Lamp device, exposure apparatus, and method of manufacturing article

Patent metadata

Field	Value
Publication number	US-11521845-B2
Application number	US-202017018092-A
Country	US
Kind code	B2
Filing date	Sep 11, 2020
Priority date	Sep 17, 2019
Publication date	Dec 6, 2022
Grant date	Dec 6, 2022

Abstract

The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.

First claim

What is claimed is:

1. A lamp device comprising:
a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and
a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes,
wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion, and
wherein the bayonet cap portion include no opening in the peripheral surface.

2. The device according to claim 1 , wherein
the bayonet cap portion includes a third opening in the peripheral surface, and
the third opening is smaller than the first opening and the second opening.

3. The device according to claim 1 , wherein
the lamp device is held by a holding device including a gas supply port and a gas exhaust port,
the bayonet cap portion includes the first opening in the bottom surface at a position overlapping with the gas supply port and the second opening in the bottom surface at a position overlapping with the gas exhaust port in a state in which the lamp device is held by the holding device.

4. The device according to claim 3 , further comprising an alignment portion configured to align the first opening and the second opening with the gas supply port and the gas exhaust port of the holding device, respectively.

5. The device according to claim 4 , wherein the alignment portion includes one of a convex portion and a concave portion that is engaged with the holding device and defines a position in a circumferential direction.

6. The device according to claim 3 , wherein the bottom surface of the bayonet cap portion is a held surface held by the holding device.

7. The device according to claim 1 , further comprising a storage portion configured to temporarily store a gas supplied from the first opening to the inside of the bayonet cap portion.

8. The device according to claim 1 , further comprising an electrically conductive member partially arranged on an inner surface of the glass tube and configured to connect the one electrode with the bayonet cap portion,
wherein the bayonet cap portion includes the first opening at a position overlapping with the electrically conductive member in a circumferential direction of the glass tube.

9. The device according to claim 1 , wherein
mercury is sealed inside the glass tube, and
the lamp device further comprises a sealing portion configured to perform sealing so as to keep the inside of the glass tube in an airtight state.

10. The device according to claim 9 , wherein the bayonet cap portion is electrically connected to the glass tube and the one electrode of the pair of electrodes via an electrically conductive material provided in the sealing portion.

11. The device according to claim 10 , wherein a thermal expansion coefficient of the electrically conductive material is different from thermal expansion coefficients of the glass tube and the sealing portion.

12. The device according to claim 9 , wherein the sealing portion seals the glass tube by being enclosed in the end portion of the glass tube.

13. An exposure apparatus that exposes a substrate, comprising:
a holding device configured to hold a lamp device defined in claim 1 ,
wherein the holding device includes a gas supply port configured to supply a gas to the inside of the bayonet cap portion in the lamp device via the first opening of the lamp device, and a gas exhaust port configured to exhaust the gas from the inside of the bayonet cap portion via the second opening of the lamp device.

14. The apparatus according to claim 13 , further comprising a storage portion configured to temporarily store a gas supplied to the lamp device, wherein the gas exhaust port is provided in the storage portion.

15. The apparatus according to claim 13 , further comprising a control unit configured to control a supply amount of a gas supplied to the inside of the bayonet cap portion via the first opening and an exhaust amount of the gas exhausted from the inside of the bayonet cap portion via the second opening.

16. A method of manufacturing an article, the method comprising;
exposing a substrate using an exposure apparatus; and
processing the substrate exposed in the exposing,
wherein the article is manufactured from the substrate processed in the processing,
wherein the exposure apparatus comprises a holding device configured to hold a lamp device,
wherein the holding device includes a gas supply port configured to supply a gas to an inside of a bayonet cap portion in the lamp device via a first opening of the lamp device, and a gas exhaust port configured to exhaust the gas from the inside of the bayonet cap portion via a second opening of the lamp device, and
wherein the lamp device comprises:
a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and
the bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes,

wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.

17. A lamp device comprising:
a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and
a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes,
wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion,
wherein the lamp device is held by a holding device including a gas supply port and a gas exhaust port, and
wherein the bayonet cap portion includes the first opening in the bottom surface at a position overlapping with the gas supply port and the second opening in the bottom surface at a position overlapping with the gas exhaust port in a state in which the lamp device is held by the holding device.

18. An exposure apparatus that exposes a substrate, comprising:
a holding device configured to hold a lamp device,
wherein the lamp device comprises:
a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and
a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes,

wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion, and
wherein the holding device includes a gas supply port configured to supply a gas to the inside of the bayonet cap portion in the lamp device via the first opening of the lamp device, and a gas ex

Assignees

• Canon Kk

Inventors

• Matsumoto Hideki
• Sugiyama Yasushi
• Suzuki Kohei
• Yokota Yukihiro
• Ota Shunsuke

Classifications

• H01J61/822 Primary

  High-pressure mercury lamps · CPC title

• H01J61/366

  Seals for leading-in conductors · CPC title

• H01J61/0732

  characterised by the construction of the electrode · CPC title

• G03F7/70016 Primary

  by discharge lamps · CPC title

• H01J61/302

  characterised by the material of the vessel · CPC title