Capacitance detection area sensor and conductive pattern sensing apparatus having capacitance detection area sensor

Patent metadata

Field	Value
Publication number	US-11567114-B2
Application number	US-202117203928-A
Country	US
Kind code	B2
Filing date	Mar 17, 2021
Priority date	Sep 18, 2018
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

A capacitance detection area sensor includes capacitance sensor elements arranged in a two-dimensional array, is shaped into an appropriate shape, and capacitively coupled to an external electrode. To the external electrode, a sensing signal having a potential difference is supplied. The first and second sensor output signals are acquired from a capacitance sensor element capacitively coupled to the external electrode, at the timing of the sensing signal being a first signal and being a second signal, respectively. A differential signal is generated from a difference between the acquired first and second sensor output signals, and an image indicating the shape of the external electrode is generated based on the level of the differential signal, in different colors or different tones.

First claim

The invention claimed is:

1. A capacitance detection area sensor, comprising:
a capacitance detection area sensor circuit including a plurality of capacitance sensor elements arranged in a two-dimensional array, each of the capacitance sensor elements including a sensor electrode configured to, when capacitively coupled with a detection target having an electrical charge, detect an electrical charge in accordance with a change in a capacitance, a storage element configured to store an electrical charge of the sensor electrode, and a reset element configured to reset the storage element;
a sensor element selection circuit configured to select a capacitance sensor element to be capacitively coupled sequentially from the capacitance detection area sensor circuit in order of rows or columns;
a reading circuit configured to acquire a first signal at a first potential and a second signal at a second potential different from the first potential, from the selected capacitance sensor;
a first signal storage circuit arranged for each column to store the read-out first signal;
a second signal storage circuit arrange for each column to store the read-out second signal;
a differential signal generating circuit configured to calculate a difference between the stored first signal and the stored second signal to generate a differential signal;
an image processing circuit configured to generate an image representing a shape of the detection target based on a level of the differential signal from the differential signal generating circuit; and
a controller configured to open the reset element of the capacitance detection area sensor circuit after bringing the reset element into conduction for each one of the rows selected from among the two-dimensional array to reset the storage element to set a potential of the sensor electrode to a reference value; acquire the first signal to store the first signal in the first signal storage circuit; after a predetermined period of time, acquire the second signal to store the second signal in the second signal storage circuit; and, after a predetermined period of time, calculate a differential signal of the first signal read from the first signal storage circuit and the second signal read from the second signal storage circuit.

2. The capacitance detection area sensor according to claim 1 , further comprising:
a shield electrode arranged at a distance apart from the sensor electrode to insulate the sensor electrode from a surrounding,
wherein the first potential or the second potential is applied to the shield electrode.

3. A conductive pattern sensing apparatus, comprising:
a sensing signal supplying circuit configured to supply, to a detection target conductive pattern formed on a substrate, a sensing signal having a potential difference between a first potential and a second potential;
a capacitance detection area sensor including a sensor electrode configured to, when capacitively coupled to the conductive pattern, detect an electrical charge in accordance with a change in a capacitance, the capacitance detection area sensor further including capacitance sensor elements arranged in a two-dimensional array, the capacitance sensor elements configured to acquire from the sensor electrode a first sensor output signal and a second sensor output signal at a timing of the sensing signal supplied to the conductive pattern at the first potential and at the second potential, respectively;
a sensor moving mechanism configured to support the capacitance detection area sensor, move the sensor electrode of the capacitance detection area sensor to a sensing target area of the conductive pattern, and bring the sensor electrode close to the conductive pattern;
a controller including a differential signal generating circuit configured to calculate a difference of sensor output signals acquired from the capacitance detection area sensor to generate a differential signal;
an image processing circuit configured to allocate an image of a color or a tone that differs in accordance with a value of the differential signal output from the controller to generate a conductive pattern sensing image that describes a shape of the conductive pattern; and
a comparison circuit configured to compare a preset conductive pattern reference image serving as a comparison reference of the conductive pattern with the conductive pattern sensing image generated by the image processing circuit to determine a defective portion based on a difference.

4. The conductive pattern sensing apparatus according to claim 3 , wherein
a protective film of an insulative thin film is formed on the sensor electrode.

5. A capacitance detection area sensor apparatus comprising the capacitance detection area sensor according to claim 1 , wherein
the capacitance sensor element detects an electrical charge of a charge amount in accordance with the change of the capacitance between an external electrode and the capacitance sensor element, where an electrolyte is contained in a sealed manner between the external electrode and the capacitance sensor element, and at least one target object having a specific capacitance is contained in the electrolyte, and
the image processing circuit generates an image describing a size and shape of the target object based on a change in the charge amount.

6. A capacitance detection area sensor apparatus comprising the capacitance detection area sensor according to claim 1 , wherein
a fixation layer, a cross-linking agent and an aptamer are deposited on the sensor electrode of the capacitance sensor element, an electrolyte is contained in a sealed manner between an external electrode and the sensor electrode, and at least one antigen having a specific capacitance is contained in the electrolyte, and
an electrical charge of a charge amount corresponding to a change in a capacitance between the external electrode and the capacitance sensor element in accordance with the aptamer capturing the antigen is detected, and the image processing circuit generates a series of images that describe a course of the antigen being captured by the aptamer based on the change of the charge amount.

Assignees

• Univ Tohoku
• Oht Inc

Inventors

• Sugawa Shigetoshi
• Kuroda Rihito
• Goto Tetsuya
• Hamori Hiroshi
• Murakami Shinichi
• Yasuda Toshiro

Classifications

• H03K17/955

  using a capacitive detector · CPC title

• G01D5/2417

  by varying separation · CPC title

• G01R27/2605 Primary

  Measuring capacitance (capacitive sensors G01D5/24) · CPC title

• G01R31/304

  of printed or hybrid circuits (G01R31/305 - G01R31/315 take precedence) · CPC title

• G01R31/2812 Primary

  Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance (of connections G01R31/66) · CPC title