Particle detection device and image generation apparatus

Patent metadata

Field	Value
Publication number	US-11513238-B2
Application number	US-202117447788-A
Country	US
Kind code	B2
Filing date	Sep 15, 2021
Priority date	Mar 31, 2021
Publication date	Nov 29, 2022
Grant date	Nov 29, 2022

Abstract

A particle detection device of an embodiment includes: a detector including a plurality of superconducting strips, and detecting a particle generated from a particle generation source; a conversion mechanism including a plurality of channels provided for the respective superconducting strips, and converting an analog signal from a corresponding one of the superconducting strips into a digital signal; an aggregation mechanism including a circuit which receives an output from the conversion mechanism; a first temperature maintaining portion maintaining a first temperature equal to or lower than a superconducting transition temperature; a first low-temperature container housing the first temperature maintaining portion; and a vacuum container housing the conversion mechanism and the first low-temperature container, and including an opening, the detector being housed in the first low-temperature container, and being connected to the first temperature maintaining portion, and the conversion mechanism being maintained at a temperature not lower than the first temperature.

First claim

The invention claimed is:

1. A particle detection device comprising:
a detector that includes a plurality of superconducting strips, and detects a particle generated from a particle generation source;
a conversion mechanism that includes a plurality of channels provided for the respective superconducting strips, and converts an analog signal from a corresponding one of the superconducting strips into a digital signal;
an aggregation mechanism that includes a circuit which receives an output from the conversion mechanism;
a first temperature maintaining portion that maintains a first temperature that is equal to or lower than a superconducting transition temperature;
a first low-temperature container that houses the first temperature maintaining portion; and
a vacuum container that houses the conversion mechanism and the first low-temperature container, and has an opening,
wherein the detector is housed in the first low-temperature container, and is connected to the first temperature maintaining portion,
the conversion mechanism is maintained at a temperature equal to or higher than the first temperature, and
the aggregation mechanism is disposed outside the first low-temperature container.

2. The particle detection device according to claim 1 , further comprising:
a second temperature maintaining portion that maintains a second temperature that is equal to or higher than the first temperature; and
a second low-temperature container that houses the second temperature maintaining portion and the first low-temperature container, and is housed in the vacuum container.

3. The particle detection device according to claim 2 , wherein the conversion mechanism is housed in the second low-temperature container, and is connected to the second temperature maintaining portion.

4. The particle detection device according to claim 1 , wherein the conversion mechanism is housed in the first low-temperature container, and is connected to the first temperature maintaining portion.

5. The particle detection device according to claim 1 , wherein the aggregation mechanism is housed in the vacuum container.

6. The particle detection device according to claim 2 , wherein the aggregation mechanism is disposed in the second low-temperature container, and is connected to the second temperature maintaining portion.

7. The particle detection device according to claim 1 , wherein the aggregation mechanism is disposed outside the vacuum container.

8. The particle detection device according to claim 1 , further comprising:
a second temperature maintaining portion that maintains a second temperature that is not lower than the first temperature; and
a second low-temperature container that houses the second temperature maintaining portion, and is housed in parallel with the first low-temperature container in the vacuum container.

9. The particle detection device according to claim 1 , wherein a cable is connected to the detector, and a value obtained by dividing a product of a cross-sectional area of a conductive portion of the cable, a temperature difference between both ends of the cable, and heat conductivity of the conductive portion by a length of the cable is equal to or less than 1/10 of cooling capacity in the first temperature maintaining portion.

10. The particle detection device according to claim 1 , wherein the digital signal output from the conversion mechanism has a pulse width of 50 nanoseconds or greater.

11. The particle detection device according to claim 1 , wherein
the plurality of superconducting strips is divided into a plurality of groups, and the conversion mechanism is divided in accordance with the groups, and is arranged in parallel, and
an analog signal generated from the superconducting strips belonging to each group is input to the conversion mechanism corresponding to the group.

12. The particle detection device according to claim 1 , wherein a cable connecting the detector and the conversion mechanism is a flexible printed circuit.

13. The particle detection device according to claim 1 , wherein the conversion mechanism includes: a bias tee that applies a direct current to a corresponding one of the superconducting strips and extracts an output signal of the superconducting strip; an amplifier that amplifies an output of the bias tee; a comparator that determines whether an output of the amplifier is equale to or higher than a threshold, and outputs a digital signal when the output of the amplifier is not lower than the threshold; and a counter that counts outputs from the comparator, a plurality of the bias tees, a plurality of the amplifiers, a plurality of the comparators being provided for the plurality of superconducting trips.

14. An image generation apparatus comprising: the particle detection device according to claim 1 ; the particle generation source; a controller that causes the detector of the particle detection device and a sample to move relative to each other;
and an image generation portion that generates an image of the sample, on a basis of an output of the aggregation mechanism.

15. A particle detection device comprising:
a detector that includes a plurality of superconducting strips, and detects a particle generated from a particle generation source;
a conversion mechanism that includes a plurality of channels provided for the respective superconducting strips, and converts an analog signal from a corresponding one of the superconducting strips into a digital signal;
an aggregation mechanism that includes a circuit which receives an output from the conversion mechanism;
a cable that connects the detector and the conversion mechanism;
a first temperature maintaining portion that maintains a first temperature that is equal to or lower than a superconducting transition temperature;
a first low-temperature container that houses the first temperature maintaining portion;
a second temperature maintaining portion that maintains a second temperature that is equal to or higher than the first temperature; and
a vacuum container that houses the first low-temperature container and the second temperature maintaining portion, and has an opening,
wherein the detector is housed in the first low-temperature container, and is connected to the first temperature maintaining portion,
the cable is connected to the second temperature maintaining portion, and the cable at a portion connected to the second temperature maintaining portion is maintained at the second temperature, and
the aggregation mechanism is disposed outside the first low-temperature container.

16. The particle detection device according to claim 15 , further comprising a connector at a midpoint of the cable connecting the detector and the conversion mechanism, wherein the connector is connected to the second temperature maintaining portion, and is maintained at the second temperature, and an amount of heat propagating through a cable connecting the detector and the connector is smaller than an amount of heat propagating through a cable connecting the connector and the conversion mechanism.

Assignees

• Kioxia Corp

Inventors

• Yamane Takeshi

Classifications

• G01T1/26 Primary

  with resistance detectors · CPC title

• G01N23/04

  and forming images of the material · CPC title

• G01T1/1606 Primary

  with other specified detectors not provided for in the other subgroups of G01T1/16 · CPC title