Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition

Patent metadata

Field	Value
Publication number	US-11521840-B2
Application number	US-201815899634-A
Country	US
Kind code	B2
Filing date	Feb 20, 2018
Priority date	Apr 20, 2017
Publication date	Dec 6, 2022
Grant date	Dec 6, 2022

Abstract

A method and apparatus are for controlling stress variation in a material layer formed via pulsed DC physical vapour deposition. The method includes the steps of providing a chamber having a target from which the material layer is formed and a substrate upon which the material layer is formable, and subsequently introducing a gas within the chamber. The method further includes generating a plasma within the chamber and applying a first magnetic field proximate the target to substantially localise the plasma adjacent the target. An RF bias is applied to the substrate to attract gas ions from the plasma toward the substrate and a second magnetic field is applied proximate the substrate to steer gas ions from the plasma to selective regions upon the material layer formed on the substrate.

First claim

What is claimed is:

1. A method of controlling stress variation in a material layer formed via pulsed DC physical vapour deposition, the method comprising the steps of:
providing a chamber comprising a target from which the material layer is formed and a substrate upon which the material layer is formable, wherein the substrate is disposed on a platen such that the substrate is over a recess in an outer surface of the platen in the chamber;
introducing a gas within the chamber;
generating a plasma within the chamber using a pulsed DC potential between an anode ring within the chamber and the target;
applying a first magnetic field proximate the target to substantially localise the plasma adjacent the target;
applying an RF bias voltage to the substrate;
applying a second magnetic field proximate the substrate that does not substantially interact with any other magnetic fields remote from the platen to steer gas ions from the plasma to selective regions upon the material layer formed on the substrate; and
compacting the material layer on the substrate using the gas ions such that stress variation in a center of the substrate is within 400 MPa of a periphery of the substrate,
wherein the second magnetic field is generated in a direction that is substantially perpendicular to a flat surface of the substrate from a magnetic array disposed in the recess of the platen, and
wherein the gas ions steered by the second magnetic field are substantially unaffected by the first magnetic field.

2. A method according to claim 1 , wherein the second magnetic field is applied at a central portion of the substrate.

3. A method according to claim 1 , further comprising rotating the second magnetic field relative to the substrate.

4. A method according to claim 1 further comprising rotating the second magnetic field relative to the substrate as the material layer is formed.

5. A method according to claim 3 , wherein the rotation take places about an axis which extends substantially perpendicular to the substrate.

6. A method according to claim 1 , further comprising a plurality of deposition steps for forming the material layer, wherein the substrate is rotated relative to the platen prior to commencing each step.

7. A method according to claim 6 , wherein the substrate is rotated through an angular range of 360°/n relative to the platen, between each deposition step, where n is the number of deposition steps.

Assignees

• Spts Technologies Ltd

Inventors

• Wilby Anthony
• Burgess Steve
• Moncrieff Ian
• Widdicks Clive
• Haymore Scott
• Hyndman Rhonda

Classifications

• H10P14/69391

  the material containing aluminium, e.g. Al2O3 · CPC title

• H10P14/6329

  using physical ablation of a target, e.g. physical vapour deposition or pulsed laser deposition · CPC title

• H10P14/44

  Physical vapour deposition [PVD] · CPC title

• H10W20/056

  by filling conductive material into holes, grooves or trenches · CPC title

• B81C2201/0181

  Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology · CPC title