Assembly for increasing the resolution of a laser scanning microscope

Patent metadata

Field	Value
Publication number	US-11525988-B2
Application number	US-201816481795-A
Country	US
Kind code	B2
Filing date	Jan 25, 2018
Priority date	Jan 31, 2017
Publication date	Dec 13, 2022
Grant date	Dec 13, 2022

Abstract

An arrangement for increasing resolution of a laser scanning microscope has a simplified adjustment and lower susceptibility to errors. The pupil beam from the laser scanning microscope is coupled into a shortened common path interferometer, to make wavefronts of a pupil image mirrored at at least one axis and wavefronts of an unchanged pupil image interfere. The area of a pupil from the pupil beam is split into two complementary portions P and Q producing two partial beams separately supplied to at least one beam deflection means by total-internal reflection along the common path interferometer. The light of the interferometer branches from transmitted light of the one interferometer branch and reflected light of the other interferometer branch is made to interfere at a partly transmissive beam splitter layer to cause constructive interference C and destructive interference D of the wavefronts from the two different portions P and Q of the pupil.

First claim

What is claimed is:

1. A method for improving the resolution or the signal-to-noise ratio of a laser scanning microscope by means of image inversion interferometry, in which a pupil beam in an interferometer branch is mirrored at least once in order to make wavefronts of a pupil image mirrored at at least one axis and of an unmodified pupil image of another interferometer branch interfere, including the steps of:
coupling the pupil beam coming from the laser scanning microscope into a common path interferometer,
splitting the area of a pupil from the pupil beam along a defined axis that is lateral to an optical axis of the collimated beam into two complementary portions P and Q of the pupil under the production of two partial beams that are guided in mirror symmetric fashion along the common path interferometer as two interferometer branches aligned lying opposite one another along the optical axis and that are separately supplied to at least one beam deflection means by way of total-internal reflection,
making the light of the interferometer branches interfere at a partly transmissive beam splitter layer after the at least one beam deflection, wherein light of the one interferometer branch, transmitted by means of the beam splitter layer, and reflected light of the other interferometer branch, and vice versa, form a combination of wavefronts of a first portion P with a second portion Q, complementary to the first portion P, of the pupil, and vice versa, such that constructive interference C and destructive interference D of the wavefronts of the two interferometer branches are producible from the two different portions P and Q of the pupil, and
detecting information of the two complementary portions P and Q of the pupil, which pupil images are interferometric folded inversely to receive complete information of the full pupil area by using both interferometer branches adjusted with a defined phase difference.

2. The method as claimed in claim 1 , wherein splitting the pupil beam into complementary portions P and Q of the pupil in the common path interferometer is realized by means of a double wedge prism such that one of the two complementary portions P or Q is respectively guided in separate wedge prisms as interferometer branches with at least one internal reflection and the interference of the internally reflected light of the interferometer branches is brought about at a contact area, coated with the partly transmissive beam splitter layer, of the wedge prisms, wherein light of the one wedge prism, transmitted by the beam splitter layer), is superposed on reflected light of the other wedge prism and reflected light of the one wedge prism is superposed on transmitted light of the other wedge prism and wavefronts of the first portion P are made to interfere in constructive and destructive fashion with those of the second portion Q such that the beam splitting of the pupil is used to make the wavefronts, mirrored with respect to one another, from portions P and Q interfere.

3. The method as claimed in claim 1 , wherein light that emerges from a hypotenuse face of at least one of the wedge prisms as interfering components of light of the one interferometer branch that was reflected at the beam splitter layer and of light of the other interferometer branch that was transmitted is evaluated.

4. The method as claimed in claim 3 , wherein the intensity is detected after the interfering light has emerged from the at least one hypotenuse face, a detector in a conjugate pupil being used to this end.

