MEMS structure and method for detecting a change in a parameter

Patent metadata

Field	Value
Publication number	US-11573131-B2
Application number	US-201916406752-A
Country	US
Kind code	B2
Filing date	May 8, 2019
Priority date	May 9, 2018
Publication date	Feb 7, 2023
Grant date	Feb 7, 2023

Abstract

A MEMS structure including a latch, a first lever, and a second lever. The first lever is designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place. The second lever is designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction.

First claim

The invention claimed is:

1. A MEMS structure, comprising:
a latch;
a first lever designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place;
a second lever designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction, and
wherein the latch is formed as a separate element from the first level and from the second lever.

2. The MEMS structure as claimed in claim 1 , wherein the parameter is temperature, and wherein the first lever and the second lever each comprise at least two material layers designed to flex in the event of changes in the temperature.

3. The MEMS structure as claimed in claim 2 , wherein the first lever is designed to move past the latch as a result of flexure in the event of cooling below a first limit temperature and to latch in place at the latch, and the second lever is designed to move past the first lever in the event of subsequent heating above a second limit temperature and to latch in place at the first lever.

4. The MEMS structure as claimed in claim 1 , wherein the first lever has a first section and a second section, the first section is designed to latch in place at the latch, and the second lever is designed to latch in place at the second section of the first lever.

5. The MEMS structure as claimed in claim 4 , wherein the first and second levers are designed to flex in a direction perpendicular to a substrate plane of a substrate in which the MEMS structure is formed.

6. The MEMS structure as claimed in claim 4 , wherein the first and second levers are designed to flex in a direction parallel to a substrate plane of a substrate in which the MEMS structure is formed.

7. The MEMS structure as claimed in claim 5 , wherein:
the first lever and the second lever each have a length and a width,
a first end in the length direction of the first and second levers is in each case secured to the substrate,
a second end in the length direction of the first and second levers in each case face one another,
the first lever has a width that is greater than a width of the second lever,
the first section is arranged in a first width region of the first lever, and
the second section is arranged in a second width region of the first lever.

8. The MEMS structure as claimed in claim 7 , wherein, in a plan view of the substrate, the latch does not extend beyond the first width region.

9. The MEMS structure as claimed in claim 6 , wherein:
the first lever and the second lever each have a length and a thickness,
a first end, in the length direction, of the first and second levers is in each case secured to the substrate,
a second end, in the length direction, of the first and second levers in each case face one another,
the first lever has a thickness that is greater than a thickness of the second lever,
the first lever and the second lever are arranged at an angle with respect to one another,
the first section is arranged in a first thickness region of the first lever, and
the second section is arranged in a second thickness region of the first lever.

10. The MEMS structure as claimed in claim 9 , wherein the latch extends below the second thickness region of the first lever.

11. The MEMS structure as claimed in claim 8 , wherein the first and second sections of the first lever have identical or different lengths.

12. The MEMS structure as claimed in claim 1 ,
wherein the latch has an elastic latching lever, wherein a free end of the latching lever is deflectable from an initial position by the first lever if the first lever moves past the latch as a result of the change in the parameter in the first direction, and its elasticity brings the latching lever into the initial position again if the first lever has moved past, such that the first lever latches in place on the free end of the latching lever if the change in the parameter in the second direction different than the first direction subsequently takes place.

13. The MEMS structure as claimed in claim 1 , wherein the latch has a sliding surface which leads to a latching end of the latch and along which the first section of the first lever slides if the first lever moves past the latch in the event of the change in the parameter in the first direction, wherein the first lever latches in place at the latching end if the change in the parameter in the second direction different than the first direction subsequently takes place.

14. The MEMS structure as claimed in claim 1 , further comprising:
an electrical circuit, wherein a detectable property of the electrical circuit is altered as a result of the second lever latching in place at the first lever.

15. The MEMS structure as claimed in claim 14 , further comprising:
an electrical switch that is closed if the second lever latches in place at the first lever.

16. The MEMS structure as claimed in claim 14 , wherein the electrical circuit is a radio-frequency resonant circuit and the detectable property is the resonant frequency of the radio-frequency resonant circuit, or wherein the electrical circuit comprises a surface acoustic wave filter, wherein the detectable property is a changed response behavior of the surface acoustic wave filter.

17. An RFID tag comprising a MEMS structure as claimed in claim 1 , wherein a bit of the RFID tag is irreversibly switched if the second lever latches in place at the first lever.

18. The MEMS structure as claimed in claim 1 , wherein in the event of the change in the parameter in one of the first or second direction, the second lever is configured to flex in a direction opposite that of the first lever.

Assignees

• Infineon Technologies Ag

Inventors

• Hainisch Reinhard
• Grille Thomas

Classifications

• G01K5/54

  consisting of pivotally-connected elements · CPC title

• B81B2201/0278

  Temperature sensors · CPC title

• B81B2203/0118

  Cantilevers · CPC title

• G01K5/486 Primary

  using microstructures, e.g. made of silicon (G01K7/015, G01K7/028, G01K7/226, G01K17/006 take precedence) · CPC title

• B81B3/0024

  Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators (electric motors using thermal effects H02N10/00) · CPC title