Resonant frequency tuning of micromachined mirror assembly

Patent metadata

Field	Value
Publication number	US-11536951-B2
Application number	US-201916658007-A
Country	US
Kind code	B2
Filing date	Oct 18, 2019
Priority date	Oct 18, 2019
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

Embodiments of the disclosure provide a micromachined mirror assembly. The micromachined mirror assembly includes a micro mirror configured to tilt around an axis and a first and a second torsion beam each having a first and a second end. The second end of the first torsion beam and the second end of the second torsion beam are mechanically coupled to the micro mirror along the axis. The micromachined mirror assembly also includes a first DC voltage applied to the first end of the first torsion beam and a second DC voltage, different from the first DC voltage, is applied to the first end of the second torsion beam.

First claim

What is claimed is:

1. A micromachined mirror assembly, comprising:
a micro mirror configured to tilt around an axis; and
a first and a second torsion beam each having a first and a second end;
wherein the second end of the first torsion beam and the second end of the second torsion beam are mechanically coupled to the micro mirror along the axis;
a first voltage applied to the first end of the first torsion beam; and
a second voltage, different from the first voltage, is applied to the first end of the second torsion beam,
wherein a voltage difference between the first voltage applied to the first torsion beam and the second voltage applied to the second torsion beam is adjusted to change a resonant frequency of the micro mirror.

2. The micromachine mirror assembly of claim 1 , further comprising:
a first actuator mechanically coupled to the first torsion beam and configured to apply a first torsional stress around the axis to the first torsion beam; and
a second actuator mechanically coupled to the second torsion beam and configured to apply a second torsional stress around the axis to the second torsion beam,
wherein the first actuator is a first electrostatic actuator, and the second actuator is a second electrostatic actuator.

3. The micromachine mirror assembly of claim 2 , wherein the first electrostatic actuator comprises a first set of comb drives, and the second electrostatic actuator comprises a second set of comb drives.

4. The micromachine mirror assembly of claim 1 , wherein the voltage difference between the first voltage and the second voltage is transformed into heat along the first and second torsion beams and the micro mirror.

5. The micromachine mirror assembly of claim 4 , wherein the heat is transformed into thermal expansion and compressive stress along the first and second torsion beams and the micro mirror.

6. The micromachine mirror assembly of claim 5 , wherein the resonant frequency of the micro mirror is decreased by the thermal expansion and the compressive stress along the first and second torsion beams and the micro mirror.

7. The micromachine mirror assembly of claim 2 , wherein the first and second actuator are configured to apply a first tensional stress and a second tensional stress along the axis to the first and second torsion beams, respectively.

8. The micromachine mirror assembly of claim 7 , wherein a magnitude difference between the first and second torsional stresses is transformed into tensional stress along the axis.

9. The micromachine mirror assembly of claim 7 , wherein the resonant frequency of the micro mirror is increased by the tensional stress along the axis.

10. A micromachined mirror assembly, comprising:
a micro mirror configured to tilt around an axis;
a first torsion beam and a second torsion beam each mechanically coupled to the micro mirror along the axis;
a first torsional actuator mechanically coupled to the first torsion beam and configured to apply a first torsional stress around the axis to the first torsion beam; and
a second actuator mechanically coupled to the second torsion beam and configured to apply a second torsional stress around the axis to the second torsion beam,
wherein a DC voltage difference applied between the first torsion beam and the second torsion beam is adjusted to change a resonant frequency of the micro mirror.

11. The micromachined mirror assembly of claim 10 , wherein the first actuator is a first electrostatic actuator, and the second actuator is a second electrostatic actuator.

12. The micromachine mirror assembly of claim 11 , wherein the tensional actuator is an electrostatic actuator.

13. The micromachine mirror assembly of claim 12 , wherein the electrostatic actuator comprises a set of comb drives.

14. The micromachine mirror assembly of claim 10 , wherein the DC voltage difference is transformed into heat along the first and second torsion beams and the micro mirror.

15. The micromachine mirror assembly of claim 14 , wherein the heat is transformed into thermal expansion and compressive stress along the first and second torsion beams and the micro mirror.

16. The micromachine mirror assembly of claim 15 , wherein the resonant frequency of the micro mirror is decreased by the thermal expansion and the compressive along the first and second torsion beam and the micro mirror.

17. The micromachine mirror assembly of claim 11 , wherein the resonant frequency of the micro mirror is increased by the tensional stress along the axis.

18. The micromachine mirror assembly of claim 10 , wherein each of the first and second torsion beams is made of silicon.

19. A method for driving a micromachined mirror assembly, comprising:
setting a resonant frequency of the micromachined mirror assembly at an initial value; and
applying a DC voltage difference along an axis of the micromachined mirror assembly to decrease the resonant frequency to a first operational value lower than the initial value during operation of the micromachined mirror assembly.

20. The method of claim 19 , further comprising applying torsional stress to the micromachined mirror assembly to increase the resonant frequency to a second operational value greater than the initial value during operation of the micromachined mirror assembly.

Assignees

• Beijing Voyager Tech Co Ltd

Inventors

• Lee Sae Won
• Wang Youmin
• Zhou Qin

Classifications

• G02B7/1821

  for rotating or oscillating mirrors · CPC title

• G02B26/10

  Scanning systems · CPC title

• G01S7/4817

  relating to scanning · CPC title

• G01S17/88

  Lidar systems specially adapted for specific applications · CPC title

• B60R1/12

  Mirror assemblies combined with other articles, e.g. clocks · CPC title