Handle Substrate, Composite Substrate for Semiconductor, and Semiconductor Circuit Board and Method for Manufacturing the Same
US-2016005643-A1 · Jan 7, 2016 · US
US11472712B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11472712-B2 |
| Application number | US-201716313510-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 13, 2017 |
| Priority date | Jun 29, 2016 |
| Publication date | Oct 18, 2022 |
| Grant date | Oct 18, 2022 |
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Provided is a metal oxide production apparatus that implements a flux evaporation method. The production apparatus includes a firing furnace configured to subject a metal compound to firing in the presence of flux, a cooling pipe connected to the firing furnace and configured to convert vaporized flux resulting from the firing into powder, and a recovery means configured to recover powdered flux converted in the cooling pipe. Furthermore, provided is a metal oxide production method comprising a step (1) of subjecting a metal compound to firing in the presence of flux and obtaining a metal oxide and vaporized flux, a step (2) of converting the vaporized flux into powder by cooling the vaporized flux, and a step (3) of recovering powdered flux resulting from the converting.
Opening claim text (preview).
The invention claimed is: 1. A metal oxide production apparatus that implements a flux evaporation method, the production apparatus comprising: a firing furnace configured to subject a metal compound to firing in a saggar in the presence of flux; a cooling pipe connected to the firing furnace and configured to convert vaporized flux resulting from the firing into powder; a recovery means configured to recover powdered flux converted in the cooling pipe; and a suction device, the suction device being a first blowing means configured to blow gas into the cooling pipe, the suction device being configured to perform suctioning to cause gas to be blown in the cooling pipe. 2. The production apparatus according to claim 1 , wherein the recovery means comprises a dust collector. 3. The production apparatus according to claim 1 , wherein the cooling pipe includes an outside air supply port. 4. The production apparatus according to claim 1 , wherein the suction device is connected to the recovery means. 5. The production apparatus according to claim 1 , wherein the firing furnace comprises at least one second blowing means. 6. The production apparatus according to claim 2 , wherein the cooling pipe includes an outside air supply port. 7. The production apparatus according to claim 2 , wherein the firing furnace comprises at least one second blowing means. 8. The production apparatus according to claim 3 , wherein the firing furnace comprises at least one second blowing means. 9. The production apparatus according to claim 4 , wherein the firing furnace comprises at least one second blowing means. 10. The production apparatus according to claim 6 , wherein the firing furnace comprises at least one second blowing means.
by d-values or two theta-values, e.g. as X-ray diagram · CPC title
Oxides; Hydroxides · CPC title
obtained by SEM · CPC title
Surface area · CPC title
Aluminium oxide; Aluminium hydroxide; Aluminates · CPC title
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