Semiconductor device including current spread region

Patent metadata

Field	Value
Publication number	US-11552170-B2
Application number	US-202017031358-A
Country	US
Kind code	B2
Filing date	Sep 24, 2020
Priority date	Sep 24, 2019
Publication date	Jan 10, 2023
Grant date	Jan 10, 2023

Abstract

A semiconductor device includes a silicon carbide semiconductor body. A first shielding region of a first conductivity type is connected to a first contact at a first surface of the silicon carbide semiconductor body. A current spread region of a second conductivity type is connected to a second contact at a second surface of the silicon carbide semiconductor body. A doping concentration profile of the current spread region includes peaks along a vertical direction perpendicular to the first surface. A doping concentration of one peak or one peak-group of the peaks is at least 50% higher than a doping concentration of any other peak of the current spread region. A vertical distance between the one peak or the one peak-group of the current spread region and the first surface is larger than a second vertical distance between the first surface and a maximum doping peak of the first shielding region.

First claim

What is claimed is:

1. A semiconductor device, comprising:
a silicon carbide semiconductor body;
a first shielding region of a first conductivity type, wherein the first shielding region is electrically connected, at least one of directly or via a metal different than a first contact, to the first contact at a first surface of the silicon carbide semiconductor body; and
a current spread region of a second conductivity type, wherein:
the current spread region is electrically connected to a second contact at a second surface of the silicon carbide semiconductor body;
a pn-junction is formed by (i) the first shielding region that is electrically connected, at least one of directly or via the metal, to the first contact and (ii) the current spread region;
a doping concentration profile of the current spread region comprises a plurality of peaks along a vertical direction perpendicular to the first surface, wherein a doping concentration of one peak or one peak-group of the plurality of peaks is higher than a doping concentration of any other one of the plurality of peaks of the doping concentration profile of the current spread region; and
a first vertical distance between the one peak or the one peak-group of the doping concentration profile of the current spread region and the first surface is larger than a second vertical distance between the first surface and a maximum doping peak of the first shielding region along the vertical direction.

2. The semiconductor device of claim 1 , wherein the current spread region adjoins a bottom of the first shielding region.

3. The semiconductor device of claim 1 , wherein the doping concentration of the one peak or the one peak-group is at least 50% higher than a doping concentration of any other one of the plurality of peaks.

4. The semiconductor device of claim 1 , wherein a number of the plurality of peaks in the doping concentration profile of the current spread region ranges from 3 to 20.

5. The semiconductor device of claim 1 , wherein the first vertical distance between the one peak or the one peak-group of the doping concentration profile of the current spread region and the first surface is larger than a vertical distance between any other one of the plurality of peaks of the doping concentration profile of the current spread region and the first surface.

6. The semiconductor device of claim 1 , wherein the first vertical distance is larger than a third vertical distance between a bottom of the first shielding region and the first surface.

7. The semiconductor device of claim 1 , wherein the first vertical distance is smaller than a third vertical distance between a bottom of the first shielding region and the first surface.

8. The semiconductor device of claim 1 , comprising a body region of the first conductivity type, wherein a top of the current spread region adjoins a bottom of the body region.

9. The semiconductor device of claim 8 , comprising a trench gate structure, wherein the trench gate structure comprises a first sidewall and a second sidewall opposite the first sidewall, and wherein the body region adjoins the first sidewall and the first shielding region adjoins the second sidewall.

10. The semiconductor device of claim 8 , comprising a trench gate structure, wherein the trench gate structure comprises a first sidewall and a second sidewall opposite the first sidewall, and wherein the body region adjoins the first sidewall and the second sidewall.

11. The semiconductor device of claim 1 , comprising a second shielding region of the first conductivity type, wherein at least a top part of the current spread region is arranged between the first shielding region and the second shielding region along a lateral direction perpendicular to the vertical direction.

12. The semiconductor device of claim 1 , comprising a diode region of the second conductivity type, wherein the diode region adjoins the first surface, and at least part of a vertical doping concentration profile of the diode region along the vertical direction corresponds is equal to at least part of a vertical doping concentration profile of the current spread region.

13. The semiconductor device of claim 12 , wherein a total number of the plurality of peaks in the vertical doping concentration profile of the current spread region is less than a total number of peaks in the vertical doping concentration profile of the diode region.

14. The semiconductor device of claim 12 , comprising an electrode adjoining the diode region at the first surface, wherein the diode region and the electrode form a Schottky contact.

15. The semiconductor device of claim 12 , comprising at least two source regions, wherein the diode region is located between the at least two source regions.

16. The semiconductor device of claim 1 , comprising:
a gate structure extending along a first lateral direction; and
a plurality of source regions arranged along the first lateral direction at a distance from each other.

17. The semiconductor device of claim 16 , comprising:
a plurality of body regions arranged along the first lateral direction at a lateral distance from each other.

18. A semiconductor device, comprising:
a silicon carbide semiconductor body;
a first shielding region of a first conductivity type, wherein the first shielding region is electrically connected, at least one of directly or via a metal different than a first contact, to the first contact at a first surface of the silicon carbide semiconductor body; and
a current spread region of a second conductivity type, wherein:
the current spread region is electrically connected to a second contact at a second surface of the silicon carbide semiconductor body;
the current spread region adjoins a bottom of the first shielding region;
a pn-junction is formed by (i) the first shielding region that is electrically connected, at least one of directly or via the metal, to the first contact and (ii) the current spread region;
a doping concentration profile of the current spread region comprises a plurality of peaks along a vertical direction perpendicular to the first surface, wherein a doping concentration of one peak or one peak-group of the plurality of peaks is higher than a doping concentration of any other one of the plurality of peaks of the doping concentration profile of the current spread region;
a number of the plurality of peaks in the doping concentration profile of the current spread region ranges from 3 to 20; and
a first vertical distance between the one peak or the one peak-group of the doping concentration profile of the current spread region and the first surface is larger than a second vertical distance between the first surface and a maximum doping peak of the first shielding region along the vertical direction.

19. The semiconductor device of claim 1 , wherein the one peak or the one peak-group, with the doping concentration that is higher than a doping concentration of any other one of the plurality of peaks, is associated with a portion of the current spread region that is below a gate structure.

20. A semiconductor device, comprising:
a silicon carbide semiconductor body;
a first shielding region of a first conductivity type, wherein the first shielding region is connected to a first contact at a first surface of the silicon carbide semiconductor body; and
a current spread region of a second conductivity type, wherein:
the current spread region is connected to a second contact at a second surface of the silicon carbide semiconductor b

Assignees

• Infineon Technologies Ag

Inventors

• Hell Michael
• Elpelt Rudolf
• Ganner Thomas
• Leendertz Caspar

Classifications

• H10P30/2042

  into crystalline silicon carbide · CPC title

• H10P30/21

  of electrically active species · CPC title

• H01L29/7806

  Electricity · mapped topic

• H01L29/1608

  Electricity · mapped topic

• H01L29/7813

  Electricity · mapped topic