Non-telecentric light guide elements

Patent metadata

Field	Value
Publication number	US-11520236-B2
Application number	US-202117474779-A
Country	US
Kind code	B2
Filing date	Sep 14, 2021
Priority date	Oct 29, 2019
Publication date	Dec 6, 2022
Grant date	Dec 6, 2022

Abstract

The present disclosure relates to systems and methods relating to the fabrication of light guide elements. An example system includes an optical component configured to direct light emitted by a light source to illuminate a photoresist material at one or more desired angles so as to expose an angled structure in the photoresist material. The photoresist material overlays at least a portion of a first surface of a substrate. The optical component includes a container containing a light-coupling material that is selected based in part on the one or more desired angles. The system also includes a reflective surface arranged to reflect at least a first portion of the emitted light to illuminate the photoresist material at the one or more desired angles.

First claim

What is claimed is:

1. An optical system comprising:
a substrate;
a light-emitter device; and
an optical waveguide arranged along a surface of the substrate, wherein the optical waveguide comprises an input surface and a plurality of mirror surfaces, the plurality of mirror surfaces including at least a first mirror surface positioned at a first distance from the input surface and a second mirror surface positioned at a second distance from the input surface, wherein the optical waveguide is configured to guide light emitted by the light-emitter device from the input surface to each of the plurality of mirror surfaces, wherein a first portion of the guided light interacts with the first mirror surface so as to direct first reflected light out of the optical waveguide, wherein a second portion of the guided light interacts with the second mirror surface so as to direct second reflected light out of the optical waveguide, wherein the first mirror surface is arranged at a first angle with respect to the substrate, wherein the second mirror surface is arranged at a second angle with respect to the substrate, wherein the second angle is different than the first angle, and wherein the second distance is greater than the first distance.

2. The optical system of claim 1 , wherein the first angle and the second angle are each between 30 degrees and 60 degrees with respect to the substrate.

3. The optical system of claim 1 , wherein the optical waveguide comprises a photoresist material.

4. The optical system of claim 3 , wherein the photoresist material comprises a polymeric photo-patternable material.

5. The optical system of claim 3 , wherein the photoresist material comprises at least one of: SU-8 polymer, Kloe K—Cl negative photoresist, PHOTOPOSIT negative photoresist, or JSR negative tone THB photoresist.

6. The optical system of claim 1 , further comprising a cylindrical lens, wherein the light-emitter device is configured to emit light toward the cylindrical lens, wherein upon interacting with the cylindrical lens, at least a portion of the emitted light is coupled into the optical waveguide.

7. The optical system of claim 6 , wherein the cylindrical lens is configured to perform at least one of: focusing the emitted light, defocusing the emitted light, or directing the emitted light into the optical waveguide.

8. The optical system of claim 6 , wherein the cylindrical lens comprises an optical fiber.

9. The optical system of claim 1 , wherein the light-emitter device comprises a laser assembly having one or more laser bars.

10. The optical system of claim 1 , wherein the plurality of mirror surfaces comprises a reflective material, wherein the reflective material comprises a metallic coating.

11. The optical system of claim 10 , wherein the metallic coating comprises at least one of: titanium, platinum, gold, silver, or aluminum.

12. The optical system of claim 1 , wherein the plurality of mirror surfaces comprises a reflective material, wherein the reflective material comprises a dielectric coating or a dielectric stack.

13. The optical system of claim 1 , wherein the optical waveguide comprises a plurality of vertical structures and a plurality of angled structures, wherein each mirror surface of the plurality of mirror surfaces is disposed along a respective angled structure of the plurality angled structures.

14. The optical system of claim 13 , wherein the plurality of vertical structures includes the input surface, wherein the light emitted by the light-emitter device is in-coupled into the optical waveguide by way of the input surface.

15. The optical system of claim 13 , wherein the first mirror surface is disposed on a first angled structure of the plurality of angled structures, wherein the second mirror surface is disposed on a second angled structure of the plurality of angled structures, and wherein the plurality of vertical surfaces includes a first side surface extending between the input surface and the first angled structure and a second side surface extending between the first angled structure and the second angled structure.

16. The optical system of claim 1 , wherein the optical waveguide is configured to guide at least a portion of the emitted light via total internal reflection.

17. The optical system of claim 1 , wherein the substrate is optically transparent, wherein the substrate comprises a first surface and a second surface opposite the first surface, wherein the optical waveguide is arranged along the first surface, wherein the first reflected light and the second reflected light are transmitted through the second surface and thereafter into an environment of the optical system.

18. A compact lidar system comprising:
an optical system, wherein the optical system comprises:
a substrate;
a light-emitter device; and
an optical waveguide arranged along a surface of the substrate, wherein the optical waveguide comprises an input surface and a plurality of mirror surfaces, the plurality of mirror surfaces including at least a first mirror surface positioned at a first distance from the input surface and a second mirror surface positioned at a second distance from the input surface, wherein the optical waveguide is configured to guide light emitted by the light-emitter device from the input surface to each of the plurality of mirror surfaces, wherein a first portion of the guided light interacts with the first mirror surface so as to direct first reflected light out of the optical waveguide, wherein a second portion of the guided light interacts with the second mirror surface so as to direct second reflected light out of the optical waveguide, wherein the first mirror surface is arranged at a first angle with respect to the substrate, wherein the second mirror surface is arranged at a second angle with respect to the substrate, wherein the second angle is different than the first angle, and wherein the second distance is greater than the first distance,

wherein the compact lidar system is configured to obtain information about one or more objects in a given environment.

19. The compact lidar system of claim 18 , wherein the first angle and the second angle are each between 30 degrees and 60 degrees with respect to the substrate.

20. The compact lidar system of claim 18 , wherein the optical waveguide comprises a photoresist material.

Assignees

• Waymo Llc

Inventors

• Dunphy James
• Hutchison David

Classifications

• G01S7/4814

  of transmitters alone · CPC title

• G02B2006/12173

  Masking · CPC title

• G03F7/702 Primary

  Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems · CPC title

• G02B6/4214 Primary

  the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device (G02B6/4246 takes precedence) · CPC title

• G02B6/138

  by using polymerisation · CPC title