Substrate processing method and substrate processing device

Patent metadata

Field	Value
Publication number	US-11569085-B2
Application number	US-201816646334-A
Country	US
Kind code	B2
Filing date	Jun 29, 2018
Priority date	Sep 20, 2017
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

The natural oxidation film of polysilicon, which is exposed at a side surface of a recess portion 83 provided in a substrate W, is removed and a thin film 84 of polysilicon is exposed at the side surface of the recess portion 83. Liquid IPA is brought into contact with the thin film 84 of polysilicon after the natural oxidation film of polysilicon is removed. Diluted ammonia water is supplied to the substrate W and the thin film 84 of polysilicon is etched after IPA comes into contact with the thin film 84 of polysilicon.

First claim

What is claimed is:

1. A substrate processing method comprising:
a natural oxidation film removing step of removing a natural oxidation film of a group 14 element exposed at a side surface of a recess portion provided in a substrate and exposing a film of the group 14 element at the side surface of the recess portion;
an IPA supplying step of bringing liquid IPA into contact with the film of the group 14 element after the natural oxidation film of the group 14 element is removed; and
an ammonia water supplying step of supplying ammonia water to the substrate and etching the film of the group 14 element after the IPA comes into contact with the film of the group 14 element.

2. The substrate processing method according to claim 1 , wherein
the IPA supplying step includes a liquid film holding step of holding a liquid film of the IPA at an entire front surface of the substrate while rotating the substrate around a rotation axis perpendicular to a central portion of the substrate at a first rotation speed lower than a second rotation speed, and
the ammonia water supplying step includes an ammonia water discharge starting step of starting discharging the ammonia water to be supplied to the substrate while increasing rotation speed of the substrate from the first rotation speed to the second rotation speed, and an ammonia water discharge continuing step of continuing discharging the ammonia water while keeping the rotation speed of the substrate at the second rotation speed after the ammonia water discharge starting step.

3. The substrate processing method according to claim 1 , wherein a cycle including the IPA supplying step and the ammonia water supplying step is performed a plurality of times.

4. The substrate processing method according to claim 1 , wherein the ammonia water supplying step includes at least one of an accelerating step of raising rotation speed of the substrate in a state where an entire front surface of the substrate is covered with a liquid film of the ammonia water and a flow rate increasing step of increasing a flow rate of the ammonia water discharged toward the front surface of the substrate in a state where the entire front surface of the substrate is covered with the liquid film of the ammonia water.

5. The substrate processing method according to claim 1 , wherein the ammonia water supplying step includes a routine performing step of performing one or more times a routine including a first accelerating step of raising rotation speed of the substrate in a state where a liquid film of the ammonia water exists on a front surface of the substrate, a first decelerating step of lowering, after the first accelerating step, the rotation speed of the substrate in a state where the liquid film of the ammonia water exists on the front surface of the substrate, and a second accelerating step of raising, after the first decelerating step, the rotation speed of the substrate in a state where the liquid film of the ammonia water exists on the front surface of the substrate.

6. The substrate processing method according to claim 1 , wherein the ammonia water supplying step includes a routine performing step of performing one or more times a routine including a first flow rate increasing step of increasing a flow rate of the ammonia water discharged toward a front surface of the substrate in a state where a liquid film of the ammonia water exists on the front surface of the substrate, a first flow rate decreasing step of decreasing, after the first flow rate increasing step, the flow rate of the ammonia water discharged toward the front surface of the substrate in a state where the liquid film of the ammonia water exists on the front surface of the substrate, and a second flow rate increasing step of increasing, after the first decelerating step, the flow rate of the ammonia water discharged toward the front surface of the substrate in a state where the liquid film of the ammonia water exists on the front surface of the substrate.

7. The substrate processing method according to claim 1 , further comprising a closing step of causing a facing surface having an outer diameter equal to or larger than a diameter of the substrate to face a front surface of the substrate and causing an upper end of a tubular guard surrounding the substrate to be located at a height equal to the facing surface or at a height higher than the facing surface while horizontally holding the substrate with the front surface of the substrate directed upward when at least one of the IPA supplying step and the ammonia water supplying step is being performed.

8. The substrate processing method according to claim 1 , wherein the film of the group 14 element extends from an entrance of the recess portion toward a bottom of the recess portion.

9. The substrate processing method according to claim 1 , wherein
the side surface of the recess portion includes a pair of opposing portions that face each other in a width direction perpendicular to a depth direction of the recess portion, and
a length of the film of the group 14 element in the depth direction of the recess portion is longer than a gap between the pair of opposing portions in the width direction of the recess portion.

Assignees

• Screen Holdings Co Ltd

Inventors

• Hinode Taiki
• Fujii Sadamu

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P70/15

  by wet cleaning only (H10P70/52 takes precedence) · CPC title

• B08B3/041

  Cleaning travelling work · CPC title

• H10P70/234 Primary

  the processing being the formation of vias or contact holes · CPC title