Optical element and method of making an optical element

Patent metadata

Field	Value
Publication number	US-11474281-B2
Application number	US-202016878321-A
Country	US
Kind code	B2
Filing date	May 19, 2020
Priority date	Jun 3, 2016
Publication date	Oct 18, 2022
Grant date	Oct 18, 2022

Abstract

A method for producing an optical element having a main body with a first side surface, which has a first optical coating, and at least one second side surface, which is not plane-parallel to the first side surface and has a second optical coating, is proposed. The method includes the steps of: determining the stress induced in the optical element by the first optical coating of the first side surface; determining a counter-stress, so that the resultant overall stress induced in the optical element is as small as possible; determining the second optical coating while taking into account the determined counter-stress and the optical parameters of the second optical coating; applying the first optical coating on the first side surface; and, applying the second optical coating on the at least one second side surface.

First claim

What is claimed is:

1. A method for making an optical element having a main body with a first side surface, which has a first optical coating, and at least one second side surface, which is not plane-parallel to the first side surface and has a second optical coating, the method comprising the steps of:
determining the stress induced in the optical element by the first optical coating of the first side surface;
determining a counter-stress, so that the resultant overall stress induced in the optical element is as small as possible;
determining the second optical coating while taking into account the determined counter-stress and the optical parameters of the second optical coating;
applying the first optical coating on the first side surface; and,
applying the second optical coating on the at least one second side surface.

2. The method of claim 1 , wherein the second optical coating is determined under the condition that the RMS value of at least one of the first side surface and the second side surface with the respective coating is limited to a maximum of 10% of at least one of the main wavelength and its Strehl ratio or their Strehl ratios is or are at least 0.8.

3. The method of claim 1 , wherein methods of calculation of the finite element method are used for at least one of determining the counter-stress, determining the stress induced by the optical coating of the first side surface in the optical element and determining the second coating.

4. The method of claim 1 , further comprising the steps of:
experimentally ascertaining an overall stress actually induced in the optical element after applying the first optical coating on the first side surface and the second optical coating on the at least one second side surface;
comparing the overall stress actually induced to a desired overall stress; and,
locally working at least one of the first optical coating, the second optical coating, and a further side surface of the optical element in the case of a deviation between the overall stress actually induced and the desired overall stress.

5. The method of claim 4 , wherein the local working is carried out via magnetorheological polishing or ion-beam polishing.

6. The method of claim 4 , wherein said locally working at least one of the first optical coating, the second optical coating, and a further side surface of the optical element is performed in case of the deviation being above a threshold.

7. The method of claim 1 further comprising the step of modifying the main body of the optical element.

8. The method of claim 1 , wherein the optical coatings are applied by ion- or plasma-assisted physical deposition from the vapor phase or by sputtering.

9. The method of claim 1 , wherein the optical element is configured for operation in at least one of an infrared wavelength range and a visible wavelength range.

10. The method of claim 1 , wherein said determining the stress induced in the optical element by the first optical coating of the first side surface is achieved by measuring the stress on a prototype of the optical element.

11. The method of claim 1 , wherein said determining the stress induced in the optical element by the first optical coating of the first side surface is achieved by simulation calculations.

Assignees

• Zeiss Carl Meditec Ag

Inventors

• Beder Christian
• Zaczek Christoph
• Gaber Erwin
• Tonova Diana
• Sundermann Michael

Classifications

• G02F1/09

  based on magneto-optical elements, e.g. exhibiting Faraday effect · CPC title

• G02B27/0012

  Optical design, e.g. procedures, algorithms, optimisation routines · CPC title

• G02B5/04

  Prisms · CPC title

• G02B1/10 Primary

  Optical coatings produced by application to, or surface treatment of, optical elements (G02B1/08 takes precedence) · CPC title

• G02F1/0102

  Constructional details, not otherwise provided for in this subclass · CPC title