Piezoelectric resonator device

Patent metadata

Field	Value
Publication number	US-11515857-B2
Application number	US-201615552498-A
Country	US
Kind code	B2
Filing date	Jan 6, 2016
Priority date	Feb 26, 2015
Publication date	Nov 29, 2022
Grant date	Nov 29, 2022

Abstract

A third through hole is formed in a crystal resonator plate of a crystal resonator to penetrate between a first main surface and a second main surface. A through electrode of the third through hole is conducted to a first excitation electrode. A seventh through hole is formed in a first sealing member of the crystal resonator to penetrate between a first main surface and a second main surface. The through electrode of the third through hole is conducted to the through electrode of the seventh through hole. The third through hole is not superimposed to the seventh through hole in plan view.

First claim

The invention claimed is:

1. A piezoelectric resonator device, comprising:
a piezoelectric resonator plate including a first excitation electrode formed on a first main surface of a substrate, and a second excitation electrode formed on a second main surface of the substrate, the second excitation electrode making a pair with the first excitation electrode;
a first sealing member covering the first excitation electrode of the piezoelectric resonator plate;
a second sealing member covering the second excitation electrode of the piezoelectric resonator plate; and
an internal space formed by bonding the first sealing member to the piezoelectric resonator plate and by bonding the second sealing member to the piezoelectric resonator plate, the internal space hermetically sealing a vibrating part including the first excitation electrode and the second excitation electrode of the piezoelectric resonator plate,
wherein through holes for the piezoelectric resonator plate are formed in the piezoelectric resonator plate so as to penetrate between the first main surface and the second main surface, the through holes for the piezoelectric resonator plate including: respective through electrodes for establishing conduction between electrodes formed on the first main surface and the second main surface; and respective through parts, and the through electrodes are conducted to either one of the first excitation electrode and the second excitation electrode,
wherein through holes for the first sealing member are formed in the first sealing member so as to penetrate between a first main surface and a second main surface thereof, the through holes for the first sealing member including: respective through electrodes for establishing conduction between electrodes formed on the first main surface and the second main surface; and respective through parts, and
wherein the through electrodes of the through holes for the piezoelectric resonator plate are conducted to the through electrodes of the through holes for the first sealing member while the through holes for the piezoelectric resonator plate are not superimposed to the through holes for the first sealing member in plan view.

2. The piezoelectric resonator device according to claim 1 ,
wherein the through electrodes of the through holes for the piezoelectric resonator plate are conducted to the through electrodes of the through holes for the first sealing member by bonding a bonding pattern formed on the first main surface of the piezoelectric resonator plate so as to surround the through hole for the piezoelectric resonator plate to a bonding pattern formed on the second main surface of the first sealing member so as to surround the through holes for the first sealing member.

3. The piezoelectric resonator device according to claim 2 ,
wherein the bonding pattern of the piezoelectric resonator plate is constituted by a base PVD film deposited on the first main surface of the piezoelectric resonator plate by physical vapor deposition, and an electrode PVD film deposited on the base PVD film by physical vapor deposition,
wherein the bonding pattern of the first sealing member is constituted by a base PVD film deposited on the second main surface of the first sealing member by physical vapor deposition, and an electrode PVD film deposited on the base PVD film by physical vapor deposition, and
wherein the bonding pattern of the piezoelectric resonator plate and the bonding pattern of the first sealing member are bonded to each other by diffusion bonding.

4. The piezoelectric resonator device according to claim 1 ,
wherein at least a first external electrode terminal and a second external electrode terminal are disposed on a second main surface of the second sealing member so as to be electrically connected to an external circuit board using a flowable conductive bonding material,
wherein the first excitation electrode of the piezoelectric resonator plate is connected to the first external electrode terminal of the second sealing member via a first terminal formed on the first main surface of the first sealing member, and
wherein the second excitation electrode of the piezoelectric resonator plate is connected to the second external electrode terminal of the second sealing member via a second terminal formed on the first main surface of the first sealing member.

5. The piezoelectric resonator device according to claim 4 ,
wherein a first electrical path and a second electrical path are formed outside sealing parts that hermetically seal the vibrating part of the piezoelectric resonator plate in plan view, the first electrical path conducting the first terminal to the first external electrode terminal, and the second electrical path conducting the second terminal to the second external electrode terminal.

6. The piezoelectric resonator device according to claim 5 ,
wherein the first electrical path and the second electrical path are not electrically connected to the sealing parts.

7. The piezoelectric resonator device according to claim 4 ,
wherein the first terminal and the second terminal include respective outer side parts that are positioned outside the internal space in plan view, and the outer side parts are used as test terminals for the vibrating part of the piezoelectric resonator plate.

8. A piezoelectric resonator device, comprising:
a piezoelectric resonator plate including a first excitation electrode formed on a first main surface of a substrate, and a second excitation electrode formed on a second main surface of the substrate, the second excitation electrode making a pair with the first excitation electrode;
a first sealing member covering the first excitation electrode of the piezoelectric resonator plate;
a second sealing member covering the second excitation electrode of the piezoelectric resonator plate, and
an internal space formed by bonding the first sealing member to the piezoelectric resonator plate and by bonding the second sealing member to the piezoelectric resonator plate, the internal space hermetically sealing a vibrating part including the first excitation electrode and the second excitation electrode of the piezoelectric resonator plate,
wherein the first excitation electrode and the second excitation electrode are not electrically connected to sealing parts that hermetically seal the vibrating part of the piezoelectric resonator plate.

9. The piezoelectric resonator device according to claim 8 ,
wherein a through hole for the piezoelectric resonator plate is formed in the piezoelectric resonator plate so as to penetrate between the first main surface and the second main surface, the through hole for the piezoelectric resonator plate including: a through electrode for establishing conduction between electrodes formed on the first main surface and the second main surface; and a through part, and the through electrode is conducted to the second excitation electrode,
wherein a through hole for the first sealing member is formed in the first sealing member so as to penetrate between a first main surface and a second main surface thereof, the through hole for the first sealing member including: a through electrode for establishing conduction between electrodes formed on the first main surface and the second main surface; and a through part, and the through electrode is conducted to the first excitation electrode of the piezoelectric resonator plate, and
wherein the through hole for the piezoelectric resonator plate and the through hole for the first sealing member are formed inside the sealing parts in plan view.

10. The piezoelectric resonator device according to claim 9 ,
wherein another through hole for the first sealing member is f

Assignees

• Daishinku Corp

Inventors

• Kojo Takuya
• Ishino Satoru

Classifications

• H03H9/0547 Primary

  consisting of a vertical arrangement (H03H9/0566 takes precedence) · CPC title

• H03H9/0595

  the holder support and resonator being formed in one body · CPC title

• H03H2003/022

  the resonators or networks being of the cantilever type · CPC title

• H03H2003/0442

  of a non-piezoelectric layer · CPC title

• H03H3/04

  for obtaining desired frequency or temperature coefficient · CPC title