Wavelength-division multiplexing filters including assisted coupling regions

Patent metadata

Field	Value
Publication number	US-11550100-B2
Application number	US-202117202729-A
Country	US
Kind code	B2
Filing date	Mar 16, 2021
Priority date	Mar 16, 2021
Publication date	Jan 10, 2023
Grant date	Jan 10, 2023

Abstract

Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. A waveguide core of the wavelength-division multiplexing filter includes a first bend having a first curvature and a second bend having a second curvature different than the first curvature. The structure further includes a waveguide core region having a first end surface, a second end surface, and a bend arranged between the first and second end surfaces. The bend is positioned over the first bend of the waveguide core in an overlapping relationship.

First claim

What is claimed is:

1. A structure for a wavelength-division multiplexing filter, the structure comprising:
a first waveguide core including a first bend having a first curvature and a second bend having a second curvature different than the first curvature; and
a first waveguide core region including a first end surface, a second end surface, a first taper adjacent to the first end surface, a second taper adjacent to the second end surface, and a bend arranged between the first end surface and the second end surface, the bend positioned over the first bend of the first waveguide core in an overlapping relationship.

2. The structure of claim 1 further comprising:
a second waveguide core including a first bend having a first curvature and a second bend having a second curvature different than the first curvature, the first bend of the second waveguide core positioned adjacent to the first bend of the first waveguide core, and the first bend of the second waveguide core separated from the first bend of the first waveguide core by a first gap.

3. The structure of claim 2 further comprising:
a second waveguide core region including a first end surface, a second end surface, and a bend arranged between the first end surface and the second end surface, the bend of the second waveguide core region positioned over the first bend of the second waveguide core in an overlapping relationship.

4. The structure of claim 3 wherein the bend of the first waveguide core region has a first curvature with a first turning point, the bend of the second waveguide core region has a second curvature with a second turning point, and the first turning point is positioned across the first gap in alignment with the second turning point.

5. The structure of claim 3 wherein the bend of the first waveguide core region is centered over the first bend of the first waveguide core, and the bend of the second waveguide core region is centered over the first bend of the second waveguide core.

6. The structure of claim 1 wherein the first waveguide core is comprised of silicon, and the first waveguide core region is comprised of silicon nitride.

7. The structure of claim 1 wherein the bend of the first waveguide core region is centered over the first bend of the first waveguide core.

8. A structure for a wavelength-division multiplexing filter, the structure comprising:
a first waveguide core including a first bend having a first curvature, a second bend having a second curvature different than the first curvature, and a taper that connects the first bend with the second bend, the first bend of the first waveguide core having a first width, and the second bend of the first waveguide core having a second width that is greater than the first width; and
a first waveguide core region including a first end surface, a second end surface, and a bend arranged between the first end surface and the second end surface, the bend positioned over the first bend of the first waveguide core in an overlapping relationship.

9. The structure of claim 1 wherein the first taper terminates the first waveguide core region at the first end surface of the first waveguide core region, and the second taper terminates the first waveguide core region at the second end surface of the first waveguide core region.

10. The structure of claim 1 wherein the first bend of the first waveguide core has a first width, the second bend of the first waveguide core has a second width that is greater than the first width, the first waveguide core includes a taper that connects the first bend with the second bend, and the first taper of the first waveguide core overlaps with the taper of the first waveguide core.

11. The structure of claim 1 further comprising:
a dielectric layer positioned between the first waveguide core and the first waveguide core region.

12. A method of forming a structure for a wavelength-division multiplexing filter, the method comprising:
forming a first waveguide core including a first bend having a first curvature, a second bend having a second curvature different than the first curvature, and a taper that connects the first bend with the second bend; and
forming a first waveguide core region including a first end surface, a second end surface, and a bend arranged between the first end surface and the second end surface,
wherein the bend is positioned over the first bend of the first waveguide core in an overlapping relationship, the first bend of the first waveguide core has a first width, and the second bend of the first waveguide core has a second width that is greater than the first width.

13. The method of claim 12 further comprising:
forming a second waveguide core including a first bend having a first curvature and a second bend having a second curvature different than the first curvature,
wherein the first bend of the second waveguide core is positioned adjacent to the first bend of the first waveguide core and is separated from the first bend of the first waveguide core by a gap.

14. The method of claim 13 further comprising:
forming a second waveguide core region including a first end surface, a second end surface, and a bend arranged between the first end surface and the second end surface,
wherein the bend of the second waveguide core region is positioned over the first bend of the second waveguide core in an overlapping relationship.

15. The method of claim 14 wherein the bend of the first waveguide core region has a first curvature with a first turning point, the bend of the second waveguide core region has a second curvature with a second turning point, and the first turning point is positioned across the gap in alignment with the second turning point.

16. The method of claim 14 wherein the bend of the first waveguide core region is centered over the first bend of the first waveguide core, and the bend of the second waveguide core region is centered over the first bend of the second waveguide core.

17. The method of claim 12 wherein a dielectric layer is positioned between the first waveguide core and the first waveguide core region.

18. The method of claim 12 wherein the first waveguide core region includes a first taper and a second taper, the first taper terminates the first waveguide core region at the first end surface of the first waveguide core region, and the second taper terminates the first waveguide core region at the second end surface of the first waveguide core region.

19. The structure of claim 8 further comprising:
a second waveguide core including a first bend having a first curvature and a second bend having a second curvature different than the first curvature, the first bend of the second waveguide core positioned adjacent to the first bend of the first waveguide core, and the first bend of the second waveguide core separated from the first bend of the first waveguide core by a second gap.

20. The structure of claim 19 further comprising:
a second waveguide core region including a first end surface, a second end surface, and a bend arranged between the first end surface and the second end surface, the bend of the second waveguide core region positioned over the first bend of the second waveguide core in an overlapping relationship.

Assignees

• Globalfoundries Us Inc
• Univ Khalifa Science & Technology

Inventors

• Bian Yusheng
• Rakowski Michal
• Augur Roderick A
• Papadovasilakis Marios
• Chandran Sujith
• Viegas Jaime
• Gebregiorgis Yonas

Classifications

• G02B6/1228

  Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305) · CPC title

• G02B2006/12147

  Coupler · CPC title

• G02B6/12002

  Three-dimensional structures · CPC title

• G02B2006/12061

  Silicon · CPC title

• G02B6/125

  Bends, branchings or intersections · CPC title