Excimer lamp

Patent metadata

Field	Value
Publication number	US-11508568-B2
Application number	US-202117352624-A
Country	US
Kind code	B2
Filing date	Jun 21, 2021
Priority date	Jun 23, 2020
Publication date	Nov 22, 2022
Grant date	Nov 22, 2022

Abstract

An excimer lamp includes a housing portion having a sealed internal space, an internal electrode, and a discharge gas with which the internal space is filled. One end side of the internal electrode is electrically connected to a power supply member provided with a metal foil electrically connected to the internal electrode and is sealed together with the power supply member to one end side of the housing portion via a sealing portion. The other end side of the internal electrode protrudes into the internal space. A protrusion length, being a length of the internal electrode in the internal space and a length from one end of the internal space to the other end of the internal electrode, is equal to or less than a length from the other end of the internal electrode to the other end of the internal space in a direction along the axis.

First claim

What is claimed is:

1. An excimer lamp comprising:
a tubular housing portion made of a light-transmitting material, extending along a predetermined axis, and having a sealed internal space;
an internal electrode held on one end side of the housing portion and accommodated in the internal space; and
a discharge gas with which the internal space is filled, wherein
one end side of the internal electrode is electrically connected to a power supply member provided with a metal foil electrically connected to the internal electrode and is sealed together with the power supply member to one end side of the housing portion via a sealing portion,
the other end side of the internal electrode protrudes into the internal space, and
a protrusion length, being a length of the internal electrode in the internal space and a length from one end of the internal space to the other end of the internal electrode, is equal to or less than a length from the other end of the internal electrode to the other end of the internal space in a direction along the axis.

2. The excimer lamp according to claim 1 , wherein the protrusion length is ⅕ or more of a length of the internal space in the direction along the axis.

3. The excimer lamp according to claim 1 , wherein a diameter of the internal electrode is ⅕ or more and ½ or less of an inner diameter of the housing portion.

4. The excimer lamp according to claim 1 , wherein
the power supply member includes a linear metal member electrically connected to the metal foil and led out to an outside of the housing portion, and
a diameter of the linear metal member is smaller than the diameter of the internal electrode.

5. The excimer lamp according to claim 1 , further comprising an external electrode abutting against an outer surface of the housing portion.

6. The excimer lamp according to claim 5 , wherein the external electrode is provided so as to surround the outer surface of the housing portion and has a mesh shape.

7. The excimer lamp according to claim 5 , further comprising a tubular socket made of an insulating material and surrounding one end side of the housing portion,
wherein each of the power supply member and the external electrode is electrically connected to an external power supply member in the socket.

8. The excimer lamp according to claim 7 , wherein an electrical connection portion between the power supply member and the external power supply member and an electrical connection portion between the external electrode and the external power supply member are separated from each other in the direction along the axis.

9. The excimer lamp according to claim 7 , wherein the electrical connection portion between the external electrode and the external power supply member is disposed in another end side opening portion in the socket.

10. The excimer lamp according to claim 9 , wherein one end side of the external electrode extends into the socket and is fixed by a fixing member in the other end side opening portion in the socket.

11. The excimer lamp according to claim 1 , further comprising a lamp accommodating portion made of a metal material and including an insertion hole having an inner diameter corresponding to an outer diameter of the housing portion and a light emitting opening provided in the insertion hole,
wherein an external power supply member is electrically connected to the lamp accommodating portion.

12. The excimer lamp according to claim 1 , wherein the sealing portion is a pinch seal portion sealing one end side of the internal electrode together with the power supply member to one end side of the housing portion with a pinch seal.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Takeuchi Hiroki
• Okura Tomoki

Classifications

• H01J61/04

  Electrodes (for igniting H01J61/54); Screens; Shields · CPC title

• H01J61/368

  Pinched seals or analogous seals · CPC title

• H01J5/54

  supported by a separate part, e.g. base · CPC title

• H01J61/16

  having helium, argon, neon, krypton, or xenon as the principle constituent · CPC title

• H01J61/0672

  characterised by the construction of the electrode · CPC title