Oxide film formation method
US-2021028011-A1 · Jan 28, 2021 · US
US11560622B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11560622-B2 |
| Application number | US-201917298178-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 9, 2019 |
| Priority date | Nov 30, 2018 |
| Publication date | Jan 24, 2023 |
| Grant date | Jan 24, 2023 |
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Disclosed is a degradable film (1) in which a barrier layer (3) is disposed on a surface of a water-soluble polymer layer (2). The water-soluble polymer layer (2) is made of a water-soluble polymer such as polyvinyl alcohol or polyvinyl pyrrolidone. The barrier layer (3) is made of silicon oxide or silicon oxynitride. The barrier layer (3) is formed on the water-soluble polymer layer (2) by a CVD process with the supply of a raw material gas containing a precursor of a substance that forms the barrier layer (3), an ozone gas with an oxygen concentration of 20 vol % or higher and an unsaturated hydrocarbon gas to the water-soluble polymer layer (2).
Opening claim text (preview).
The invention claimed is: 1. A production method of a degradable resin molded article, the degradable resin molded article having a barrier layer disposed on a surface of a water-soluble polymer layer, the water-soluble polymer layer containing polyvinyl alcohol or polyvinyl pyrrolidone, the barrier layer being a silicon oxide film or a silicon oxynitride film, the production method comprising: placing the water-soluble polymer layer in a vacuum chamber; and supplying, to the water-soluble polymer layer placed in the vacuum chamber, an ozone gas with an ozone concentration of 20 vol % or higher, a raw material gas containing a compound containing silicon as a constituent element of the silicon oxide film or the silicon oxynitride film, and an unsaturated hydrocarbon gas, thereby forming the barrier layer on the water-soluble polymer layer, wherein the barrier layer has a thickness of 1 nm to 10 um and a water vapor permeability of 1 mg/m 2 /day to 10 g/m 2 /day, and wherein a flow rate of the ozone gas is in a range of 0.2 to 1000 sccm, wherein the ratio of a flow rate of the unsaturated hydrocarbon gas to the flow rate of the ozone gas is in a range of 0.1 to 2, and the ratio of a flow rate of the raw material gas to the flow rate of the ozone gas is 0.001 to 0.1. 2. The production method of the degradable resin molded article according to claim 1 , wherein the compound is selected from the group consisting of silane, tetraethyl orthosilicate, trimethoxysilane, triethoxysilane or tris(dimethylamino)silane. 3. The production method of the degradable resin molded article according to claim 1 , wherein, in the vacuum chamber, there are disposed: a first roll around which the water-soluble polymer layer has been wound; a second roll by which the water-soluble polymer layer fed from the first roll is wound up; and a shower head from which the ozone gas, the raw material gas and the unsaturated hydrocarbon gas are supplied to the water-soluble polymer layer, wherein the water-soluble polymer layer is fed from the first roll to the second roll and wound up by the second roll, and wherein the barrier layer is formed on the water-soluble polymer layer by supplying the ozone gas, the raw material gas and the unsaturated hydrocarbon gas from the shower head onto the water-soluble polymer layer moving between the first roll and the second roll. 4. The production method of the degradable resin molded article according to claim 3 , wherein a pair of the shower heads are disposed in the vacuum chamber such that gas supply surfaces of the shower heads are opposed to each other, wherein the water-soluble polymer layer is fed to pass between the opposed shower heads, and wherein the barrier layers are formed on both surfaces of the water-soluble polymer layer by supplying the ozone gas, the raw material gas and the unsaturated hydrocarbon gas from the pair of the shower heads onto the water-soluble polymer layer moving between the first roll and the second roll. 5. The production method of the degradable resin molded article according to claim 1 , wherein the barrier layer is formed under room temperature conditions.
containing silicon · CPC title
Shower nozzles · CPC title
Homopolymers or copolymers of N-vinyl-pyrrolidones · CPC title
Polyvinyl alcohol; Partially hydrolysed homopolymers or copolymers of esters of unsaturated alcohols with saturated carboxylic acids · CPC title
Oxynitrides · CPC title
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