Vacuum connection mechanism and electron optical device

Patent metadata

Field	Value
Publication number	US-11545335-B2
Application number	US-201916287268-A
Country	US
Kind code	B2
Filing date	Feb 27, 2019
Priority date	Mar 8, 2018
Publication date	Jan 3, 2023
Grant date	Jan 3, 2023

Abstract

A vacuum connection mechanism includes: a main body part having a first opening and a first sub opening opened symmetrically in a first direction, and a second opening and a second sub opening opened symmetrically in a second direction; a first bellows connected to the first opening and to the end of which a first flange is provided; a first sub bellows connected to the first sub opening and to the end of which a first blind flange is provided; a first supporting member coupling the first flange and the first blind flange; a second bellows connected to the second opening and to the end of which a second flange is provided; a second sub bellows connected to the second sub opening and to the end of which a second blind flange is provided; and a second supporting member coupling the second flange and the second blind flange.

First claim

What is claimed is:

1. A vacuum connection mechanism comprising:
a main body part having a first main opening and a first sub opening being opposite to each other in a first axial direction, and a second main opening and a second sub opening being opposite to each other in a second axial direction different from the first axial direction;
a first main bellows one end of which is connected to the first main opening and to the other end of which a first flange connected to a vacuum pump side is provided;
a first sub bellows one end of which is connected to the first sub opening and to the other end of which a first blind flange is provided;
a first supporting member coupling the first flange and the first blind flange;
a second main bellows one end of which is connected to the second main opening and to the other end of which a second flange connected to a main chamber side is provided;
a second sub bellows one end of which is connected to the second sub opening and to the other end of which a second blind flange is provided; and
a second supporting member coupling the second flange and the second blind flange.

2. The vacuum connection mechanism according to claim 1 ,
wherein the second axial direction is a direction orthogonal to the first axial direction.

3. The vacuum connection mechanism according to claim 2 ,
wherein the first axial direction is a vertical direction, and the second axial direction is a horizontal direction.

4. The vacuum connection mechanism according to claim 1 ,
wherein the second main bellows, the second sub bellows, and the second supporting member are arranged between the first flange and the first blind flange.

5. The vacuum connection mechanism according to claim 1 ,
wherein the main body part has a hollow box shape.

6. The vacuum connection mechanism according to claim 1 ,
wherein the main body part has a cross pipe shape.

7. An electron optical device comprising:
the vacuum connection mechanism according to claim 1 ;
a vacuum pump connected to the first flange side of the vacuum connection mechanism;
a main chamber connected to the second flange side of the vacuum connection mechanism; and
an optical column that is connected to the main chamber and that supplies an electron beam to a sample arranged in the main chamber.

Assignees

• Ebara Corp

Inventors

• Ohara Takashi
• Karimata Tsutomu

Classifications

• G01N23/225

  using electron or ion · CPC title

• H01J2237/182

  Obtaining or maintaining desired pressure · CPC title

• H01J37/261 Primary

  Details · CPC title

• H01J2237/0216

  Means for avoiding or correcting vibration effects · CPC title

• F04D19/042 Primary

  Turbomolecular vacuum pumps · CPC title