Mask and manufacturing method thereof, fine metal mask, mask device and use method thereof

Patent metadata

Field	Value
Publication number	US-11560615-B2
Application number	US-201916959409-A
Country	US
Kind code	B2
Filing date	Nov 29, 2019
Priority date	Aug 28, 2019
Publication date	Jan 24, 2023
Grant date	Jan 24, 2023

Abstract

A mask, a manufacturing method thereof, a fine metal mask, a mask device and a use method thereof are provided. The mask includes at least one opening region and a shielding part surrounding and defining the at least one opening region. The shielding part includes a main part and at least one protrusion, in each opening region, the protrusion is protruded towards the opening region on a side of the main part facing the opening region; the main part includes an edge disposed on a side of the protrusion opposite to the opening region and with an extension direction being a same with an extension direction of the protrusion, the protrusion and a portion of the main part disposed between the edge and the protrusion includes a thinning portion with a thickness being less than a thickness of other portions of the shielding part.

First claim

The invention claimed is:

1. A mask, comprising: at least one opening region and a shielding part surrounding and defining the at least one opening region,
wherein the shielding part includes a main part and at least one protrusion,
in each opening region of the at least one opening region, the protrusion is protruded towards the opening region on a side of the main part facing the opening region,
the main part includes an edge which is disposed on a side of the protrusion opposite to the opening region and of which an extension direction is a same with an extension direction of the protrusion, at least one of the protrusion and a portion of the main part disposed between the edge and the protrusion includes a thinning portion, and a thickness of the thinning portion is less than a thickness of other portions of the shielding part;
the thinning portion comprises a recessed portion, the recessed portion is between the edge end the protrusion and extends along a same extension direction as the edge, and a maximum length of the recessed portion in the extension direction is substantially equal to a maximum length of the protrusion in the extension direction; the recessed portion has a first end and a second end that are opposite to each other in the extension direction, the protrusion has a first end and a second end that are opposite to each other in the extension direction, the first end of the recessed portion is aligned with the first end of the protrusion, and the second end of the recessed portion is aligned with the second end of the protrusion.

2. The mask according to claim 1 , wherein
a connecting line between a center of the recessed portion and a center of the protrusion is parallel to a protruding direction of the protrusion.

3. The mask according to claim 2 , wherein a shape of the recessed portion is the same as a shape of the protrusion.

4. The mask according to claim 2 , wherein a shape of the recessed portion is different from a shape of the protrusion.

5. The mask according to claim 1 , wherein a ratio of the thickness of the portion of the shielding part at the recessed portion to the thickness of other portions of the shielding part is equal to 0.8 to 0.9.

6. The mask according to claim 1 , wherein the portion of the main part disposed between the edge and the protrusion is communicated with the thinning portion in the protrusion.

7. The mask according to claim 1 , further comprising a plurality of fixing parts disposed at a periphery of the shielding part,
wherein the plurality of fixing parts are connected with the shielding part and are protruded along a direction away from the at least one opening region in a plane parallel to a surface of the mask.

8. The mask according to claim 1 , wherein the mask comprises a plurality of opening regions,
wherein the plurality of opening regions are arranged in an array, and the shielding part surrounds and defines each opening region of the plurality of opening regions,
the shielding part includes a plurality of first shielding parts arranged in parallel and a plurality of second shielding part groups arranged in parallel;
each of the plurality of first shielding parts are extended along a first direction; each of the plurality of second shielding part groups is extended along a second direction different from the first direction;
each of the plurality of second shielding part groups includes a plurality of second shielding parts extended along the second direction; each of the plurality of second shielding parts is disposed between adjacent first shielding parts of the plurality of first shielding parts and is in seamless connection with the adjacent first shielding parts;
the plurality of first shielding parts and the plurality of second shielding parts are intersected with each other to surround and define each opening region; and
in each of the plurality of opening regions, the protrusion is protruded towards the opening region on a side of the first shielding part and/or the second shielding part, respectively, facing the opening region.

9. The mask according to claim 8 , wherein in each of the plurality of opening regions, the protrusion is protruded towards the opening region in a middle region on a side of the first shielding part and/or the second shielding part, respectively, facing the opening region,
wherein a plurality of fixing parts of the mask are respectively disposed in extension directions of the plurality of first shielding parts and the plurality of second shielding part groups.

10. The mask according to claim 8 , wherein in a protruding direction of the protrusion, at least one through hole corresponding to the protrusion is formed in at least one of the plurality of first shielding parts and/or at least one of the plurality of the second shielding parts disposed on an edge; and
an extension direction of the through hole is perpendicular to the protruding direction of the protrusion,
wherein a shape of the through hole is the same as a shape of the protrusion; and a size of the through hole is the same as a size of the protrusion.

11. The mask according to claim 1 , wherein the thinning portion is not on the protrusion.

12. A fine metal mask, configured to be cooperated with the mask according to claim 1 ,
wherein the fine metal mask is strip-shaped;
the fine metal mask includes a mask pattern region and a shielding connecting part;
in an extension direction of the strip-shaped fine metal mask, the shielding connecting part is respectively disposed at both ends of the mask pattern region;
the mask pattern region includes a plurality of through holes arranged in an array; and at least one opening is formed in the shielding connecting part.

13. A mask device, comprising a support frame and the mask according to claim 1 ,
wherein the mask is fixed on the support frame.

14. The mask device according to claim 13 , wherein the mask further comprises a plurality of fixing parts disposed at a periphery of the shielding part, a plurality of connecting grooves are formed in the support frame; and the plurality of fixing parts of the mask are respectively inserted into and fixed in the plurality of connecting grooves.

15. The mask device according to claim 14 , further comprising a fine metal mask, wherein the fine metal mask is strip-shaped and includes a mask pattern region and a shielding connecting part; in an extension direction of the strip-shaped fine metal mask, the shielding connecting part is respectively disposed at both ends of the mask pattern region;
the mask pattern region includes a plurality of through holes arranged in an array; at east one opening is formed in the shielding connecting part;
the shielding connecting part of the fine metal mask is disposed on a side of the mask away from the support frame through the fixing part of the mask;
an orthographic projection of the opening region of the mask on the fine metal mask is within the mask pattern region and covers the plurality of through holes of the mask pattern region;
the through holes formed on the mask are within an orthographic projection of the shielding connecting part on the mask; and an orthographic projection of the at least one opening of the shielding connecting part on the mask is not overlapped with the through hole formed on the mask.

16. The mask device according to claim 15 , wherein the orthographic projection of the at least one opening of the shielding connecting part on the mask and the through hole formed on the mask are alternately arranged along an extension direction of the strip-shaped fine metal mask.

Assignees

• Chengdu Boe Optoelect Tech Co
• Boe Technology Group Co Ltd
• Beijing Boe Technology Dev Co Ltd

Inventors

• Xu Peng
• Niu Tong
• Ji Fengli
• Wu Jianpeng
• Zhang Guodong
• Zhao Yu
• He Panting
• Du Sen

Classifications

• C23C14/042 Primary

  using masks · CPC title

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title

• B05C17/06

  Stencils (B05C17/04 takes precedence; stencils used in connection with printing plates or foils B41N1/24; drawing accessories B43L13/00) · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• H01L51/0011

  Electricity · mapped topic