Nano-fluidic device and chemical analysis apparatus

Patent metadata

Field	Value
Publication number	US-11565253-B2
Application number	US-201615764529-A
Country	US
Kind code	B2
Filing date	Oct 21, 2016
Priority date	Oct 23, 2015
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

A nano-fluidic device includes: a first substrate that has a nanoscale groove on one surface; and a second substrate that is integrally provided with the first substrate by bonding one surface of the second substrate to the one surface of the first substrate and forms a nanochannel with the groove of the first substrate, in which either the first substrate or the second substrate includes at least a thin portion in a part of a position overlapping the nanochannel in plan view, and the thin portion is deformed by pressing to open and close the nanochannel.

First claim

The invention claimed is:

1. A nano-fluidic device, comprising:
a first substrate comprising a nanoscale groove and a protrusion on one surface, wherein the protrusion comprises an operation portion overlapping the nanoscale groove, wherein the operation portion comprises a concave recessed portion and a connection path, wherein the connection path is a groove that is provided in the operation portion of the first substrate, and
a second substrate that is integrally provided with the first substrate by bonding one surface of the second substrate to the one surface of the first substrate and forms a nanochannel with the nanoscale groove of the first substrate between the first and second substrates,
wherein the nanochannel comprises a channel portion that extends in one direction and further comprises the operation portion, wherein the channel portion comprises the nanoscale groove and the connection path, and wherein the channel portion and the concave recessed portion are connected by the connection path:
wherein:
the second substrate comprises a thin portion in a part of a position overlapping the nanochannel in plan view;
the operation portion comprises the concave recessed portion in a position facing the thin portion in the nanochannel and is provided in a position overlapping the thin portion in plan view and has a wider width than the channel portion,
the thin portion is deformed by pressing to close the nanochannel, wherein the thin portion conforms to the shape of the concave recessed portion of the nanochannel when the thin portion is deformed by pressing, wherein the thin portion does not protrude from the surface of the second substrate and is flat along the plane of the second substrate when not in a pressed state such that the nanochannel is open when the thin portion is not pressed;
a Young's modulus of the first substrate and the second substrate is 10 9 Pa or higher,
a depth of the operation portion is 10 nm to 1000 nm, and
a width of the operation portion is 2 μm or more.

2. The nano-fluidic device according to claim 1 , wherein a thickness of the thin portion is 10 mm or less.

3. The nano-fluidic device according to claim 1 , wherein a width of the thin portion in a direction in which the nanochannel extends is from 2 μm to 100 μm.

4. The nano-fluidic device according to claim 1 , wherein the protrusion portion of the first substrate is provided in a position in the nanochannel facing the thin portion and with which the deformed thin portion comes into contact.

5. The nano-fluidic device according to claim 1 , further comprising:
a pressing mechanism which is configured to perform the pressing.

6. The nano-fluidic device of claim 1 , wherein a depth of the groove of the connection path is smaller than a depth of the nanoscale groove.

7. The nano-fluidic device according to claim 1 , wherein all parts facing the nanochannel and the operation portion are formed of glass.

8. The nano-fluidic device according to claim 7 , wherein the Young's modulus of glass is from 10 10 to 10 11 Pa.

9. The nano-fluidic device according to claim 1 , wherein all parts facing the nanochannel and the operation portion are formed of an inorganic material.

10. The nano-fluidic device according to claim 9 , wherein the Young's modulus of the inorganic material is from 10 10 to 10 11 Pa.

11. The nano-fluidic device according to claim 1 , wherein a width of the nanochannel is from 10 nm to 900 nm.

12. An apparatus, comprising:
the nano-fluidic device according to claim 1 .

13. An apparatus, comprising:
the nano-fluidic device according to claim 1 ; and
at least two micro-fluidic devices that comprise a microchannel and are disposed such that the nano-fluidic device is interposed between the micro-fluidic devices,
wherein the nano-fluidic device and each of the at least two micro-fluidic devices are connected to each other by connecting the nanochannel and the microchannel to each other, and
chemical analysis is performed using the nano-fluidic device.

14. A nano-fluidic device, comprising:
a first substrate comprising a nanoscale groove and a protrusion on one surface, wherein the protrusion comprises an operation portion overlapping the nanoscale groove; and
a second substrate that is integrally provided with the first substrate by bonding one surface of the second substrate to the one surface of the first substrate and forms a nanoscale channel with the nanoscale groove of the first substrate between the first and second substrates,
wherein:
the nanoscale channel comprises a first portion and a second portion, the second portion is configured to be deformed by pressing to close the nanoscale channel, wherein a thickness of the second portion is smaller than that of the first portion, and the nanoscale channel has a concave recessed portion, wherein the second portion conforms to the shape of the concave recessed portion when the second portion is deformed by pressing, wherein the second portion does not protrude from the surface of the second substrate and is flat along the plane of the second substrate when not in a pressed state such that the nanochannel is open when the second portion is not pressed,
and wherein a Young's modulus of the first substrate and the second substrate, which form the first portion and the second portion of the nanoscale channel, is 10 9 Pa or higher,
the nanoscale channel comprises a channel portion that extends in one direction, and further comprises the operation portion that is provided in a position overlapping a thin portion of the second substrate in plan view and has a wider width than the channel portion,
a depth of the operation portion is 10 nm to 1000 nm,
a width of the operation portion is 2 μm or more.

15. The nano-fluidic device according to claim 14 , wherein all parts facing the nanochannel and the operation portion are formed of an inorganic material.

16. The nano-fluidic device according to claim 14 , wherein the Young's modulus of the first substrate and the second substrate, which form the first portion and the second portion of the nanoscale channel, is from 10 10 to 10 11 Pa.

17. A nano-fluidic device, comprising:
a first substrate comprising a nanoscale groove and a protrusion on one surface, wherein the protrusion comprises an operation portion overlapping the nanoscale groove; and
a second substrate that is integrally provided with the first substrate by bonding one surface of the second substrate to the one surface of the first substrate and forms a nanochannel with the groove of the first substrate between the first and second substrates,
wherein:
the second substrate comprises a thin portion in a part of a position overlapping the nanochannel in plan view;
the thin portion is deformed by pressing to close the nanochannel, wherein the nanochannel has a concave recessed portion and the thin portion conforms to the shape of the concave recessed portion when the thin portion is deformed by pressing, wherein the thin portion does not protrude from the surface of the second substrate and is flat along the plane of the second substrate when not in a pressed state such that the nanochannel is open when the thin portion is not pressed;
the nanochannel formed by the first substrate and the second substrate comprises a channel portion that extends in one direction, and further comprises the operation portion that is provided in a position overlapping the thin portion in plan view and has a wider width than the channel portion;
a depth of the operation portion is from 10 nm to 1000 nm;
a width o

Assignees

• Japan Science & Tech Agency

Inventors

• Kazoe Yutaka
• Pihosh Yuriy
• Kitamori Takehiko

Classifications

• B82B1/001

  Devices without movable or flexible elements · CPC title

• B01L3/502715

  characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces · CPC title

• B01L2300/0896

  Nanoscaled · CPC title

• F16K2099/0084

  Chemistry or biology, e.g. "lab-on-a-chip" technology · CPC title

• G01N37/00

  Details not covered by any other group of this subclass · CPC title