Movable platen cooling apparatus and movable platen cooling system
US-2019011169-A1 · Jan 10, 2019 · US
US11525607B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11525607-B2 |
| Application number | US-202016940992-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 28, 2020 |
| Priority date | Jan 29, 2018 |
| Publication date | Dec 13, 2022 |
| Grant date | Dec 13, 2022 |
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A cryogenic cooling system includes a gas circulation source; a cryocooler that cools a cooling gas; a cooling gas flow path that causes a cooling gas to flow from the gas circulation source to the object to be cooled; and a control device that controls the gas circulation source so as to execute initial cooling of the object to be cooled according to a prescribed flow rate pattern. The prescribed flow rate pattern is predetermined such that the cooling gas flows through the cooling gas flow path at a first average flow rate, and the cooling gas flows through the cooling gas flow path at a second average flow rate. The second average flow rate is smaller than the first average flow rate such that the cooling capacity of the cryogenic cooling system is increased.
Opening claim text (preview).
What is claimed is: 1. A cryogenic cooling system comprising: a gas circulation source configured to circulate a cooling gas; a cryocooler that comprises a cryocooler stage, the cryocooler stage is configured to cool the cooling gas; a cooling gas flow path configured to cause a cooling gas to flow from the gas circulation source via the cryocooler stage and an object to be cooled to the gas circulation source; and a control device configured to control the gas circulation source to execute initial cooling of the object to be cooled from a room temperature to a target cooling temperature according to a prescribed flow rate pattern, wherein the prescribed flow rate pattern is predetermined such that the cooling gas flows through the cooling gas flow path at a first average flow rate from a start of the initial cooling to a transition timing, and the cooling gas flows through the cooling gas flow path at a second average flow rate from the transition timing to a completion of the initial cooling, and wherein the second average flow rate is smaller than the first average flow rate such that a cooling capacity of the cryogenic cooling system is increased as compared to a case where the first average flow rate is maintained from the transition timing to the completion of the initial cooling. 2. The cryogenic cooling system according to claim 1 , wherein the control device is configured to start the initial cooling in synchronization with activation of the gas circulation source or activation of the gas circulation source and the cryocooler. 3. The cryogenic cooling system according to claim 1 , wherein the first average flow rate is set to an upper limit cooling gas flow rate in the cryogenic cooling system at least temporarily from the start of the initial cooling to the transition timing. 4. The cryogenic cooling system according to claim 1 , wherein the second average flow rate is set to a cooling gas flow rate for maximizing the cooling capacity of the cryogenic cooling system at the target cooling temperature at least temporarily from the transition timing to the completion of the initial cooling. 5. The cryogenic cooling system according to claim 1 , wherein the transition timing is predetermined in a period after a first reference time and before a second reference time, wherein the first reference time is expressed as a ratio of an amount of heat to be removed from the object to be cooled by the initial cooling to the cooling capacity of the cryogenic cooling system at a first temperature, and the second reference time is expressed as a ratio of the amount of heat to be removed from the object to be cooled by the initial cooling to the cooling capacity of the cryogenic cooling system at a second temperature, and wherein the first temperature and the second temperature are selected from a temperature range from the room temperature to the target cooling temperature, and the second temperature is lower than the first temperature. 6. The cryogenic cooling system according to claim 1 , wherein the control device comprises: an initial cooling setting that is configured to predetermine a target cooling gas flow rate at each time from the start to the completion of the initial cooling; and a gas flow rate control unit that is configured to determine the target cooling gas flow rate in accordance with the initial cooling setting and an elapsed time from the start of the initial cooling, and controls the gas circulation source such that the cooling gas flows through the cooling gas flow path at the target cooling gas flow rate.
Flow or movement of content · CPC title
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Cooling · CPC title
by liquid-circulating or vapour-circulating jackets · CPC title
by vacuum spaces, e.g. Dewar flask (for household use A47J41/02) · CPC title
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