Position sensing mechanism

Patent metadata

Field	Value
Publication number	US-11543267-B2
Application number	US-202117141956-A
Country	US
Kind code	B2
Filing date	Jan 5, 2021
Priority date	Jan 5, 2021
Publication date	Jan 3, 2023
Grant date	Jan 3, 2023

Abstract

A position sensing mechanism provided by the invention comprises an encoding element as a sensing signal source, a reading element for sensing signals of the signal source, and a processing unit for receiving and analyzing sensing signals output by the reading element, the position sensing mechanism has a main technical feature lying in a magneto-resistive unit in the reading element for sensing signals of the signal source being a tunneling magneto-resistor (TMR), and two layers of magnetic moments of a reference layer and a free layer of the tunneling magneto-resistor being perpendicular to each other, and in the reference layer and the free layer with the magnetic moments being perpendicular to each other, the magnetic moment of one of the layers is parallel to a film surface, and the magnetic moment of the other layer is perpendicular to the film surface.

First claim

What is claimed is:

1. A position sensing mechanism comprising:
an encoding element having an absolute column magnetic track and an incremental column magnetic track extending side by side with each other along a virtual moving axis;
a reading element adjacent to and spaced apart from the encoding element, and changing in position relative to the encoding element on the virtual moving axis, the reading element having a first magneto-resistive unit acted on by the absolute column magnetic track, and a second magneto-resistive unit acted on by the incremental column magnetic track; and
a processing unit electrically connected to the reading unit for receiving signals generated by the first magneto-resistive unit and the second magneto-resistive unit under actions of the absolute column magnetic track and the incremental column magnetic track respectively, and analyzing positions with the signals received;
characterized in that:
the first magneto-resistive unit and the second magneto-resistive unit are tunneling magneto-resistors (TMR) respectively, each said magneto-resistive unit of the first magneto-resistive unit and the second magneto-resistive unit has magnetic moments of a reference layer and a free layer being perpendicular to each other, and in the reference layer and the free layer, the magnetic moment of one of the layers is parallel to a film surface, and the magnetic moment of the other layer is perpendicular to the film surface.

2. The position sensing mechanism as claimed in claim 1 , wherein the encoding element moves relative to the reading element along the virtual moving axis.

3. The position sensing mechanism as claimed in claim 1 , wherein the reading element moves relative to the encoding element along the virtual moving axis.

4. The position sensing mechanism as claimed in claim 1 , wherein the encoding element is in a straight bar shape.

5. The position sensing mechanism as claimed in claim 1 , wherein the encoding element is in an annular shape.

6. The position sensing mechanism as claimed in claim 1 , wherein the magnetic moment perpendicular to the film surface is the reference layer.

7. The position sensing mechanism as claimed in claim 1 , wherein the magnetic moment perpendicular to the film surface is the free layer.

8. The position sensing mechanism as claimed in claim 1 , wherein the reading element further comprises a chip, and the first magneto-resistive unit and the second magneto-resistive unit are respectively formed on the chip.

9. The position sensing mechanism as claimed in claim 1 , wherein the second magneto-resistive unit is a bridge tunneling magneto-resistor (TMR).

10. The position sensing mechanism as claimed in claim 1 , wherein the first magneto-resistive unit has a single magnetic tunneling junction (MTJ).

Assignees

• Hiwin Mikrosystem Corp

Inventors

• Lai Chih-Huang
• Lee Chia-Chang
• XU Zhi-hao
• Hsiao Heng-Sheng

Classifications

• G01D5/2458 Primary

  with incremental and absolute tracks on separate encoders · CPC title

• G01B7/003

  for measuring position, not involving coordinate determination (coordinate measuring G01B7/004) · CPC title

• G01R33/0206

  Three-component magnetometers · CPC title

• G01D5/145 Primary

  influenced by the relative movement between the Hall device and magnetic fields (see G01R33/06) · CPC title

• G01R33/098

  comprising tunnel junctions, e.g. tunnel magnetoresistance sensors · CPC title