Crushed polycrystalline silicon lumps and method for producing same

Patent metadata

Field	Value
Publication number	US-11498840-B2
Application number	US-201917042235-A
Country	US
Kind code	B2
Filing date	Mar 25, 2019
Priority date	Mar 28, 2018
Publication date	Nov 15, 2022
Grant date	Nov 15, 2022

Abstract

A crushed polycrystalline silicon lump is provided in which a surface metal concentration is 15.0 pptw or less and preferably 7.0 to 13.0 pptw, and in the surface metal concentration, a surface tungsten concentration is 0.9 pptw or less and preferably 0.40 to 0.85 pptw, and a surface cobalt concentration is 0.3 pptw or less and preferably 0.04 to 0.08 pptw.

First claim

The invention claimed is:

1. A method for manufacturing a crushed polycrystalline silicon lump, comprising:
a) a step of crushing a polycrystalline silicon rod;
b) a first washing step of contacting a crushed polycrystalline silicon lump of the polycrystalline silicon rod with a fluonitric acid aqueous solution;
c) a second washing step of contacting the crushed polycrystalline silicon lump that has undergone to the first washing step with an alkali aqueous solution containing hydrogen peroxide; and
d) a third washing step of contacting the crushed polycrystalline silicon lump that has undergone the second washing step with the fluonitric acid aqueous solution,
wherein the crushed polycrystalline silicon lump has a surface metal concentration of 9.2 pptw or less, and in the surface metal concentration, a surface tungsten concentration is 0.9 pptw or less, and a surface cobalt concentration is 0.3 pptw or less.

2. The method for manufacturing crushed polycrystalline silicon lump according to claim 1 , wherein in the c) second washing step, an alkaline substance dissolved in the alkali aqueous solution containing hydrogen peroxide is tetramethyl ammonium hydroxide.

3. The method for manufacturing crushed polycrystalline silicon lump according to claim 1 , wherein in the a) step of crushing the polycrystalline silicon rod, a breaking tool in which a material of a striking part is composed of a tungsten carbide/cobalt alloy is used in the crushing.

4. The method for manufacturing a crushed polycrystalline silicon lump according to claim 1 , wherein in the b) first washing step, an etching amount of a surface of each crushed polycrystalline silicon lump is 1.5 to 10.0 μm.

Assignees

• Tokuyama Corp

Inventors

• Nishimura Shigeki

Classifications

• B02C19/0056

  specially adapted for specific materials not otherwise provided for · CPC title

• C01B33/037 Primary

  Purification (by zone-melting C30B13/00) · CPC title

• C01B33/02

  Silicon (forming single crystals or homogeneous polycrystalline material with defined structure C30B) · CPC title

• C01P2006/80

  Compositional purity · CPC title

• B02C25/00

  Control arrangements specially adapted for crushing or disintegrating · CPC title