Substrate polishing apparatus

Patent metadata

Field	Value
Publication number	US-11472002-B2
Application number	US-202016784757-A
Country	US
Kind code	B2
Filing date	Feb 7, 2020
Priority date	Apr 30, 2014
Publication date	Oct 18, 2022
Grant date	Oct 18, 2022

Abstract

A substrate polishing apparatus includes a polishing table 30 having a polishing surface 10 in the upper surface, a substrate holding portion 31 that holds a substrate W having a surface to be polished in the lower surface, and a holding portion cover 36 that covers the outer side of the substrate holding portion 31 . Between the lower portion of the holding portion cover 36 and the upper surface of the polishing table 30 , a gap portion for intake 37 is provided, and in the upper portion of the holding portion cover 36 , a pipe for exhaust 39 connected to an exhaust mechanism 38 is provided. By operating the exhaust mechanism 38 , a rising air current from the gap portion 37 toward the pipe 39 is formed between the outer surface of the substrate holding portion 31 and the inner surface of the holding portion cover 36.

First claim

What is claimed is:

1. A substrate polishing apparatus, comprising:
a rotating polishing table comprising a polishing face on the rotating polishing table;
a substrate holding portion that holds a substrate and presses the substrate against the polishing table to polish the substrate; and
a local exhaust mechanism configured to suck a gas,
wherein the local exhaust mechanism comprises an intake head disposed near the substrate holding portion,
wherein the intake head is disposed on a downstream side of the substrate holding portion in a rotation direction of the polishing table,
wherein the intake head comprises at least one inlet whose opening is facing upward, and
wherein a bottom end of an ejector is vertically connected to an inlet of the intake head, and the gas moves upward into the local exhaust mechanism.

2. The substrate polishing apparatus according to claim 1 , wherein
an intake air speed of the intake head is set to be higher than a rotation speed of the polishing table.

3. The substrate polishing apparatus according to claim 2 , wherein
the intake head comprises a plurality of inlets arrayed in a radial direction of the polishing table,
an intake air speed of the inlet of the plurality of inlets on the outer side in a radial direction is set to be higher than that on the inner side in the radial direction.

4. The substrate polishing apparatus according to claim 1 , wherein the gas is a hazardous gas generated when the wafer is polished, or the gas is a gas made to flow by an air current swirl flow generated from rotation of the polishing table.

5. The substrate polishing apparatus according to claim 1 , wherein the intake head is arranged above the polishing face.

6. A substrate polishing apparatus, comprising:
a rotating polishing table comprising a polishing face on the rotating polishing table;
a substrate holding portion that holds a substrate and presses the substrate against a polishing table to polish the substrate;
a pad cooling nozzle for cooling a polishing pad that polishes the substrate, the pad cooling nozzle being configured to spray a cooling gas,
wherein an output of the pad cooling nozzle is directed downstream in a rotation direction; and
a local exhaust mechanism configured to suck the cooling gas, wherein the local exhaust mechanism comprises an intake head, the output of the pad cooling nozzle facing the local exhaust mechanism,
wherein the intake head is disposed on a downstream side of the pad cooling nozzle in a rotation direction of the polishing table, and
wherein an ejector is connected to the intake head.

7. The substrate polishing apparatus according to claim 6 , comprising:
a second local exhaust mechanism comprises a second intake head is disposed near the substrate holding portion, wherein
the second intake head is disposed on the downstream side of the substrate holding portion in the rotation direction of the polishing table.

8. The substrate polishing apparatus according to claim 6 , wherein the gas is a hazardous gas generated when the wafer is polished, or the gas is a gas made to flow by an air current swirl flow generated from rotation of the polishing table.

9. The substrate polishing apparatus according to claim 6 , wherein the intake head is arranged above the polishing face.

10. A substrate processing apparatus, comprising:
a polishing portion covered by a partition wall;
a cleaning portion; and
a transport mechanism that transports a substrate between the polishing portion and the cleaning portion;
wherein the polishing portion comprises:
a polishing table having a polishing surface in an upper surface;
a substrate holding portion that holds a substrate having a surface to be polished in a lower surface and presses the surface to be polished of the substrate against the polishing surface of the polishing table to polish the surface to be polished of the substrate; and
a shielding mechanism located between the polishing table and the partition wall, the shielding mechanism covering an outer side surface of the substrate holding portion and an outer side surface of the polishing table, wherein the shielding mechanism includes an opening portion on a side wall for allowing the substrate to pass through the shielding mechanism,
wherein a top of the opening portion is higher than the polishing table, and a bottom of the opening portion is lower than the polishing surface of the polishing table.

11. The substrate processing apparatus according to claim 10 , wherein the shielding mechanism is one of a vinyl curtain, panels and bellows.

Assignees

• Ebara Corp

Inventors

• Shinozaki Hiroyuki
• Aono Hiroshi
• Sone Tadakazu
• Shinkai Kenji
• Aizawa Hideo

Classifications

• H10P95/06

  Planarisation of inorganic insulating materials · CPC title

• H10P95/04

  Planarisation of conductive or resistive materials · CPC title

• H10P52/402

  of semiconductor materials · CPC title

• H10W20/062

  by smoothing of conductive parts, e.g. by planarisation · CPC title

• B24B55/12

  Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like · CPC title