Method for laser machining inside materials
US-2020164470-A1 · May 28, 2020 · US
US11467337B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11467337-B2 |
| Application number | US-201816636364-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 7, 2018 |
| Priority date | Aug 7, 2017 |
| Publication date | Oct 11, 2022 |
| Grant date | Oct 11, 2022 |
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Method of laser modifying an optical fibre to form a modified region at a target location within the fibre, comprising positioning at least a portion of an optical fibre in a laser system for modification by a laser, applying a correction to an active optical element of the laser system to modify wavefront properties of the laser to counteract an effect of aberration on laser focus, and laser modifying the optical fibre at the target location using the laser with the corrected wavefront properties to produce the modified region.
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The invention claimed is: 1. A method of laser modifying an optical fibre to form a modified region at a target location within the fibre, comprising: positioning at least a portion of an optical fibre in a laser system for modification by a laser; determining a correction to be applied to an active optical element of the laser system based at least upon characteristics of the optical fibre; applying the correction to the active optical element of the laser system to modify wavefront properties of the laser to counteract an effect of aberration of the fibre on laser focus, wherein applying the correction to the active optical element comprises applying the correction to the active optical element to modify wavefront properties of the laser to counteract an effect of spherical aberration on laser focus or of coma on laser focus or both spherical aberration and coma on laser focus; and laser modifying the optical fibre at the target location using the laser with the corrected wavefront properties to produce the modified region. 2. A method as claimed in claim 1 , wherein the step of determining the correction comprises determining the correction based upon the position of the target location within the fibre. 3. A method as claimed in claim 1 wherein the step of applying the correction to the active optical element comprises applying the correction to the active optical element to modify wavefront properties of the laser to counteract an effect of astigmatic aberration on laser focus. 4. A method as claimed in claim 1 , comprising determining at least one characteristics of the optical fibre and determining the correction based at least upon said at least one characteristic. 5. A method as claimed in claim 1 , comprising changing the correction based upon a change of the target location within the optical fibre. 6. A method as claimed in claim 1 , comprising modifying a plurality of regions which are spatially separated from one another within a transverse cross-section of the fibre. 7. A method as claimed in claim 1 , wherein the correction counteracts an effect of aberration on laser focus caused by refraction at a plurality of optical interfaces of the fibre. 8. A method as claimed in claim 1 , wherein the correction counteracts an effect of astigmatic aberration on laser focus caused by the outer surface of the fibre, and/or an effect of astigmatic aberration on laser focus caused by an interface between a fibre core and cladding surrounding the fibre core. 9. A method as claimed in claim 1 , wherein the correction counteracts an effect of coma on laser focus caused by the outer surface of the fibre, and/or an effect of coma on laser focus caused by an interface between a fibre core and cladding surrounding the fibre core. 10. A method as claimed in claim 1 , comprising modifying a region of the fibre proximate a channel within the fibre. 11. A method as claimed in claim 1 , wherein the correction is a phase field comprising a discontinuity for applying different corrections to rays incident on different parts of the fibre. 12. A method as claimed in claim 1 , comprising using a dry objective lens. 13. A method as claimed in claim 1 , comprising etching the laser modified region to form a micro-channel. 14. A method of laser modifying an optical fibre to form a modified region at a target location within the fibre, comprising: positioning at least a portion of an optical fibre in a laser system for modification by a laser; determining a correction to be applied to an active optical element of the laser system based at least upon characteristics of the optical fibre; applying the correction to the active optical element of the laser system to modify wavefront properties of the laser to counteract an effect of aberration of the fibre on laser focus; and laser modifying the optical fibre at the target location using the laser with the corrected wavefront properties to produce the modified region; wherein the focus of the corrected laser has a Strehl ratio of at least 0.5. 15. A method of laser modifying an optical fibre to form a modified region at a target location within the fibre, comprising: positioning at least a portion of an optical fibre in a laser system for modification by a laser; determining a correction to be applied to an active optical element of the laser system based at least upon characteristics of the optical fibre; applying the correction to the active optical element of the laser system to modify wavefront properties of the laser to counteract an effect of aberration of the fibre on laser focus; laser modifying the optical fibre at the target location using the laser with the corrected wavefront properties to produce the modified region; measuring the laser focus within the optical fibre and determining the correction based at least upon that measurement. 16. A method of laser modifying an optical fibre to form a modified region at a target location within the fibre, comprising: positioning at least a portion of an optical fibre in a laser system for modification by a laser; determining a correction to be applied to an active optical element of the laser system based at least upon characteristics of the optical fibre; applying the correction to the active optical element of the laser system to modify wavefront properties of the laser to counteract an effect of aberration of the fibre on laser focus; and laser modifying the optical fibre at the target location using the laser with the corrected wavefront properties to produce the modified region; wherein producing the modified region comprises forming at least a section of an optical core of the fibre; and/or wherein the method comprises forming a plurality of sections of optical cores. 17. A method of laser modifying an optical fibre to form a modified region at a target location within the fibre, comprising: positioning at least a portion of an optical fibre in a laser system for modification by a laser; determining a correction to be applied to an active optical element of the laser system based at least upon characteristics of the optical fibre; applying the correction to the active optical element of the laser system to modify wavefront properties of the laser to counteract an effect of aberration of the fibre on laser focus; laser modifying the optical fibre at the target location using the laser with the corrected wavefront properties to produce the modified region; and forming the modified region within an optical core of the optical fibre. 18. A method as claimed in claim 17 , comprising translating the optical fibre during modification thereof; and/or comprising rotating the optical fibre about its longitudinal axis. 19. A method as claimed in claim 17 , comprising forming a fibre Bragg grating within the fibre. 20. A method as claimed in claim 17 , wherein the optical fibre comprises at least one of a sapphire fibre, a photonic crystal fibre, a polymer fibre, a silica fibre, a hydrogel fibre, a high refractive index optical fibre, a non-cylindrical optical fibre, a multimode fibre, a polarisation maintaining fibre, an air-hole fibre, or a multi-core fibre. 21. A method of laser modifying an optical fibre to form a modified region at a target location within the fibre, comprising: positioning at least a portion of an optical fibre in a laser system for modification by a laser; determining a correction to be applied to an active optical element of the laser system based at least upon characteri
Grating written by radiation passing through the protective fibre coating · CPC title
characterised by the method of manufacture of the grating (photolithography G03F7/0005) · CPC title
Point by point fabrication, i.e. grating elements induced one step at a time along the fibre, e.g. by scanning a laser beam, arc discharge scanning (G02B6/02133 and G02B6/02142 take precedence) · CPC title
Core having higher refractive index than cladding, e.g. solid core, effective index guiding · CPC title
Plurality of longitudinal structures extending along optical fibre axis, e.g. holes · CPC title
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