Apparatus and method of manufacturing display apparatus

Patent metadata

Field	Value
Publication number	US-11534790-B2
Application number	US-201715806609-A
Country	US
Kind code	B2
Filing date	Nov 8, 2017
Priority date	Apr 10, 2017
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

An apparatus for manufacturing a display apparatus includes a deposition source, a nozzle head, a substrate fixer, and a deposition preventer. The deposition source is outside the chamber and vaporizes or sublimates a deposition material. The nozzle head is in the chamber, is connected to the at least one deposition source, and simultaneously sprays the deposition material onto an entire surface of a display substrate. The substrate fixer is connected to the chamber and moves linearly, with the display apparatus is mounted on the substrate fixer. The deposition preventer is in the chamber surrounding an edge portion of the nozzle head and an edge portion of the substrate fixer. The deposition preventer is heated during a deposition process.

First claim

What is claimed is:

1. A method of manufacturing a display apparatus, the method comprising:
mounting a display substrate on a substrate mounting unit in a chamber;
spraying and depositing a deposition material onto an entire upper surface of the display substrate from a nozzle head;
maintaining a temperature of the display substrate to be lower than a temperature of the deposition material;
spraying a blocking gas from a blocking gas unit: (i) to an outside of a region where the deposition material is sprayed from the nozzle head to the display substrate and (ii) to a side edge of the display substrate, the blocking gas unit being located above at least a portion of the nozzle head and the blocking gas unit facing the upper surface of the display substrate;
measuring a distance between a surface of the nozzle head and the display substrate at a plurality of different areas on the display substrate; and
when the measured distance differs from a predetermined distance between the surface of the nozzle head and the display substrate, operating a linear driving unit to adjust the distance between the surface of the nozzle head and the display substrate by the substrate mounting unit performing a roll motion or a pitch motion to vary the distance between one or more different areas on the display substrate and the nozzle head.

2. The method as claimed in claim 1 , further comprising:
adjusting a degree of parallelization of the nozzle head via which the deposition material is sprayed.

3. The method as claimed in claim 1 , further comprising:
adjusting a degree of parallelization of the display substrate.

4. The method as claimed in claim 1 , further comprising:
discharging the deposition material from the chamber to an outside of the chamber.

5. The method as claimed in claim 1 , further comprising:
adjusting a thickness at which the deposition material is deposited onto the display substrate.

6. The method as claimed in claim 5 , wherein:
the thickness at which the deposition material is deposited onto the display substrate is adjusted by adjusting at least one of a temperature of a substrate fixer in which the display substrate is mounted, an amount of the deposition material supplied into the chamber, and an amount of the deposition material discharged to the outside of the chamber.

7. The method as claimed in claim 1 , further comprising:
adjusting a temperature of the nozzle head via which the deposition material is sprayed.

8. The method as claimed in claim 1 , further comprising:
adjusting a temperature of a substrate fixer in which the display substrate is mounted.

9. The method as claimed in claim 1 , wherein:
the deposition material includes a plurality of different deposition materials, and
the plurality of different deposition materials are sequentially or simultaneously deposited onto the display substrate.

10. The method as claimed in claim 1 , wherein:
the deposition material includes a plurality of different deposition materials, and
the plurality of different deposition materials are mixed in the chamber.

11. The method as claimed in claim 1 , wherein the blocking gas unit is located at a top surface of the chamber.

12. The method as claimed in claim 1 , wherein the deposition material is supplied into the chamber via a carrier gas.

13. The method as claimed in claim 12 , wherein a flowing amount of the deposition material is adjusted via the carrier gas.

14. A method of manufacturing a display apparatus, the method comprising:
mounting a display substrate on a substrate mounting unit in a chamber;
spraying and depositing a deposition material from a nozzle head onto an entire upper surface of the display substrate;
adjusting a thickness at which the deposition material is deposited onto the display substrate by adjusting at least one of a temperature of the nozzle head spraying the deposition material, a temperature of a substrate fixer in which the display substrate is mounted, an amount of the deposition material supplied into the chamber, and an amount of the deposition material discharged to an outside of the chamber;
spraying a blocking gas from a blocking gas unit: (i) to an outside of a region where the deposition material is sprayed from the nozzle head to the display substrate and (ii) to a side edge of the display substrate, the blocking gas unit being located above at least a portion of the nozzle head and the blocking gas unit facing the upper surface of the display substrate;
measuring a distance between a surface of the nozzle head and the display substrate at a plurality of different areas on the display substrate; and
when the measured distance differs from a predetermined distance between the surface of the nozzle head and the display substrate, operating a linear driving unit to adjust the distance between the surface of the nozzle head and the display substrate by the substrate mounting unit performing a roll motion or a pitch motion to vary the distance between one or more different areas on the display substrate and the nozzle head.

15. A method of manufacturing a display apparatus, the method comprising:
mounting a display substrate on a substrate mounting unit in a chamber;
spraying and depositing a plurality of different deposition materials onto an entire upper surface of the display substrate;
adjusting a mixing ratio of the plurality of different deposition materials;
spraying a blocking gas from a blocking gas unit: (i) to an outside of a region where the deposition materials are sprayed from a nozzle head to the display substrate and (ii) to side edge of the display substrate, the blocking gas unit being located above at least a portion of the nozzle head and the blocking gas unit facing the upper surface of the display substrate; and
measuring a distance between a surface of the nozzle head and the display substrate at a plurality of different areas on the display substrate; and
when the measured distance differs from a predetermined distance between the surface of the nozzle head and the display substrate, operating a linear driving unit to adjust the distance between the surface of the nozzle head and the display substrate by the substrate mounting unit performing a roll motion or a pitch motion to vary the distance between one or more different areas on the display substrate and the nozzle head.

Assignees

• Samsung Display Co Ltd

Inventors

• Han Sangjin
• Kang Eugene
• Park Junha
• Seo Mingyu
• Lee Youjong
• Han Jongbun
• Ko Euna
• Park Sungjong

Classifications

• C23C14/541

  Heating or cooling of the substrates · CPC title

• C23C16/45512

  Premixing before introduction in the reaction chamber · CPC title

• C23C16/4584

  the substrate being rotated · CPC title

• C23C14/548

  Controlling the composition · CPC title

• C23C16/4401

  Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber · CPC title