ESD protection of MEMS for RF applications

Patent metadata

Field	Value
Publication number	US-11476245-B2
Application number	US-201615771245-A
Country	US
Kind code	B2
Filing date	Nov 14, 2016
Priority date	Nov 16, 2015
Publication date	Oct 18, 2022
Grant date	Oct 18, 2022

Abstract

The present disclosure generally relates to the combination of MEMS intrinsic technology with specifically designed solid state ESD protection circuits in state of the art solid state technology for RF applications. Using ESD protection in MEMS devices has some level of complexity in the integration which can be seen by some as a disadvantage. However, the net benefits in the level of overall performance for insertion loss, isolation and linearity outweighs the disadvantages.

First claim

The invention claimed is:

1. A device, comprising:
a plurality of micro-electromechanical systems (MEMS) devices connected in parallel between a radio frequency (RF) electrode and ground, wherein each of the plurality of MEMS devices is configured to be switched at a same time by applying a voltage to a common pull-down electrode; and
a first electrostatic discharge (ESD) device coupled in parallel to the plurality of MEMS devices between the RF electrode and ground, wherein the plurality of MEMS devices are arranged on a substrate and the first ESD device is an element that is positioned separate from the substrate.

2. A device, comprising:
a plurality of micro-electromechanical systems (MEMS) devices connected in parallel between a first radio frequency (RF) electrode and a second RF electrode, wherein each of the plurality of MEMS devices is configured to be switched at a same time by applying a voltage to a common pull-down electrode; and
a first electrostatic discharge (ESD) device coupled between the second RF electrode and ground, wherein the plurality of MEMS devices are arranged on a substrate and the first ESD device is an element that is positioned separate from the substrate.

3. The device of claim 2 , further comprising a second ESD device coupled in parallel to the plurality of MEMS devices between the first RF electrode and the second RF electrode.

4. The device of claim 3 , further comprising a third ESD device connected between ground and the first RF electrode.

5. The device of claim 2 , further comprising a second ESD device connected between ground and the first RF electrode.

6. The device of claim 1 , wherein the first ESD device is arranged on a second substrate.

7. The device of claim 6 , wherein the second substrate comprises a plurality of pairs of connection pads, wherein the first ESD device and a first MEMS device of the plurality of MEMS devices are coupled between a first pair of the plurality of pairs of connection pads.

8. The device of claim 6 , wherein the second substrate comprises a plurality of connection pads and a floating common node, wherein the first ESD device and a first MEMS device of the plurality of MEMS devices are coupled between one of the plurality of connection pads and the floating common node.

9. The device of claim 1 , further comprising a timing control circuit coupled to the first ESD device.

10. A device, comprising:
a plurality of micro-electromechanical systems (MEMS) devices, wherein each MEMS device of the plurality of MEMS devices is connected in parallel between a first radio frequency (RF) electrode and a second RF electrode, wherein each of the plurality of MEMS devices is configured to be switched at a same time by applying a voltage to a common pull-down electrode; and
a first electrostatic discharge (ESD) device coupled between the first RF electrode and ground, wherein the plurality of MEMS devices are arranged on a substrate and the first ESD device is an element that is positioned separate from the substrate.

11. The device of claim 10 , wherein each MEMS device includes a second ESD device coupled in parallel between the first RF electrode and the corresponding second RF electrode.

12. The device of claim 11 , wherein each MEMS device includes a third ESD device coupled between the second RF electrode and ground.

13. The device of claim 10 , wherein each MEMS device includes a second ESD device coupled between the second RF electrode and ground.

14. A device, comprising:
a plurality of micro-electromechanical systems (MEMS) devices connected in parallel between a first radio frequency (RF) electrode and a second RF electrode, wherein each of the plurality of MEMS devices is configured to be switched at a same time by applying a voltage to a common pull-down electrode;
a first electrostatic discharge (ESD) device coupled between the first RF electrode and ground; and
a second ESD device coupled between the second RF electrode and ground, wherein the plurality of MEMS devices are arranged on a substrate and the first ESD device and the second ESD device are provided as elements that are positioned separate from the substrate.

15. A device, comprising:
a first radio frequency (RF) electrode;
a plurality of second RF electrodes, wherein a switch is present between each second RF electrode and the first RF electrode;
a first electrostatic discharge (ESD) device coupled between each second RF electrode and each switch;
a second ESD device coupled between each switch and the first RF electrode; and
a third ESD device serially coupled between ground and each first ESD device and the second ESD device, wherein a plurality of micro-electromechanical systems (MEMS) devices are arranged on a substrate and the first ESD device, the second EDS device, and the third ESD device are provided as elements that are positioned separate from the substrate.

Assignees

• Cavendish Kinetics Inc
• Qorvo Us Inc

Inventors

• Gaddi Roberto
• Huffman James Douglas
• Niu Chenhui
• Parkhurst Ray

Classifications

• H01H9/54

  Circuit arrangements not adapted to a particular application of the switching device and for which no provision exists elsewhere · CPC title

• H01H59/0009 Primary

  making use of micromechanics · CPC title

• B81B2207/99

  Microstructural systems or auxiliary parts thereof not provided for in B81B2207/01 - B81B2207/115 · CPC title

• H01H2239/008

  Static electricity considerations · CPC title

• H01H1/0036 Primary

  Switches making use of microelectromechanical systems [MEMS] (for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009) · CPC title