Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
US-2016233085-A1 · Aug 11, 2016 · US
US11530727B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11530727-B2 |
| Application number | US-201816756335-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 16, 2018 |
| Priority date | Oct 19, 2017 |
| Publication date | Dec 20, 2022 |
| Grant date | Dec 20, 2022 |
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A process for manufacturing a friction component made of composite material, includes the densification of a fibrous preform of carbon yarns by a matrix including at least pyrocarbon and at least one ZrOxCy phase, where 1≤x≤2 and 0≤y≤1, the matrix being formed by chemical vapor infiltration at least from a first gaseous precursor of pyrocarbon and a second gaseous precursor including zirconium, the second precursor being an alcohol or a C1 to C6 polyalcohol modified by linking the oxygen atom of at least one alcohol function to a group of formula —Zr—R3, the substituents R being identical or different, and R being selected from: —H, C1 to C5 carbon chains and halogen atoms.
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The invention claimed is: 1. A process for manufacturing a friction component of composite material, comprising: densification of a fibrous preform of carbon yarns by a matrix comprising at least pyrocarbon and at least one ZrO x C y phase, where 1≤x≤2 and 0≤y≤1, the matrix being formed by chemical vapor infiltration at least from a first gaseous precursor of pyrocarbon and a second gaseous precursor comprising zirconium, said second precursor being an alcohol or a C 1 to C 6 polyalcohol, which alcohol or a C 1 to C 6 polyalcohol is modified by linking the oxygen atom of at least one alcohol function to a group of formula —Zr—R 3 , the substituents R being identical or different, and R being selected from: —H, C 1 to C 5 carbon chains and halogen atoms. 2. The process claimed in claim 1 , wherein the densification comprises: a first densification cycle in which a first pyrocarbon matrix phase is formed from the first precursor, a second densification cycle, carried out after the first cycle, in which a second matrix phase comprising the ZrO x C y phase is formed at least from the second precursor, and a third densification cycle, carried out after the second cycle, in which a third pyrocarbon matrix phase is formed from a third gaseous pyrocarbon precursor, identical or different from the first precursor. 3. The process claimed in claim 1 , wherein the densification comprises at least the formation of a co-deposition of the pyrocarbon phase and the ZrO x C y phase from a gaseous mixture of a gaseous pyrocarbon precursor and the second precursor. 4. The process as claimed in claim 1 , wherein R is selected from: —H, C 1 to C 3 carbon chains and halogen atoms. 5. The process as claimed in claim 1 , wherein at least one substituent R is a C 1 to C 5 or C 1 to C 3 carbon chain or a halogen atom. 6. The process as claimed in claim 1 , wherein the process further comprises a deoxygenation heat treatment of the ZrO x C y phase formed. 7. The process as claimed in claim 1 , wherein the ZrO x C y phase, optionally deoxygenated, is present, in the final component, in a mass content of between 0.5% and 25%. 8. The process claimed in claim 7 , wherein the ZrO x C y phase, optionally deoxygenated, is present, in the final component, in a mass content of between 2% and 10%. 9. The process as claimed in claim 1 , wherein the friction component is a brake disc. 10. The process as claimed in claim 1 , wherein the C 1 to C 6 polyalcohol is modified by linking the oxygen atom of each alcohol function to said group of formula —Zr—R 3 .
Deposition of carbon only · CPC title
After-treatment · CPC title
Non-stoichiometric products, e.g. perovskites (ABO3) with an A/B-ratio other than 1 · CPC title
Two-dimensional, e.g. woven structures · CPC title
Composite materials containing carbon and carbon fibres or fibres made of carbonizable material · CPC title
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