Physical quantity detection device, manufacturing method for physical quantity detection device, electronic apparatus, and moving object

Patent metadata

Field	Value
Publication number	US-11555702-B2
Application number	US-202016744328-A
Country	US
Kind code	B2
Filing date	Jan 16, 2020
Priority date	Aug 26, 2015
Publication date	Jan 17, 2023
Grant date	Jan 17, 2023

Abstract

A gyro vibrating element includes a drive signal pattern including a drive signal electrode to which a drive signal is applied and a drive signal wire connected to the drive signal electrode, a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern, and a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern. Any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern includes an adjustment pattern for adjusting an area of the signal pattern.

First claim

The invention claimed is:

1. A manufacturing method for a physical quantity detection device including:
a drive signal pattern including a drive electrode to which a drive signal is applied and a drive signal wire connected to the drive electrode;
a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern;
a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern; and
any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern including an adjustment pattern for adjustment, the adjustment pattern having a first area,
the manufacturing method for the physical quantity device comprising:
reducing, by changing an area of the adjustment pattern to a second area different from the first area, a difference between capacitance due to the capacitive coupling between the first detection signal pattern and the drive signal pattern and capacitance due to the capacitive coupling between the second detection signal pattern and the drive signal pattern, wherein
the changing of the area of the adjustment pattern includes:
preparing a physical quantity detection device in which the first detection signal pattern or the second detection signal pattern includes the adjustment pattern and the capacitance of the first or second detection signal pattern including the adjustment pattern is larger than the capacitance of the other,
removing at least a part of the adjustment pattern with an energy ray, and reducing the area of the adjustment pattern.

2. The manufacturing method for the physical quantity detection device according to claim 1 , wherein
the adjustment pattern includes a first pattern portion having a first width in a direction crossing an extending direction of the adjustment pattern and a second pattern portion having a second width smaller than the first width in the direction,
the first and second pattern portions abut each other in the extending direction,
the first pattern portion defines a first distance between one of the first and second detection signal patterns and the drive signal pattern,
the second pattern portion defines a second distance between the one of the first and second detection signal patterns and the drive signal pattern, and
the second distance is greater than the first distance.

3. A manufacturing method for a physical quantity detection device including:
a drive signal pattern including a drive electrode to which a drive signal is applied and a drive signal wire connected to the drive electrode;
a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern;
a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern; and
any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern including an adjustment pattern for adjustment, the adjustment pattern having a first area,
the manufacturing method for the physical quantity device comprising:
reducing, by changing an area of the adjustment pattern to a second area different from the first area, a difference between capacitance due to the capacitive coupling between the first detection signal pattern and the drive signal pattern and capacitance due to the capacitive coupling between the second detection signal pattern and the drive signal pattern, wherein
the changing of the area of the adjustment pattern includes:
preparing a physical quantity detection device in which the first detection signal pattern or the second detection signal pattern includes the adjustment pattern and the capacitance of the detection signal pattern including the adjustment pattern is smaller than the capacitance of the other, and
increasing the area of the adjustment pattern with at least one of vapor deposition, sputtering, or an ion beam.

Assignees

• Seiko Epson Corp

Inventors

• Nishizawa Ryuta
• Yamaguchi Keiichi
• Nakagawa Keiji

Classifications

• B81C1/00698

  Electrical characteristics, e.g. by doping materials · CPC title

• G01C19/5621 Primary

  the devices involving a micromechanical structure · CPC title

• B81C2201/00

  Manufacture or treatment of microstructural devices or systems · CPC title