3d-printed polishing pad for chemical-mechanical planarization (cmp)
US-2016354896-A1 · Dec 8, 2016 · US
US11548222B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11548222-B2 |
| Application number | US-202016853518-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 20, 2020 |
| Priority date | Mar 31, 2015 |
| Publication date | Jan 10, 2023 |
| Grant date | Jan 10, 2023 |
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A three-dimensional (3D) printer includes an acoustophoresis device having at least a first inlet, a first outlet, and a channel defined between the first inlet and the first outlet. A piezoelectric device is adhered to a surface of the acoustophoresis device to generate sound waves within the channel. A printhead is connected to the first outlet of the acoustophoresis device, wherein a solution comprising anisotropic particles is delivered to the at least first inlet and wherein the anisotropic particles are organized into one or more columns along an axis parallel to a direction of flow of the solution by standing acoustic waves generated by the piezoelectric device, wherein the at least one column of anisotropic particles is aligned with the first outlet, and wherein the first outlet is in fluid communication with the printhead to deliver one or more columns of ordered, anisotropic particles to the printhead.
Opening claim text (preview).
The invention claimed is: 1. A three-dimensional (3D) printer, comprising: an acoustophoresis device having at least a first inlet, at least a first outlet, and a channel defined between the first inlet and the first outlet; a first piezoelectric device adhered to a surface of the acoustophoresis device to generate sound waves within at least a first portion of the channel; and a printhead connected to the first outlet of the acoustophoresis device, the printhead utilized to deposit a material onto a surface for 3D printing; wherein a solution comprising unordered anisotropic particles is delivered to the at least first inlet and wherein the anisotropic particles are organized into one or more columns and are oriented along a long axis of the anisotropic particles in a direction of flow of the solution by standing acoustic waves generated by the first piezoelectric device, wherein the at least one column of anisotropic particles is aligned with the first outlet, and wherein the first outlet is in fluid communication with the printhead to deliver one or more columns comprised of a plurality of ordered, anisotropic particles oriented along the long axis of the anisotropic particles to the printhead, wherein the printhead deposits the one or more columns comprised of a plurality of ordered, anisotropic particles oriented along the long axis of the anisotropic particles onto the surface. 2. The 3D printer of claim 1 , wherein the acoustophoresis device further includes a waste outlet, wherein anisotropic particles organized into one or more columns within a center of the channel are provided to the first outlet and wherein excess solution is provided to the waste outlet. 3. The 3D printer of claim 1 , wherein the acoustophoresis device includes a first stage and a second stage, wherein the first stage includes the at least first inlet and the first outlet, and wherein the second stage includes at least a second inlet and a second outlet, wherein the at least second inlet is in fluid communication with the first outlet of the first stage and wherein the second outlet is in fluid communication with the printhead. 4. The 3D printer of claim 3 , further including a second piezoelectric device adhered a surface of the acoustophoresis device to generate sound waves within the second stage of the acoustophoresis device, wherein the first piezoelectric device generates sound waves within the first stage of the acoustophoresis device. 5. The 3D printer of claim 1 , wherein the solution in which the anisotropic particles are suspended is an epoxy-type solution, and wherein the apparatus further includes a thermal curing element located upstream of the printhead, wherein the thermal curing element thermally cures the epoxy-type solution to preserve the organization of the anisotropic particles. 6. The 3D printer of claim 1 , wherein the solution in which the anisotropic particles are suspended is a hydrogel solution, and wherein the 3D printer further includes a photo-curing window located upstream of the printhead, wherein the photo-curing window allows incident light to cure the hydrogel solution to preserve the organization of the anisotropic particles. 7. The 3D printer of claim 1 , wherein the anisotropic particles have a length, a height, and a width, wherein the length of the anisotropic particles is greater than the height or width. 8. The 3D printer of claim 7 , wherein oriented along the long axis of the anisotropic particles places the particles in an end-to-end configuration, wherein anisotropic particles are located adjacent to one another.
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