Precursor supply cabinet

Patent metadata

Field	Value
Publication number	US-11549702-B2
Application number	US-202017605602-A
Country	US
Kind code	B2
Filing date	Apr 24, 2020
Priority date	Apr 25, 2019
Publication date	Jan 10, 2023
Grant date	Jan 10, 2023

Abstract

A precursor supply cabinet for accommodating one or more precursor containers having cabinet walls defining an inner cabinet space. The precursor supply cabinet includes a ventilation discharge connection arranged to discharge ventilation gas from the inner cabinet space, one or more ventilation inlet connections, two or more separate gas tight precursor supply chambers for accommodating precursor containers. The gas tight precursor supply chambers are arranged inside the inner cabinet space of the precursor supply cabinet such that the inner cabinet space of the precursor supply cabinet surrounding the separate gas tight precursor supply chambers is ventilated.

First claim

The invention claimed is:

1. A precursor supply cabinet for accommodating one or more precursor containers, the precursor supply cabinet having cabinet walls defining an inner cabinet space, wherein the precursor supply cabinet comprises:
a ventilation discharge connection arranged to discharge ventilation gas from the inner cabinet space of the precursor supply cabinet;
one or more ventilation inlet connections arranged to provide ventilation gas into the inner cabinet space of the precursor supply cabinet;
two or more separate gas tight precursor supply chambers for accommodating precursor containers, the two or more gas tight precursor supply chambers being arranged inside the inner cabinet space of the precursor supply cabinet such that the inner cabinet space of the precursor supply cabinet surrounding the two or more separate gas tight precursor supply chambers is ventilated, the two or more separate gas tight precursor supply chambers arranged spaced apart from each other inside the inner cabinet space of the precursor supply cabinet such that one or more flow gaps (A, B) is provided between the two or more separate gas tight precursor supply chambers, wherein:
the two or more separate gas tight precursor supply chambers comprises a chamber door aligned with the one or more cabinet doors; or
the two or more separate gas tight precursor supply chambers are arranged aligned with the one or more cabinet doors; or
each of the two or more separate gas tight precursor supply chambers comprises a chamber door and the precursor supply cabinet comprises a respective separate cabinet door opposite each the two or more separate gas tight precursor supply chambers; or
the precursor supply cabinet comprises a separate cabinet door opposite each the two or more separate gas tight precursor supply chambers such that each separate cabinet door is aligned with a respective separate gas tight precursor supply chamber.

2. The precursor supply cabinet according to claim 1 , wherein the precursor supply cabinet comprises two or more separate gas tight precursor supply chambers, and that:
at least two of the two or more separate gas tight precursor supply chambers are arranged adjacent to each other inside the inner cabinet space of the precursor supply cabinet, and at a first distance from each other such that a first flow gap (A) is formed between the adjacent gas tight precursor supply chambers; or
at least two of the two or more separate gas tight precursor supply chambers are arranged one on top of the other inside the inner cabinet space of the precursor supply cabinet, and at a second distance from each other such that a second flow gap (B) is formed between the adjacent gas tight precursor supply chambers; or
at least two of the two or more separate gas tight precursor supply chambers are arranged adjacent to each other inside the inner cabinet space of the precursor supply cabinet, and at a first distance from each other such that a first flow gap (A) is formed between the adjacent gas tight precursor supply chambers, and at least two of the two or more separate gas tight precursor supply chambers are arranged one on top of the other inside the inner cabinet space of the precursor supply cabinet, and at a second distance from each other such that a second flow gap (B) is formed between the adjacent gas tight precursor supply chambers.

3. The precursor supply cabinet according to claim 1 , wherein:
the two or more separate gas tight precursor supply chambers are arranged spaced apart from the cabinet walls inside the inner cabinet space of the precursor supply cabinet such that flow gaps (C, D, E, F, G, H) are provided between the two or more separate gas tight precursor supply chambers and the cabinet walls.

