Charged particle beam apparatus

Patent metadata

Field	Value
Publication number	US-11557457-B2
Application number	US-202117331765-A
Country	US
Kind code	B2
Filing date	May 27, 2021
Priority date	Jul 21, 2020
Publication date	Jan 17, 2023
Grant date	Jan 17, 2023

Abstract

There is provided a charged particle beam apparatus that can reduce the processing time. A charged particle beam apparatus includes: an excitation control unit that controls a focal position by changing a control value of excitation of an electronic lens; an electrostatic field control unit that controls the focal position by changing a control value of an electrostatic field; a focal position height estimation unit that estimates a height of the focal position from the control value of the excitation of the electronic lens; and a control unit that controls the excitation control unit and the electrostatic field control unit. The control unit compares the height of the focal position estimated by the focal position height estimation unit with a height of a sample surface of a sample to be observed, and according to a result of comparison, determines whether it is necessary to change the control value of the excitation of the electronic lens before observing the sample.

First claim

The invention claimed is:

1. A charged particle beam apparatus comprising:
an excitation control unit that controls a focal position by changing a control value of excitation of an electronic lens;
an electrostatic field control unit that controls the focal position by changing a control value of an electrostatic field;
a focal position height estimation unit that estimates a height of the focal position from the control value of the excitation of the electronic lens; and
a control unit that controls the excitation control unit and the electrostatic field control unit, wherein
the control unit compares the height of the focal position estimated by the focal position height estimation unit with a height of a sample surface of a sample to be observed, and according to a result of comparison, determines whether it is necessary to change the control value of the excitation of the electronic lens before observing the sample, and
the control unit estimates the height of the sample surface of the sample to be observed, based on a representative value of the height of the sample surface obtained for a plurality of samples that have been observed already and a distribution width of the height of the sample surface obtained for the plurality of samples that have been observed already.

2. The charged particle beam apparatus of claim 1 , wherein
a representative value H(N) of a height of a sample surface of an N-th sample N to be observed is expressed by a formula

H
⁡

(
N
)

=

1
N

⁢

∑
0
N

⁢

⁢

H
⁡

(
k
)

where H(k) is a representative value of a height of a sample surface of a sample k (k=1 to N−1, n≥3) in an already-observed sample group i.

3. The charged particle beam apparatus according to claim 2 , wherein
a distribution width R(N) of a height of a sample surface of an N-th sample N to be observed is expressed by a formula

R
⁡

(
N
)

=

1
N

⁢

∑
0
N

⁢

⁢

R
⁡

(
k
)

where R(k) is a distribution width of a height of a sample surface of a sample k (k=1 to N−1, n≥3) in an already-observed sample group i.

4. The charged particle beam apparatus according to claim 3 , further comprising:
a display unit that displays a screen that allows to select which of the observed samples is used to estimate the height of the sample surface of the sample to be observed, wherein
the control unit estimates the surface height of the sample to be observed based on data of the height of the sample surface obtained for the sample selected by selection in the display unit.

5. A charged particle beam apparatus comprising:
an excitation control unit that controls a focal position by changing a control value of excitation of an electronic lens;
an electrostatic field control unit that controls the focal position by changing a control value of an electrostatic field;
a focal position height estimation unit that estimates a height of the focal position from the control value of the excitation of the electronic lens; and
a control unit that controls the excitation control unit and the electrostatic field control unit, wherein
the control unit compares the height of the focal position estimated by the focal position height estimation unit with a height of a sample surface of a sample to be observed, and according to a result of comparison, determines whether it is necessary to change the control value of the excitation of the electronic lens before observing the sample,
the control unit determines whether an absolute value of a difference between the height of the focal position estimated by the focal position height estimation unit and the height of the sample surface of the sample to be observed is smaller than a threshold value, and
the threshold value is set according to a range of the controllable focal positions without changing the excitation of the electronic lens.

6. The charged particle beam apparatus according to claim 5 , wherein
the control unit sets the threshold value based on the selected data, from data of the height of the sample surface of the observed sample.

7. The charged particle beam apparatus according to claim 6 , further comprising:
a display unit that displays a display screen for selecting data to be used for setting the threshold value, from data of the height of the sample surface of the observed sample.

8. The charged particle beam apparatus according to claim 7 , wherein
the display screen is configured to be capable of selecting a first observed sample having a first height difference and a second observed sample having a second height difference different from the first height difference.

9. The charged particle beam apparatus according to claim 1 , wherein
the control unit compares the height of the focal position estimated by the focal position height estimation unit with the height of the sample surface of the sample to be observed, and according to a result of the comparison, makes a magnetic hysteresis removal operation executed on the electronic lens different.

10. A charged particle beam apparatus comprising:
an excitation control unit that controls a focal position by changing a control value of excitation of an electronic lens;
an electrostatic field control unit that controls the focal position by changing a control value of an electrostatic field;
a focal position height estimation unit that estimates a height of the focal position from the control value of the excitation of the electronic lens; and
a control unit that controls the excitation control unit and the electrostatic field control unit, wherein
the control unit compares the height of the focal position estimated by the focal position height estimation unit with a height of a sample surface of a sample to be observed, and according to a result of comparison, determines whether it is necessary to change the control value of the excitation of the electronic lens before observing the sample,
the control unit executes control of the focal position by changing the control value of the excitation of the electronic lens without comparing the height of the focal position estim

Assignees

• Hitachi High Tech Corp

Inventors

• Matsumoto Kosuke
• Takada Satoshi
• Nobuhara Takashi
• Kitsuki Hirohiko
• Aoki Kazuo

Classifications

• H01J37/141 Primary

  Electromagnetic lenses · CPC title

• H01J37/265

  Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination · CPC title

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/21 Primary

  Means for adjusting the focus · CPC title

• H01J2237/216

  Automatic focusing methods · CPC title