Vibration device and optical detection device

Patent metadata

Field	Value
Publication number	US-11503190-B2
Application number	US-202016837054-A
Country	US
Kind code	B2
Filing date	Apr 1, 2020
Priority date	Dec 27, 2017
Publication date	Nov 15, 2022
Grant date	Nov 15, 2022

Abstract

A vibration device includes a light-transmissive body defining a cover that includes a detection region of an imaging element as an optical detection element, a tubular support body which includes an interior space that includes the imaging element and is connected to the light-transmissive body, a vibrating body which is coupled to the support body and vibrates the light-transmissive body with the support body provided therebetween, and a drive circuit which drives the vibrating body.

First claim

What is claimed is:

1. A vibration device comprising:
a dome-shaped cover including a detection region of an optical detection element;
a tubular support body including an interior space in which the optical detection element is provided, the tubular support body being connected to the cover;
a vibrating body coupled to the support body and vibrating the cover with the support body interposed between the vibrating body and the cover; and
a drive circuit, in a case where the cover and the support body are vibrated at the same or substantially the same resonant frequency, in a connection portion where the cover and the support body are connected, driving the vibrating body at the same or substantially the same frequency as the resonant frequency to vibrate the cover and the support body in a vibration mode in which displacement of a portion on a connection portion side of the cover and displacement of a portion on a connection portion side of the support body are in opposite or substantially opposite directions.

2. The vibration device according to claim 1 , wherein a displacement amount of the cover and a displacement amount of the support body are the same or substantially the same in the connection portion.

3. The vibration device according to claim 1 , wherein in the connection portion, the support body includes a cancellation portion where a portion displaced in a displacement direction of the cover and a portion displaced in the direction opposite or substantially opposite to a displacement direction of the cover are adjacent to each other.

4. The vibration device according to claim 3 , wherein the cancellation portion includes a first flange portion and a second flange portion extending in a direction orthogonal or substantially orthogonal to a direction from the support body toward the cover.

5. The vibration device according to claim 4 , wherein at the cancellation portion, the first flange portion and the second flange portion are opposed to each other.

6. The vibration device according to claim 5 , wherein at a portion where the first flange portion and the second flange portion are opposed to each other, the first flange portion is opposed to the second flange portion with a space interposed between the first flange portion and the second flange portion.

7. The vibration device according to claim 6 , wherein the first flange portion and the second flange portion project from an inner peripheral surface of the support body toward the interior space side.

8. The vibration device according to claim 5 , wherein
a coupling portion coupling an inner peripheral edge or an outer peripheral edge of the first flange portion to an inner peripheral edge or an outer peripheral edge of the second flange portion is provided; and
a U-shape is defined in a cross section where the first flange portion, the coupling portion, and the second flange portion are coupled along a direction in which the first and second flange portions are opposed to each other.

9. The vibration device according to claim 4 , wherein the first flange portion and the second flange portion project in an opposite or substantially opposite direction to the coupling portion.

10. The vibration device according to claim 9 , wherein the vibration device includes a coupling portion which connects the first flange portion and the second flange portion and extends in a direction from the support body toward the cover.

11. The vibration device according to claim 9 , wherein another flange portion other than the first flange portion and the second flange portion is provided;
a coupling portion connecting an inner peripheral edge of the first flange portion to an inner peripheral edge of the second flange portion is provided; and
another coupling portion which is different from the coupling portion, and connects an outer peripheral edge of the other flange portion and an outer peripheral edge of the first flange portion, or another coupling portion connecting an outer peripheral edge of the second flange portion and an outer peripheral edge of the other flange portion is provided.

12. The vibration device according to claim 11 , wherein the first flange portion or the second flange portion is opposed to the other flange portion with a space between the first flange portion or the second flange portion and the other flange portion.

13. The vibration device according to claim 12 , wherein a cross section in a direction orthogonal or substantially orthogonal to a circumferential direction of the first flange portion and the second flange portion in a structure in which the first flange portion, the coupling portion, and the second flange portion are coupled to each other has an S-shape or a Z-shape.

14. The vibration device according to claim 4 , wherein a dimension connecting an inner peripheral edge and an outer peripheral edge of the first flange portion and a dimension connecting an inner peripheral edge and an outer peripheral edge of the second flange portion are equal or substantially equal.

15. The vibration device according to claim 14 , wherein a distance between the first flange portion and the second flange portion in a direction from the support body to the cover is smaller than a dimension connecting between the inner peripheral edge and the outer peripheral edge of the first flange portion.

16. The vibration device according to claim 1 , wherein, in a detection region of the optical detection element, there is no region having displacement smaller than a displacement amount of the connection portion.

17. The vibration device according to claim 1 , wherein the vibrating body is a piezoelectric element.

18. The vibration device according to claim 17 , wherein the piezoelectric element is a ring-shaped piezoelectric element, and is fixed to an end surface opposite to a side on which the cover of the support body is provided.

19. The vibration device according to claim 1 , wherein the cover includes a light-transmissive body.

20. An optical detection device comprising:
the vibration device according to claim 1 ; and
an optical detection element provided in at least a portion of an interior space of the support body of the vibration device and including the detection region in the cover.

21. The optical detection device according to claim 20 , wherein the optical detection element is an imaging element, and the detection region is a field of view.

22. The optical detection device according to claim 20 , wherein the optical detection element is an element that optically detects an active energy ray.

23. The optical detection device according to claim 22 , wherein the active energy ray is at least one of an infrared ray and an electromagnetic wave.

24. A vibration device comprising:
a dome-shaped cover including a detection region of an optical detection element;
a tubular support body including an interior space in which the optical detection element is provided, the tubular support body being connected to the cover;
a vibrating body coupled to the support body and vibrating the cover with the support body provided between the vibrating body and the cover; and
a drive circuit, in a case where the cover and the support body are vibrated at the same or substantially the same resonant frequency, driving the vibrating body at the same or substantially the same frequency as the resonant frequency of the support body and the cover, and a node region is located at a connection po

Assignees

• Murata Manufacturing Co

Inventors

• Sakaguchi Hitoshi
• Fujimoto Katsumi

Classifications

• H04N23/52 Primary

  Elements optimising image sensor operation, e.g. for electromagnetic interference [EMI] protection or temperature control by heat transfer or cooling elements · CPC title

• H04N23/55

  Optical parts specially adapted for electronic image sensors; Mounting thereof · CPC title

• H04N23/54

  Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils · CPC title

• B06B1/0651 Primary

  of circular shape · CPC title

• G02B27/0006

  with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B) · CPC title