Non-volatile memory cell arrays with a sectioned active region and methods of manufacturing thereof

Patent metadata

Field	Value
Publication number	US-11538815-B2
Application number	US-202016935691-A
Country	US
Kind code	B2
Filing date	Jul 22, 2020
Priority date	Jul 22, 2020
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

Structures for an array of non-volatile memory cells and methods of forming a structure for an array of non-volatile memory cells. An active region of a substrate includes a first section having a side edge and a second section extending laterally from the side edge. The first section of the active region has a first length dimension in a direction parallel to the first side edge. The second section has a second length dimension in the direction parallel to the first side edge. The second length dimension is less than the first length dimension. A fin is positioned on the substrate in the second section of the active region. A gate structure extends over the fin and the second section of the active region.

First claim

What is claimed is:

1. A structure comprising:
a substrate including an active region, the active region including a first section having a first side edge and a second side edge opposite to the first side edge, a second section extending laterally from the first side edge, and a third section extending laterally from the second side edge, the second section of the active region centered along the first side edge of the first section of the active region, the first section having a first length dimension in a direction parallel to the first side edge, the second section having a second length dimension in the direction parallel to the first side edge, and the second length dimension less than the first length dimension;
a first fin positioned on the substrate in the first section of the active region, the second section of the active region, and the third section of the active region; and
a first gate structure that extends over the first fin and the second section of the active region.

2. The structure of claim 1 wherein the third section of the active region has a third length dimension in a direction parallel to the second side edge, and the third length dimension is less than the first length dimension.

3. The structure of claim 2 wherein the third section of the active region is centered along the second side edge of the first section of the active region.

4. The structure of claim 1 further comprising:
a second gate structure that extends across the first fin and the third section of the active region.

5. The structure of claim 1 further comprising:
a plurality of second fins positioned on the substrate in the first section of the active region,
wherein the first fin has a first length, and the plurality of second fins have a second length that is less than the first length.

6. The structure of claim 1 wherein the first fin has a longitudinal axis, and the first fin extends along the longitudinal axis fully beneath the first gate structure.

7. The structure of claim 6 wherein the first fin extends along the longitudinal axis beyond the first gate structure.

8. The structure of claim 1 further comprising:
a trench isolation region in the substrate, the trench isolation region defining a boundary for the active region.

9. A structure comprising:
a substrate including an active region, the active region including a first section having a first side edge and a second section extending laterally from the first side edge, the first section having a first length dimension in a direction parallel to the first side edge, the second section having a second length dimension in the direction parallel to the first side edge, and the second length dimension less than the first length dimension;
a first fin positioned on the substrate in the second section of the active region;
a plurality of second fins on the substrate in the first section of the active region; and
a first gate structure that extends over the first fin, the plurality of second fins, and the second section of the active region;
a semiconductor layer on the first fin and the plurality of second fins; and
a contact coupled with the semiconductor layer,
wherein the contact is positioned over the plurality of second fins and not over the first fin.

10. The structure of claim 9 wherein the active region has a second side edge opposite to the first side edge and a third section extending laterally from the second side edge, the third section has a third length dimension in a direction parallel to the second side edge, and the third length dimension is less than the first length dimension.

11. The structure of claim 10 wherein the second section of the active region is centered along the first side edge of the first section of the active region, and the third section of the active region is centered along the second side edge of the first section of the active region.

12. The structure of claim 10 further comprising:
a third fin positioned on the substrate in the third section of the active region,
wherein the plurality of second fins are laterally arranged between the first fin and the third fin.

13. The structure of claim 12 wherein the first gate structure extends across the third section of the active region and the third fin.

14. The structure of claim 9 wherein the first fin has a first length, and the plurality of second fins have a second length that is greater than the first length.

15. The structure of claim 9 wherein the second section of the active region is centered along the first side edge of the first section of the active region.

16. The structure of claim 9 further comprising:
a trench isolation region in the substrate, the trench isolation region defining a boundary for the active region.

17. The structure of claim 9 further comprising:
a second gate structure that extends across the first section of the active region and the plurality of second fins.

18. A method comprising:
forming a trench isolation region in a substrate to define a boundary for an active region, wherein the active region includes a first section having a first side edge and a second side edge opposite to the first side edge, a second section extending laterally from the first side edge, and a third section extending laterally from the second side edge, the second section of the active region is centered along the first side edge of the first section of the active region, the first section has a first length dimension in a direction parallel to the first side edge, the second section has a second length dimension in the direction parallel to the first side edge, and the second length dimension is less than the first length dimension;
forming a first fin positioned on the substrate in the first section of the active region, the second section of the active region, and the third section of the active region; and
forming a first gate structure that extends over the first fin and the second section of the active region.

19. The method of claim 18 wherein the third section of the active region has a third length dimension in a direction parallel to the second side edge, and the third length dimension is less than the first length dimension.

20. The method of claim 18 further comprising:
forming a second gate structure that extends over the first fin and the third section of the active region.

Assignees

• Globalfoundries Us Inc

Inventors

• Restrepo Oscar D
• Banghart Edmund K
• Taylor William

Classifications

• H01L29/7851

  Electricity · mapped topic

• H01L29/785

  Electricity · mapped topic

• H01L29/0684

  Electricity · mapped topic

• H01L29/66545

  Electricity · mapped topic

• H01L27/0211

  Electricity · mapped topic