Ceramic substrate and susceptor

Patent metadata

Field	Value
Publication number	US-11551962-B2
Application number	US-201917041905-A
Country	US
Kind code	B2
Filing date	Mar 28, 2019
Priority date	Mar 30, 2018
Publication date	Jan 10, 2023
Grant date	Jan 10, 2023

Abstract

A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.

First claim

The invention claimed is:

1. A ceramic substrate which is made of a dielectric material including silicon carbide particles as a forming material,
wherein the number of the silicon carbide particles per unit area on a surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate, and
a unit of the number of the silicon carbide particles per unit area is shown by pieces/μm 2 .

2. The ceramic substrate according to claim 1 , wherein an average particle diameter of the silicon carbide particles is 0.2 μm or less.

3. A susceptor comprising:
the ceramic substrate according to claim 1 ,
wherein a surface of the ceramic substrate is a mounting surface on which a plate-shaped sample is mounted.

4. An electrostatic chuck device comprising:
an electrostatic chuck part which includes
the ceramic substrate according to claim 1 as a mounting plate,
a supporting plate,
an electrostatic attraction electrode provided between the ceramic substrate and the supporting plate, and
an insulating material layer that insulates surroundings of the electrostatic attraction electrode;

a temperature adjusting base part; and
an adhesive layer provided between the electrostatic chuck part and the temperature adjusting base part.

5. The ceramic substrate according to claim 1 , wherein the dielectric material includes
aluminum oxide particles or yttrium oxide particles having an average crystal grain size of 5 μm or less, as a main phase, and
silicon carbide particles having an average particle diameter of 0.2 μm or less, as a sub-phase.

6. The ceramic substrate according to claim 1 , wherein the ceramic substrate is formed by a method including:
a first step of forming a plurality of projection portions by performing blasting on a base material made of a composite sintered body which includes aluminum oxide particles or yttrium oxide particles as a main phase and silicon carbide particles as a sub-phase; and
a second step including at least one sub-step of following (a) to (c), which is performed after the step of forming the projection portions;
(a) a step of heat-treating the base material at a temperature of 900° C. or higher and 1300° C. or lower in a chamber for treatment,
(b) a step of performing heat treatment by irradiating a surface of the base material on which the projection portions have been formed, with laser light, and
(c) a step of acid-treating a surface of the base material on which the projection portions are formed.

7. The ceramic substrate according to claim 6 , wherein the method further includes, before the first step, a step of adding a supporting plate which supports a bottom portion side of the base material, an electrostatic attraction electrode which is provided between the base material and the supporting plate, and an insulating material layer which insulates surroundings of the electrostatic attraction electrode, to the base material.

8. The ceramic substrate according to claim 1 , wherein the cross section is generated by cutting out a part of the ceramic substrate.

9. The ceramic substrate according to claim 1 , wherein the ceramic substrate includes
at least one of aluminum oxide particles and yttrium oxide particles as a main phase and
silicon carbide particles as a sub-phase.

Assignees

• Sumitomo Osaka Cement Co Ltd

Inventors

• Kosakai Mamoru
• Hidaka Nobuhiro
• Kimura Naoto
• Kugimoto Hironori

Classifications

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/74

  using temporarily an auxiliary support · CPC title

• H10P72/70

  for supporting or gripping · CPC title

• H10P72/7614 Primary

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• C04B2235/3225

  Yttrium oxide or oxide-forming salts thereof · CPC title