Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
US-2024234132-A1 · Jul 11, 2024 · US
US11485877B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11485877-B2 |
| Application number | US-202017037168-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 29, 2020 |
| Priority date | Apr 3, 2018 |
| Publication date | Nov 1, 2022 |
| Grant date | Nov 1, 2022 |
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A structure body includes a base material and a siloxane based molecular membrane formed on the base material by use of an organic compound represented by Formula (1) or Formula (2): wherein any one of R1 to R5 is an amino group, others of R1 to R5 are each independently hydrogen or an alkyl group, R7 to R9 are each independently any one of hydroxy group, alkoxy group, alkyl group, and phenyl group on condition that one or more of R7 to R9 are each independently a hydroxy group or an alkoxy group, and R6 is an alkyl group.
Opening claim text (preview).
What is claimed is: 1. A structure body comprising: a base material; a siloxane based molecular membrane formed on the base material by use of p-aminophenyltrimethoxysilane; and a functional molecule bonded to the siloxane based molecular membrane, wherein the functional molecule includes a plurality of functional molecule species, and the functional molecule species bonded to different regions in the siloxane based molecular membrane are different from each other. 2. The structure body according to claim 1 , wherein the functional molecule is directly or indirectly bonded to the amino group included in the p-aminophenyltrimethoxysilane. 3. The structure body according to claim 1 , wherein the functional molecule has a function of being chemically or physically bonded to a specified molecule. 4. The structure body according to claim 1 , wherein the functional molecule is one or more selected from the group consisting of small molecules, complexes, DNAs, peptides, antibodies, and sugar chains. 5. A sensor comprising a structure body, the structure body including: a base material; a siloxane based molecular membrane formed on the base material by use of p-aminophenyltrimethoxysilane; and a functional molecule bonded to the siloxane based molecular membrane, the functional molecule including a plurality of functional molecule species, and the functional molecule species bonded to different regions in the siloxane based molecular membrane are different from each other. 6. A method for producing a structure body that includes a base material and a siloxane based molecular membrane, the method comprising: hydrophilizing a surface of the base material; bringing an organic compound into contact with the surface of the base material, the organic compound being p-aminophenyltrimethoxysilane; and causing a hydrolysis reaction and a dehydration condensation reaction of the organic compound at a temperature of 40° C. or lower to form the siloxane based molecular membrane on the surface of the base material. 7. The method for producing a structure body according to claim 6 , wherein the bringing the organic compound into contact with the surface of the base material includes bringing a saturated solution of the organic compound into contact with the surface of the base material.
Formation of intermediate materials · CPC title
Non-deposition formation processes · CPC title
Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title
by exposure to a liquid · CPC title
the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane · CPC title
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