Vibration Energy Harvester
US-2019058420-A1 · Feb 21, 2019 · US
Method of manufacturing MEMS vibration element and MEMS vibration element
US11527968B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11527968-B2 |
| Application number | US-201816636777-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 8, 2018 |
| Priority date | Aug 9, 2017 |
| Publication date | Dec 13, 2022 |
| Grant date | Dec 13, 2022 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
A method of manufacturing a MEMS vibration element having a fixed electrode, a movable electrode, and an elastic supporting unit that elastically supports the movable electrode with respect to the fixed electrode includes: etching a base material having a first thickness to form the fixed electrode and the movable electrode; and etching the base material to form the elastic supporting unit having a second thickness, the second thickness being less than the first thickness.
First claim
Opening claim text (preview).
The invention claimed is: 1. A micro electro mechanical system (MEMS) vibration element formed on a Silicon-on-Insulator (SOI) substrate which includes a handle layer, a SiO 2 layer, and a device layer, comprising: a fixed electrode formed in the device layer; a movable electrode formed in the device layer; a fixing portion formed in the device layer and fixed to the handle layer via the SiO 2 layer; and an elastic supporting unit integrally formed in the device layer with the fixing portion, the elastic supporting unit projecting from a surface of the fixing portion toward the fixed electrode, wherein the surface faces the fixed electrode, and elastically supporting the movable electrode with respect to the fixed electrode, wherein at least a portion of the elastic supporting unit has a dimension in a thickness direction of the device layer, the dimension being smaller than a dimension of the fixed electrode and the movable electrode in the thickness direction of the device layer, a length in an extending direction of the portion of the elastic supporting unit which has a dimension being smaller than a dimension of the fixed electrode is longer than a length in an extending direction of the movable electrode, and the fixed electrode, the movable electrode and the elastic supporting unit are not in contact with the handle layer. 2. The MEMS vibration element according to claim 1 , wherein: the fixed electrode and the movable electrode are electrodes having a comb structure. 3. The MEMS vibration element according to claim 2 , wherein: the length dimension of the portion of the elastic supporting unit along the extending direction of the elastic supporting unit is larger than a length dimension of comb teeth of the movable electrode.
Assignees
Inventors
Classifications
Electrets, i.e. having a permanently-polarised dielectric · CPC title
- H02N1/08Primary
with conductive charge carrier, i.e. capacitor machines · CPC title
producing electrical output from mechanical input, e.g. generators (for measurement devices G01) · CPC title
Electrodes · CPC title
Comb structures · CPC title
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- What does patent US11527968B2 cover?
- A method of manufacturing a MEMS vibration element having a fixed electrode, a movable electrode, and an elastic supporting unit that elastically supports the movable electrode with respect to the fixed electrode includes: etching a base material having a first thickness to form the fixed electrode and the movable electrode; and etching the base material to form the elastic supporting unit havi…
- Who is the assignee on this patent?
- Univ Shizuoka Nat Univ Corp, Saginomiya Seisakusho Inc
- What technology area does this patent fall under?
- Primary CPC classification H02N1/08. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Dec 13 2022 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).