Optical filter system

Patent metadata

Field	Value
Publication number	US-11480783-B2
Application number	US-201816621919-A
Country	US
Kind code	B2
Filing date	Jun 12, 2018
Priority date	Jun 13, 2017
Publication date	Oct 25, 2022
Grant date	Oct 25, 2022

Abstract

An optical filter system includes a Fabry-Perot interference filter, and a controller that controls the Fabry-Perot interference filter. The Fabry-Perot interference filter includes a first mirror portion, a second mirror portion, a first driving electrode and a first monitor electrode provided with the first mirror portion, and a second driving electrode and a second monitor electrode provided with the second mirror portion. The controller includes a control unit that calculates an electrostatic capacitance between the first mirror portion and the second mirror portion based on an alternating voltage generated between the first monitor electrode and the second monitor electrode while an alternating current is applied between the first monitor electrode and the second monitor electrode.

First claim

The invention claimed is:

1. An optical filter system comprising:
a Fabry-Perot interference filter; and
a controller that controls the Fabry-Perot interference filter,
wherein the Fabry-Perot interference filter includes
a first mirror portion,
a second mirror portion disposed to face the first mirror portion with an air gap interposed therebetween and of which a distance to the first mirror portion in a light transmitting region is adjusted by an electrostatic force,
a first driving electrode provided with the first mirror portion to surround the light transmitting region when seen in a direction in which the first mirror portion and the second mirror portion face each other,
a second driving electrode provided with the second mirror portion to face the first driving electrode,
a first monitor electrode provided with the first mirror portion such that at least a part of the first monitor electrode overlaps the light transmitting region when seen in the direction and electrically insulated from the first driving electrode,
a second monitor electrode provided with the second mirror portion to face the first monitor electrode and electrically insulated from the second driving electrode,
a substrate, a first laminate including the first mirror portion disposed on the substrate, a second laminate including the second mirror portion that faces the first mirror portion with the air gap interposed therebetween on a side opposite to the substrate, and an intermediate layer disposed between the first laminate and the second laminate and defining the air gap, and
the first driving electrode is formed in a layer included in the first laminate, and the second driving electrode is formed in a layer included in the second laminate,

wherein the controller includes
a first current source that generates the electrostatic force by applying a driving current between the first driving electrode and the second driving electrode,
a second current source that applies an alternating current between the first monitor electrode and the second monitor electrode, the alternating current having a frequency higher than resonance frequencies of the first mirror portion and the second mirror portion,
a detection unit that detects an alternating voltage generated between the first monitor electrode and the second monitor electrode while the alternating current is applied, and
a control unit that controls the first current source based on an amount of electric charge stored between the first mirror portion and the second mirror portion and calculates an electrostatic capacitance between the first mirror portion and the second mirror portion based on the detection result of the detection unit,
wherein the control unit controls the second current source so as to apply the alternating current between the first monitor electrode and the second monitor electrode, the alternating current having a frequency set to be more than ten times higher than resonance frequencies of the first mirror portion and the second mirror portion.

2. The optical filter system according to claim 1 ,
wherein the first driving electrode is exposed to the air gap.

3. The optical filter system according to claim 1 ,
wherein the second driving electrode is disposed on a surface on a side opposite to the air gap of the second mirror portion.

4. The optical filter system according to claim 1 ,
wherein the second driving electrode is exposed to the air gap.

5. The optical filter system according to claim 1 ,
wherein the first monitor electrode is exposed to the air gap.

6. The optical filter system according to claim 1 ,
wherein the second monitor electrode is exposed to the air gap.

7. The optical filter system according to claim 1 ,
wherein the second monitor electrode is disposed on a surface on a side opposite to the air gap of the second mirror portion.

8. The optical filter system according claim 1 ,
wherein the second driving electrode and the second monitor electrode are separated from each other in the direction.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Teichmann Helmut
• DURANDI Andreas
• Seitz Peter
• Kasahara Takashi
• Shibayama Katsumi

Classifications

• G02B26/001 Primary

  based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26) · CPC title

• G01J3/26 Primary

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title

• G02B5/284

  of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates (etalons for fibre optic multiplexing G02B6/29358; etalons for spectral measurement G01J3/26) · CPC title

• G02B26/00 Primary

  Optical devices or arrangements for the control of light using movable or deformable optical elements (control of light by modification of the optical properties of the media of the elements involved therein G02F1/00) · CPC title