4. The precursor supply cabinet according to claim 1 , wherein the ventilation discharge connection comprises:
a ventilation outlet provided to the cabinet walls and open to the inner cabinet space of the precursor supply cabinet; and
a suction device connected to the ventilation outlet and arranged to discharge ventilation gas from the inner cabinet space of the precursor supply cabinet via the ventilation outlet.

5. The precursor supply cabinet according to claim 4 , wherein the precursor supply cabinet comprises a top cabinet wall and the ventilation outlet is provided to the top cabinet wall.

6. The precursor supply cabinet according to claim 1 , wherein the one or more ventilation inlet connections comprises a ventilation inlet open to the inner cabinet space of the precursor supply cabinet and arranged to provide ventilation gas into the inner cabinet space of the precursor supply cabinet.

7. The precursor supply cabinet according to claim 1 , wherein the one or more ventilation inlet connections comprises a regulator element provided to the ventilation inlet and arranged to adjust the ventilation inlet for adjusting the ventilation gas flow into the inner cabinet space of the precursor supply cabinet via the ventilation inlet.

8. The precursor supply cabinet according to claim 1 , wherein:
the precursor supply cabinet comprises one or more cabinet doors, and the one or more ventilation inlet connections are arranged to the one or more cabinet doors.

9. The precursor supply cabinet according to claim 1 , wherein the precursor supply cabinet comprises a gas tight lead-through connection extending inside the inner cabinet space of the precursor supply cabinet between the precursor supply chamber and the cabinet walls of the precursor supply cabinet.

10. The precursor supply cabinet according to claim 9 , wherein the separate gas tight precursor supply chamber is arranged spaced apart from one cabinet wall inside the inner cabinet space of the precursor supply cabinet such that the flow gap (H) is provided between the separate gas tight precursor supply chamber and the one cabinet wall, and the gas tight lead-through connection is arranged to extend inside the inner cabinet space of the precursor supply cabinet between the precursor supply chamber and the one cabinet wall across the flow gap (H) between the separate gas tight precursor supply chamber and the one cabinet wall.

11. The precursor supply cabinet according to claim 1 , wherein:
at least one of the flow gaps (A, B, C, D, E, F, G, H) comprises a flow guide for adjusting ventilation gas flow; or
at least one of the flow gaps (A, B) between the two or more separate gas tight precursor supply chambers comprises a flow guide for adjusting ventilation gas flow between the two or more separate gas tight precursor supply chambers; or
at least one of the flow gaps (C, D, E, F, G, H) between the one or more separate gas tight precursor supply chambers and the cabinet walls comprises a flow guide for adjusting ventilation gas flow between the one or more separate gas tight precursor supply chambers and the cabinet walls; or
at least one of the flow gaps (A, B) between the two or more separate gas tight precursor supply chambers comprises a flow guide for adjusting ventilation gas flow between the two or more separate gas tight precursor supply chambers and at least one of the flow gaps (C, D, E, F, G, H) between the one or more separate gas tight precursor supply chambers and the cabinet walls comprises a flow guide for adjusting ventilation gas flow between the one or more separate gas tight precursor supply chambers and the cabinet walls.

12. The precursor supply cabinet according to claim 1 , wherein the precursor supply cabinet comprises a gas panel box provided outside the inner cabinet space, the gas panel box comprises:
panel box walls defining a panel box inner space;
gas connections provided inside the p

Assignees

• Beneq Oy

Inventors

• Soininen Pekka
• Wesslin Johannes
• Malila Matti

Classifications

• F24F7/007 Primary

  with forced flow (using ducting systems F24F7/06) · CPC title

• F17C2205/0111

  Boxes · CPC title

• C23C16/45561 Primary

  Gas plumbing upstream of the reaction chamber · CPC title

• F17C2270/0518

  Semiconductors · CPC title

• F17C13/00

  Details of vessels or of the filling or discharging of vessels · CPC title