon element is disposed between the first superconductive metal panel and the second superconductive metal panel; wherein the first tunable cavity module and the second tunable cavity module are configured to adjust a distance between the first superconductive metal panel and the second superconductive metal panel, and wherein the driver is configured to tune a resonance frequency by adjusting a 3D cavity by adjusting the distance between the first superconductive metal panel and the second superconductive metal panel.
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What is claimed is: 1. A three-dimensional (3D) transmon qubit apparatus comprising: a body portion; a driver; a transmon element disposed in an internal space of the body portion; a first tunable cavity module disposed in the internal space of the body, and comprising a first superconductive metal panel; and a second tunable cavity module disposed in the internal space of the body, and comprising a second superconductive metal panel, wherein the transmon element is disposed between the first superconductive metal panel and the second superconductive metal panel; wherein the first tunable cavity module and the second tunable cavity module are configured to adjust a distance between the first superconductive metal panel and the second superconductive metal panel, and wherein the driver is configured to tune a resonance frequency by adjusting a 3D cavity by adjusting the distance between the first superconductive metal panel and the second superconductive metal panel. 2. The apparatus of claim 1 , wherein the first tunable cavity module comprises: a first opposite panel connected to the first superconductive metal panel through a first sliding coupling portion, the second tunable cavity module comprises: a second opposite panel connected to the second superconductive metal panel through a second sliding coupling portion, the first sliding coupling portion is configured to guide movement of the first superconductive metal panel during adjustment of a distance between the first superconductive metal panel and the first opposite panel, and the second sliding coupling portion is configured to guide movement of the second superconductive metal panel during adjustment of a distance between the second superconductive metal panel and the second opposite panel. 3. The apparatus of claim 2 , wherein each of the first and second sliding coupling portions comprises a pair of rails that are slidingly inserted into, and coupled to, each other. 4. The apparatus of claim 3 , wherein the first sliding coupling portion is provided as a plurality of first sliding coupling portions, and the second sliding coupling portion is provided as a plurality of second sliding coupling portions. 5. The apparatus of claim 2 , wherein the distance between the first superconductive metal panel and the first opposite panel, and the distance between the second superconductive metal panel and the second opposite panel are respectively adjusted by the driver, and a distance between the first superconductive metal panel and the second superconductive metal panel is adjusted. 6. The apparatus of claim 5 , wherein the driver comprises: a first-length variable rail provided in the first tunable cavity module, and configured to adjust the distance between the first superconductive metal panel and the first opposite panel; and a second-length variable rail provided in second first tunable cavity module, and configured to adjust the distance between the second superconductive metal panel and the second opposite panel. 7. The apparatus of claim 6 , wherein the first-length variable rail and the second-length variable rail each comprise a piezoelectric actuator, and a length of the first-length variable rail and the second-length variable rail is changed based on mechanical deformation caused by electrical energy. 8. The apparatus of claim 2 , wherein the first opposite panel and the second opposite panel are respectively disposed on a first end and a second end of the body portion. 9. The apparatus of claim 2 , wherein a distance between the first opposite panel and the second opposite panel is constant. 10. The apparatus of claim 1 , wherein the distance between the first superconductive metal panel and the second superconductive metal panel is adjusted by a power source. 11. The apparatus of claim 10 , wherein the driver comprises: the power source; a first support rail and a second support rail respectively coupled to the first superconductive metal panel and the second superconductive metal panel; and a connection rail structure configured to transmit power between the first support rail and the second support rail, wherein one of the first support rail and the second support rail is directly moved by the power source, and the other of the first support rail and the second support rail is moved by a power from the power source that is transmitted through the connection rail structure. 12. The apparatus of claim 11 , wherein the first support rail is disposed between the power source and the first superconductive metal panel, and the first support rail is configured to move the first superconductive metal panel based on power received from the power source, and the second support rail is configured to move the second superconductive metal panel based on power transmitted from the power source through the connection rail structure. 13. The apparatus of claim 12 , wherein the first support rail and the second support rail each comprise a sawtooth rail, and the connection rail structure comprises a first sawtooth gear and a second sawtooth gear respectively coupled to the sawtooth rail of the first support rail and the sawtooth rail of the second support rail. 14. The apparatus of claim 13 , wherein the connection rail structure comprises: a first shaft that is rotatable based on a driving of the first sawtooth gear engaging with the first support rail when the first support rail is moved based on a driving of the power source; a second shaft that is rotatable and connected to the second sawtooth gear coupled to the sawtooth rail of the second support rail; and a transmission shaft having a first end coupled to a first end of the first shaft through a first vertical gear, and a second end coupled to a second end of the second shaft via a second vertical gear. 15. The apparatus of claim 14 , wherein the first vertical gear and the second vertical gear each comprise crossed helical gears which rotate in opposite directions to each other. 16. The apparatus of claim 11 , wherein the second support rail is located between the power source and the second superconductive metal panel, and is configured to move the second superconductive metal panel based on power received from the power source, and the first support rail is configured to move the first superconductive metal panel based on power transmitted from the power source through the connection rail structure. 17. The apparatus of claim 16 , wherein the first support rail and the second support rail each comprise a sawtooth rail, and the connection rail structure comprises a first sawtooth gear and a second sawtooth gear respectively coupled to the sawtooth rail of the first support rail and the second support rail. 18. The apparatus of claim 16 , wherein the connection rail structure comprises: a first shaft that is rotatable by driving of the second sawtooth gear engaging with the second support rail when the second support rail is moved by a driving of the power source; a second shaft that is rotatable and connected to the first sawtooth gear coupled to the sawtooth rail of the first support rail; and a transmission shaft having a first end coupled to a first end of the first shaft via a first vertical gear, and a second end coupled to a second end of the second shaft via a second vertical gear. 19. The apparatus of claim 18 , wherein the first vertical gear and the second vertical gear each comprise crossed helical gears which rotate in opposite directions to each other.
Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00 · CPC title
for Josephson-effect devices · CPC title
for Josephson-effect devices · CPC title
with electrical input and mechanical output, e.g. functioning as actuators or vibrators · CPC title
Driving or adjusting arrangements; combined with other driving or adjusting arrangements, e.g. of gain control · CPC title
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