Apparatus for generating charged particles
US-2018139835-A1 · May 17, 2018 · US
US11555779B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11555779-B2 |
| Application number | US-202016842487-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 7, 2020 |
| Priority date | Apr 9, 2019 |
| Publication date | Jan 17, 2023 |
| Grant date | Jan 17, 2023 |
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The present disclosure provides a sample analyzer and an analyzing method thereof. The sample analyzer includes a first beam source configured to provide a first energy beam to a sample, a second beam source configured to provide a second energy beam, which is different from the first energy beam, to the sample, a reflected beam sensor disposed between the second beam source and the sample to detect a reflected beam of the second energy beam, which is reflected by one side of the sample, and a transmitted beam sensor disposed adjacent to the other side of the sample to detect a transmitted beam of the second energy beam.
Opening claim text (preview).
What is claimed is: 1. A sample analyzer comprising: a first beam source configured to provide a first energy beam to a sample; a second beam source configured to provide a second energy beam, which is different from the first energy beam, to the sample; a reflected beam sensor disposed between the second beam source and the sample to detect a reflected beam of the second energy beam, which is reflected by one side of the sample; and a transmitted beam sensor disposed adjacent to the other side of the sample to detect a transmitted beam of the second energy beam, wherein the transmitted beam sensor comprises a radiation sensor, an electron sensor disposed between the sample and the radiation sensor, and a proton sensor disposed between the sample and the electron sensor. 2. The sample analyzer of claim 1 , wherein the second beam source is a multi-energy beam generator. 3. The sample analyzer of claim 2 , wherein the second energy beam is a multi-energy beam comprising an ultraviolet ray, an ion particle, a proton, an electron, and a radiation. 4. The sample analyzer of claim 1 , wherein the transmitted beam sensor further comprises an ion sensor disposed between the sample and the proton sensor.
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