5. The method as claimed in claim 3 , wherein, following the emergence of the interfering light from at least one of the hypotenuse faces of the wedge prisms of the double wedge prism, the interfering light from the second portion Q of the conjugate pupil is folded open to form the entire image with the first portion P by means of at least one further double wedge prism, which is opposite the at least one hypotenuse face and disposed downstream thereof, with a hypotenuse face aligned parallel thereto.

6. The method as claimed in claim 3 , wherein, following the emergence of the interfering light from the hypotenuse faces of the wedge prisms of the double wedge prism, the interfering light from respectively one portion U+Tx+R+Sx or T−Ux+S−Rx of the conjugate pupil, which has interfered, is split into two quarter portions U+Tx+Ry+Sxy and R+Sx−Uy−Txy or T−Ux+Sy−Rxy and S−Rx−Ty+Uxy in each case, guided in one of the further double wedge prisms within the meaning of a common path interferometer and superposed in constructive and destructive fashion by means of respectively one further double wedge prism, which is arranged with parallel small leg faces rotated through 90° with respect to the respective hypotenuse face of the wedge prism, such that four quarters of further conjugate pupils, which can be composed to make a full pupil image and which have each been made to interfere differently with all quarter portions R, S, T, U, emerge at the hypotenuse faces of the further double wedge prisms.

7. The method as claimed in claim 1 , wherein
splitting the pupil beam into complementary portions P and Q of the pupil in the common path interferometer is realized by means of a double wedge prism,
guiding respectively one of the two complementary portions P or Q of the pupil as interferometer branches is implemented in separate wedge prisms, wherein an Amici-type roof prism is used in place of at least one of the wedge prisms, said roof prism, for the purposes of forming the wedge prism, being complemented with a complementary prism but being separated therefrom by an air gap, and
inverting the complementary portions P and Q is carried out as a rotation in the at least one roof prism by means of two internal reflections of the portions P or Q at roof edges of the one roof prism, and
interfering of the light of the at least one of the interferometer branches, reflected twice internally, is implemented at a contact area of the wedge prisms coated with a partly transmissive beam splitter layer, wherein twice reflected light of the one roof prism is superposed on transmitted light of the other wedge prism such that the beam splitting of the pupil leads to the interference of wavefronts, rotated through 180° with respect to one another, of the portions P and Q of the pupil.

8. The method as claimed in claim 7 , wherein both wedge prisms are replaced by roof prisms with a complementary prism and an air gap in order to produce a full image of the conjugate pupil from the pupil by the interferometer branches with constructive and destructive interference.

9. An arrangement for improving the resolution or the signal-to-noise ratio of a laser scanning microscope by means for image inversion interferometry, containing means for mirroring a pupil beam in an interferometer branch in order to make a pupil image mirrored at at least one lateral axis interfere with an unchanged pupil image of another interferometer branch, wherein
a compact common path interferometer is provided for splitting the area of a pupil from the pupil beam along a defined axis that is lateral to an optical axis of the collimated beam by circular sectioning the pupil area into two complementary portions P and Q, the common path interferometer containing at least one double wedge prism made of two right angled, mirror symmetrically arranged wedge prisms, which each are in contact with one another on a large leg face (a) and which have a partly transmissive beam splitter layer therebetween,
light from the pupil beam with a pupil of the laser scanning microscope is directed in orthogonal fashion on a small leg face of the wedge prisms in each case, wherein either the first portion P or the second complementary portion

Assignees

• Zeiss Carl Microscopy Gmbh

Inventors

• Wicker Kai
• Netz Ralf

Classifications

• G02B21/0072

  details concerning resolution or correction, including general design of CSOM objectives · CPC title

• G02B27/1066

  for enhancing image performance, like resolution, pixel numbers, dual magnifications or dynamic range, by tiling, slicing or overlapping fields of view · CPC title

• G02B21/0056 Primary

  based on optical coherence, e.g. phase-contrast arrangements, interference arrangements · CPC title

• G02B27/126

  The splitting element being a prism or prismatic array, including systems based on total internal reflection · CPC title

• G02B21/00 Primary

  Microscopes · CPC title