Analytical method and apparatus

Patent metadata

Field	Value
Publication number	US-11536675-B2
Application number	US-202117210787-A
Country	US
Kind code	B2
Filing date	Mar 24, 2021
Priority date	Mar 30, 2020
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

There is provided an analytical method capable of generating a high resolution spectrum of X-rays with an intended energy. The analytical method is for use in an analytical apparatus having a diffraction grating for spectrally dispersing X-rays emanating from a sample, an image sensor for detecting the spectrally dispersed X-rays, and an incident angle control mechanism for controlling the incident angle of X-rays impinging on the diffraction grating. The image sensor has a plurality of photosensitive elements arranged in the direction of energy dispersion. The analytical method starts with specifying an energy of X-rays to be acquired. The incident angle is adjusted based on the specified energy to bring the focal plane of the diffraction grating into positional coincidence with those one or ones of the photosensitive elements which detect X-rays having the specified energy.

First claim

What is claimed is:

1. An analytical method for use in an analytical apparatus having a spectrally dispersive element for spectrally dispersing X-rays emanating from a sample, said analytical method comprising the steps of:
providing an image sensor operative to detect spectrally dispersed X-rays emanating from the sample, the image sensor having a plurality of photosensitive elements arranged in a direction of energy dispersion;
providing an incident angle control mechanism for controlling an incident angle of X-rays impinging on the spectrally dispersive element;
specifying an energy of X-rays to be acquired;
calculating an incident angle of X-rays from the specified energy and a distance between the plurality of photosensitive elements, which detect X-rays having the specified energy, and a focal plane of the spectrally dispersive element; and
adjusting the incident angle of X-rays impinging on the spectrally dispersive element based on the incident angle of X-rays calculated from the specified energy and the distance, wherein the incident angle is adjusted to bring the focal plane of the spectrally dispersive element into positional coincidence with one or more of the plurality of photosensitive elements which detect X-rays having the specified energy.

2. An analytical method as set forth in claim 1 , wherein the incident angle control mechanism comprises a sample stage having a drive mechanism, and wherein adjusting the incident angle of X-rays impinging on the spectrally dispersive element comprises:
adjusting the incident angle of X-rays impinging on the spectrally dispersive element by moving the sample via the drive mechanism of the sample stage.

3. An analytical method as set forth in claim 1 , wherein the incident angle control mechanism comprises a drive mechanism, and wherein adjusting the incident angle of X-rays impinging on the spectrally dispersive element comprises:
adjusting the incident angle of X-rays impinging on the spectrally dispersive element by moving the spectrally dispersive element via the drive mechanism.

4. An analytical method as set forth in claim 1 , wherein the incident angle control mechanism comprises a rotational drive mechanism, and wherein adjusting the incident angle of X-rays impinging on the spectrally dispersive element comprises:
adjusting the incident angle of X-rays impinging on the spectrally dispersive element by rotating the spectrally dispersive element via the rotational drive mechanism.

5. An analytical method as set forth in claim 1 , further comprising:
detecting X-rays by the plurality of photosensitive elements, respectively; and
finding energies of X-rays detected respectively by the plurality of photosensitive elements based on a positional relationship between said sample and said spectrally dispersive element and on a positional relationship of the spectrally dispersive element to the plurality of photosensitive elements.

6. An analytical apparatus comprising:
a spectrally dispersive element for spectrally dispersing X-rays emanating from a sample;
an image sensor operative to detect the spectrally dispersed X-rays and having a plurality of photosensitive elements arranged in a direction of energy dispersion;
an incident angle control mechanism for controlling the incident angle of X-rays impinging on the spectrally dispersive element, wherein the incident angle control mechanism comprises a sample stage, a drive mechanism comprising a piezoelectric device for moving the spectrally dispersive element, or a rotational drive mechanism comprising a piezoelectric device for rotating the spectrally dispersive element; and
a controller for controlling the incident angle control mechanism;
wherein the controller controls the incident angle control mechanism based on a specified energy of X-rays to bring a focal plane of the spectrally dispersive element into positional coincidence with those one or ones of the plurality of photosensitive elements which detect X-rays having the specified energy, wherein, when controlling the incident angle control mechanism, the controller is programmed or configured to:
receive an input for the specified energy of X-rays to be acquired;
calculate an incident angle of X-rays from the specified energy and a distance between the plurality of photosensitive elements, which detect X-rays having the specified energy, and a focal plane of the spectrally dispersive element; and
adjust the incident angle of X-rays impinging on the spectrally dispersive element based on the incident angle of X-rays calculated from the specified energy and the distance, wherein the incident angle is adjusted to bring the focal plane of the spectrally dispersive element into positional coincidence with one or more of the plurality of photosensitive elements which detect X-rays having the specified energy.

Assignees

• Jeol Ltd

Inventors

• Murano Takanori

Classifications

• G01N2223/32

  adjustments of elements during operation · CPC title

• G01N23/2252 Primary

  Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA] · CPC title

• G01N23/2076

  for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS · CPC title

• G01N2223/079

  incident electron beam and measuring excited X-rays · CPC title

• G01N23/2204

  Specimen supports therefor; Sample conveying means therefore · CPC title