Calibration standard for geometry calibration of a measurement system operating by tactile and/or optical means, method for calibration, and coordinate measuring machine

Patent metadata

Field	Value
Publication number	US-11499822-B2
Application number	US-202117214586-A
Country	US
Kind code	B2
Filing date	Mar 26, 2021
Priority date	Mar 26, 2020
Publication date	Nov 15, 2022
Grant date	Nov 15, 2022

Abstract

A calibration standard for geometry measurement calibration of a measurement system operating by tactile and/or optical means is provided which includes a flat surface having a structure that is capturable by a measurement system operating by optical and/or tactile means. The structure has a changeable periodicity that is capturable by a sensor in a first direction and/or in a second direction and for a change in the periodicity to code position information and/or direction information. In addition, a method for calibrating a coordinate measuring machine operating by tactile and/or optical means and to a coordinate measuring machine for such a method or having such a calibration standard is provided.

First claim

What is claimed is:

1. A calibration standard for geometry measurement calibration of a measurement system operating by tactile and/or optical means, the calibration standard comprising:
a flat surface having a structure capturable by the measurement system operating by the tactile and/or optical means,
wherein the structure has in at least one of a first direction and a second direction a periodicity that is capturable by a sensor and that changes, and
wherein a change in the periodicity codes at least one of position information and direction information.

2. The calibration standard according to claim 1 , wherein the first direction and the second direction are perpendicular to each other.

3. The calibration standard according to claim 1 , wherein the structure is embodied in at least one of the first direction and the second direction in accordance with a sine function.

4. The calibration standard according to claim 3 , wherein at least one of a frequency and an amplitude of the sine function are modulated with a modulation function.

5. The calibration standard according to claim 4 , wherein the modulation function is a linear function or the sine function.

6. The calibration standard according to claim 5 , wherein the modulation function is the sine function with a linearly changing amplitude.

7. The calibration standard according to claim 3 , wherein for the sine function of the structure a frequency is modulated in the first direction and for the sine function an amplitude is modulated in the second direction.

8. The calibration standard according to claim 1 , wherein a frequency of the periodicity lies at least partially above the frequency that typically occurs when measuring surfaces.

9. A method for calibrating a coordinate measuring machine operating by the tactile and/or optical means on a calibration standard according to claim 1 , the method comprising:
performing the measurement on the structure in one direction; and
evaluating the measurement for decoding at least one of the position information and the direction information.

10. The method according to claim 9 , wherein the calibration standard has a frequency-modulated sine structure in the first direction and an amplitude-modulated sine structure in the second direction, which is perpendicular to the first direction, and wherein the method further comprises determining an envelope of measured structure information.

11. The method according to claim 9 , further comprising comparing at least one of the position information and the direction information with at least one of the position information and the direction information of the coordinate measuring machine.

12. A coordinate measuring system configured to carry out the method according to claim 9 .

13. A coordinate measuring system comprising the calibration standard according to claim 1 .

Assignees

• Zeiss Carl Industrielle Messtechnik Gmbh

Inventors

• Mayinger Philipp
• Held Tobias

Classifications

• G01B21/042 Primary

  Calibration or calibration artifacts (G01B3/30, G01B9/02072 take precedence) · CPC title

• G01B11/005

  coordinate measuring machines · CPC title

• G01B11/303

  using photoelectric detection means · CPC title

• G01B5/008

  using coordinate measuring machines · CPC title

• G01B5/28

  for measuring roughness or irregularity of surfaces · CPC title