Exhaust gas processing apparatus

Patent metadata

Field	Value
Publication number	US-11527422-B2
Application number	US-202016983285-A
Country	US
Kind code	B2
Filing date	Aug 3, 2020
Priority date	Aug 22, 2019
Publication date	Dec 13, 2022
Grant date	Dec 13, 2022

Abstract

There is provided an exhaust gas processing apparatus configured to cause a processing gas to be exposed to or come into contact with a liquid and thereby detoxify the processing gas. The exhaust gas processing apparatus comprises a suction casing provided with an inlet which the processing gas is sucked into and with an outlet which the processing gas is flowed out from; a liquid tank configured to receive an outlet-side part of the suction casing and store the liquid therein; and one or multiple spray nozzles placed in the liquid tank. The outlet of the suction casing is arranged to be located above a liquid surface of the liquid stored in the liquid tank. The one or multiple spray nozzles are configured to spray the liquid from around the outlet of the suction casing to a peripheral part of the outlet.

First claim

What is claimed is:

1. An exhaust gas processing apparatus configured to cause a processing gas to be exposed to or come into contact with a liquid and thereby detoxify the processing gas,
the exhaust gas processing apparatus comprising:
a suction casing provided with an inlet which the processing gas is sucked into and with an outlet which the processing gas is flowed out from;
a liquid tank configured to receive an outlet-side part of the suction casing and store the liquid therein; and
one or multiple spray nozzles placed in the liquid tank, wherein
the outlet of the suction casing is arranged to be located above a liquid surface of the liquid stored in the liquid tank, and wherein
the one or multiple spray nozzles are configured to spray the liquid from around the outlet of the suction casing to a peripheral part of the outlet.

2. The exhaust gas processing apparatus according to claim 1 ,
wherein the one or multiple spray nozzles are configured such that an entire surface in the liquid tank, which includes an outer surface of the suction casing above the liquid surface in the liquid tank and a wall of the liquid tank, is covered with the sprayed liquid.

3. The exhaust gas processing apparatus according to either claim 1 ,
wherein the liquid tank has a weir provided to make a flow of overflowing liquid to a downstream side, and
the outlet of the suction casing is located above the weir.

4. The exhaust gas processing apparatus according to claim 1 ,
wherein the one or multiple spray nozzles comprise:
a first nozzle placed above the outlet of the suction casing and configured to spray the liquid upward; and
a second nozzle placed above the outlet of the suction casing and configured to spray the liquid downward.

5. The exhaust gas processing apparatus according to claim 1 ,
wherein the one or multiple spray nozzles comprise:
a first nozzle placed above the outlet of the suction casing and configured to spray the liquid upward; and
a second nozzle placed above the outlet of the suction casing and configured to spray the liquid downward and/or a third nozzle placed below the outlet of the suction casing and configured to spray the liquid upward.

6. The exhaust gas processing apparatus according to claim 1 ,
wherein the suction casing comprises a first liquid film forming portion provided inside of a wall of the suction casing and configured to form a curtain-like liquid film around the outlet.

7. The exhaust gas processing apparatus according to claim 6 ,
wherein the suction casing has a double pipe structure, and wherein
the first liquid film forming portion includes a liquid passage that is provided between an inner pipe and an outer pipe; and an opening that is in fluid communication with the liquid passage and that is open to an end face or a side wall of the suction casing.

8. The exhaust gas processing apparatus according to claim 7 , further comprising:
a flowmeter and/or a flow control valve configured to measure a flow rate of the liquid that is to be supplied to the first liquid film forming portion.

9. The exhaust gas processing apparatus according to claim 1 , further comprising:
a second liquid film forming portion provided between the inlet and the outlet of the suction casing and configured to form a liquid film on an inner wall surface of the suction casing.

10. The exhaust gas processing apparatus according to claim 1 ,
wherein the suction casing is arranged such that the outlet is located close to the liquid surface of the liquid in the liquid tank.

11. The exhaust gas processing apparatus according to claim 1 ,
wherein a plurality of the spray nozzles are arranged around the suction casing.

12. The exhaust gas processing apparatus according to claim 1 , further comprising:
an eductor provided in the liquid tank and configured to stir the liquid stored in the liquid tank.

13. An exhaust gas processing apparatus configured to cause a processing gas to be exposed to or come into contact with a liquid and thereby detoxify the processing gas,
the exhaust gas processing apparatus comprising:
a suction casing provided with an inlet which the processing gas is sucked into and with an outlet which is provided below the inlet and which the processing gas is flowed out from;
a liquid tank configured to receive an outlet-side part of the suction casing and store the liquid therein;
a liquid film forming portion provided between the inlet and the outlet of the suction casing and configured to form a liquid film on an inner wall surface of the suction casing; and
one or multiple liquid supply devices placed in the liquid tank and configured to inject or spray the liquid, wherein
the suction casing is arranged such that a terminal end of the suction casing is located below a liquid surface of the liquid in the liquid tank, and
the suction casing is provided with the outlet in a side wall on a terminal end side of the suction casing, and wherein
a duct is provided in the liquid tank to guide the processing gas from the outlet of the suction casing toward a downstream side, and
the one or multiple liquid supply devices are arranged to inject or spray the liquid toward inside of the duct and a wall surface of the duct, and
a partition plate formed continuously from whole circumferences of a lower end of the suction casing and of a lower end of the duct and configured to part inside of the liquid tank into an upper space and a lower space.

14. The exhaust gas processing apparatus according to claim 13 ,
wherein the liquid tank has a weir provided to make a flow of overflowing liquid to the downstream side, and
the terminal end of the suction casing is located below an upper end of the weir.

15. The exhaust gas processing apparatus according to claim 13 ,
wherein a plurality of the liquid supply devices are arranged to cross in a flow direction of the processing gas.

16. The exhaust gas processing apparatus according to claim 13 ,
wherein the one or multiple liquid supply devices include an eductor and/or a spray nozzle.

Assignees

• Ebara Corp

Inventors

• Sekine Takafumi
• Inada Takanori
• Miyazaki Kazutomo
• Hanafusa Naoya

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• B01D47/022

  by using a liquid curtain (B01D47/06 takes precedence) · CPC title

• B01D53/68

  Halogens or halogen compounds · CPC title

• B01D2257/553

  Compounds comprising hydrogen, e.g. silanes · CPC title

• B01D2252/103

  Water · CPC title