Laser beam output apparatus

Patent metadata

Field	Value
Publication number	US-11476629-B2
Application number	US-202117199819-A
Country	US
Kind code	B2
Filing date	Mar 12, 2021
Priority date	Mar 27, 2020
Publication date	Oct 18, 2022
Grant date	Oct 18, 2022

Abstract

A pulsed laser output section outputs a laser beam having a predetermined wavelength as first pulses. An optical path determining section receives the first pulses and determines one among a plurality of optical paths for each of the first pulses for output. A parallelizing section parallelizes a traveling direction of light beams traveling, respectively, through the plurality of optical paths. A wavelength changing section receives outputs from the parallelizing section and changes the outputs to have different wavelengths for output. A focusing section receives and focuses outputs from the wavelength changing section. An optical fiber receives an output from the focusing section at a core end face. A timing control section is arranged to time outputs from the optical path determining section to the output of the first pulses. The focusing section is arranged to focus the outputs from the wavelength changing section on the core end face.

First claim

What is claimed is:

1. A laser beam output apparatus, comprising:
a pulsed laser output section that outputs a laser beam having a predetermined wavelength as first pulses;
an optical path determining section that receives the first pulses and determines one among a plurality of optical paths for each of the first pulses for output;
a parallelizing section that parallelizes a traveling direction of light beams traveling, respectively, through the plurality of optical paths;
a wavelength changing section that receives outputs from the parallelizing section and changes the outputs to have different wavelengths for output;
a focusing section that receives and focuses outputs from the wavelength changing section;
an optical fiber that receives an output from the focusing section at a core end face; and
a timing control section arranged to time outputs from the optical path determining section to the output of the first pulses, wherein
the focusing section is arranged to focus the outputs from the wavelength changing section on the core end face.

2. The laser beam output apparatus according to claim 1 , wherein
the parallelizing section is a convex lens.

3. The laser beam output apparatus according to claim 2 , wherein
one of outputs from the optical path determining section passes through an optical axis of the parallelizing section.

4. The laser beam output apparatus according to claim 1 , wherein
the focusing section is a convex lens.

5. The laser beam output apparatus according to claim 4 , wherein
NA>Ymax/(2f), where f represents a focal length of the focusing section, Ymax represents a maximum distance between the outputs from the parallelizing section, and NA represents a numerical aperture of the optical fiber.

6. The laser beam output apparatus according to claim 1 , wherein
the focusing section is an achromatic lens.

7. The laser beam output apparatus according to claim 6 , wherein
NA>Ymax/(2f), where f represents the focal length of the focusing section, Ymax represents a maximum distance between the outputs from the parallelizing section, and NA represents a numerical aperture of the optical fiber.

8. The laser beam output apparatus according to claim 1 , wherein
the wavelength changing section has polarization reversed sections through which the outputs from the parallelizing section propagate, the polarization reversed sections being arranged at a predetermined spacing, and
the predetermined spacing varies depending on the outputs from the parallelizing section.

9. The laser beam output apparatus according to claim 8 , wherein
the wavelength changing section has a non-linear optical crystal substrate with the polarization reversed sections formed thereon, and
graphical centers of the polarization reversed sections are arranged on a straight line parallel to an X axis of the non-linear optical crystal substrate.

10. The laser beam output apparatus according to claim 8 , wherein
the wavelength changing section has a single non-linear optical crystal substrate with all of the polarization reversed sections formed thereon.

11. The laser beam output apparatus according to claim 10 , wherein
all of the outputs from the parallelizing section pass through shared polarization reversed sections.

12. The laser beam output apparatus according to claim 8 , wherein
the wavelength changing section has a non-linear optical crystal substrate with the polarization reversed sections formed thereon, and
the non-linear optical crystal substrate is provided for each of the outputs from the parallelizing section propagating therethrough.

13. The laser beam output apparatus according to claim 1 , wherein
the optical path determining section has:
a first acousto-optical modulator arranged to receive the first pulses and determine one among the plurality of optical paths for each of the first pulses for output; and
a second acousto-optical modulator arranged to receive output pulses from the first acousto-optical modulator and determine one among one or more optical paths for each of the output pulses from the first acousto-optical modulator for output.

14. The laser beam output apparatus according to claim 13 , wherein
the first acousto-optical modulator is arranged to diffract or directly advance each of the first pulses for output, and
the second acousto-optical modulator is arranged to receive and diffract or directly advance directly advanced ones of the first pulses for output, while receiving and directly advancing diffracted ones of the first pulses for output.

15. The laser beam output apparatus according to claim 13 , wherein
the first acousto-optical modulator is arranged to diffract or directly advance each of the first pulses for output, and
the second acousto-optical modulator is arranged to receive and diffract or directly advance diffracted ones of the first pulses for output, while receiving and directly advancing directly advanced ones of the first pulses for output.

Assignees

• Advantest Corp

Inventors

• Sakurai Takao

Classifications

• G02B6/4204

  the coupling comprising intermediate optical elements, e.g. lenses, holograms (encapsulated active devices H01S5/02208) · CPC title

• G02B6/32

  having lens focusing means {positioned between opposed fibre ends (with lens being an integral part of the single fibre end G02B6/262)} · CPC title

• G02F1/33

  Acousto-optical deflection devices {(circuit or control arrangements therefor G02F1/113)} · CPC title

• H01S3/005

  Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping (shaping laser beam for working metal or other materials B23K26/06; optical elements, systems or apparatus in general G02B) · CPC title

• G02F1/3548

  Quasi phase matching [QPM], e.g. using a periodic domain inverted structure · CPC title